Acoustic resonator
An acoustic resonator includes: a substrate; a resonant region including a first electrode, a piezoelectric layer, and a second electrode disposed on the substrate, and a reflective layer disposed along a periphery of the resonant region; and a connection electrode extending from the second electrode. The reflective layer includes a second section disposed between the resonant region and the connection electrode, and a first section, and a cross-sectional area of the first section is different than a cross-sectional area of the second section.
1. An acoustic resonator comprising:
a substrate;
a resonant region including a first electrode, a piezoelectric layer, and a second electrode disposed on the substrate, and a reflective layer disposed along a periphery of the resonant region; and
a connection electrode extending from the second electrode,
wherein
the reflective layer includes a second section disposed between the resonant region and the connection electrode, and a first section disposed outside of a region in which the connection electrode extends, and
a cross-sectional area of the first section is different than a cross-sectional area of the second section.
2. The acoustic resonator of claim 1 , wherein
the first section and the second section have a same thickness, and
the second section includes a reference portion and a projection protruding from the reference portion toward a center of the resonant region.
3. The acoustic resonator of claim 2 , wherein the projection protrudes from the reference portion along a boundary between a resonant portion, which includes the resonant region, and the connection electrode.
4. The acoustic resonator of claim 1 , wherein the second section of the reflective layer has a greater width than the first section of the reflective layer.
5. The acoustic resonator of claim 1 , wherein at least a portion of the reflective layer is disposed between the first electrode and the piezoelectric layer.
6. The acoustic resonator of claim 5 , wherein the second electrode has an end disposed within a reflective portion, which includes the reflective layer.
7. The acoustic resonator of claim 6 , wherein the reflective layer is formed of a material different from a material of which the piezoelectric layer is formed.
8. The acoustic resonator of claim 1 , wherein the reflective layer is laminated on a side of the second electrode that is opposite of the substrate.
9. The acoustic resonator of claim 8 , wherein the first section of the reflective layer is laminated on the piezoelectric layer and is disposed to be in contact with an end of the second electrode.
10. The acoustic resonator of claim 9 , wherein the reflective layer is configured to have a first thickness in the first section that is different from a second thickness in the second section.
11. The acoustic resonator of claim 1 , wherein the reflective layer is disposed between the piezoelectric layer and the second electrode.
12. The acoustic resonator of claim 1 , wherein the reflective layer is configured to have a continuous annular shape.
13. The acoustic resonator of claim 1 , wherein the reflective layer is formed of a material different from a material of which the piezoelectric layer is formed.
14. An acoustic resonator comprising:
a substrate; and
a resonant region including a first electrode, a piezoelectric layer, and a second electrode laminated on the substrate, and a reflective layer is disposed along a periphery of the resonant region in an annular shape,
wherein the reflective layer is disposed between the piezoelectric layer and the substrate, and the reflective layer includes a first section having a first width and a second section having a second width that is different than the first width.
15. The acoustic resonator of claim 14 , wherein the second section of the reflective layer comprises a projection protruding toward a center of the resonant region.
16. An apparatus comprising:
an acoustic resonator including:
a first electrode,
a piezoelectric layer above the first electrode,
a second electrode above the piezoelectric layer,
a reflective layer disposed along a periphery of a resonant region in which the first electrode, the piezoelectric layer, and the second electrode are stacked, and
a connection electrode extending from the second electrode,
wherein the reflective layer comprises a first material in a first section and a comprises a second material in a second section corresponding to a boundary between the connection electrode and the second electrode, the first material being different than the second material.
17. The apparatus of claim 16 , wherein the first section of the reflective layer has a first width and the second section of the reflective layer has a second width, the first width being different than the second width.
18. The apparatus of claim 16 , wherein the periphery of the resonant region is outside of the resonant region.