IP Library › Granted Patent US 11,567,069
Granted Patent B2
US 11,567,069 · App. 17/071,578 · Granted Jan 31, 2023

Metal microscopic structure and detection device

Inventors: Takashi Kanno (Hyogo, JP); Hiroto Yanagawa (Osaka, JP)
Assignee: PANASONIC INTELLECTUAL. PROPERTY MANAGEMENT CO., LTD.
G01N33/54386G01N21/648G01N21/6428G01N21/6458G01N33/54373G01N33/553G02B5/008B82Y15/00G01N2021/6441G01N2333/005
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Quick Facts
Patent No.
US 11,567,069
App. No.
17/071,578
Granted
Jan 31, 2023
Kind
B2
Abstract

One non-limiting and exemplary embodiment provides a metal microscopic structure capable of detecting a low-concentration analyte with high sensitivity. The metal microscopic structure includes a base member including multiple protrusions arrayed at predetermined intervals, and multiple projections made of a metal film covering the base member and configured to generate surface plasmons upon irradiation with light. A film thickness of the metal film positioned in a bottom portion of a gap between every adjacent two of the multiple projections is greater than a height of the multiple protrusions and is more than or equal to 90% and less than or equal to 100% of a film thickness of the metal film deposited on top portions of the multiple protrusions.

Claims (48)

1. A metal microscopic structure comprising:

a base member including multiple protrusions arrayed at predetermined intervals; and

multiple projections made of a metal film covering the base member and configured to generate surface plasmons upon irradiation with light, wherein:

a film thickness of the metal film positioned in a bottom portion of a gap between every adjacent two of the multiple projections is greater than a height of the multiple protrusions and is more than or equal to 90% and less than or equal to 100% of a film thickness of the metal film deposited on top portions of the multiple protrusions,

the metal film includes a first metal film in contact with the multiple projections and a second metal film disposed on the first metal film,

a thickness of the second metal film is smaller than a thickness of the first metal film on top portions of the multiple protrusions,

the base member is made of resin,

each of the multiple protrusions has a circular columnar shape,

the multiple protrusions are arranged in a form of regular triangle lattices in a plan view,

a thickness of the multiple protrusions is more than or equal to 184 nm and less than or equal to 276 nm, and

an interval between every adjacent two of the multiple protrusions is more than or equal to 184 nm and less than or equal to 276 nm.

2. The metal microscopic structure according to claim 1 , wherein a vertical sectional shape of each of the multiple projections is a forward tapered shape.

3. The metal microscopic structure according to claim 1 , wherein the height of each of the multiple protrusions is more than or equal to 160 nm and less than or equal to 240 nm, and

the film thickness of the metal film positioned in the bottom portion of the gap between every adjacent two of the multiple projections is more than or equal to 200 nm and less than or equal to 600 nm.

4. The metal microscopic structure according to claim 1 , wherein an interval between every adjacent two of the multiple projections is more than or equal to 40 nm and less than or equal to 120 nm on a top portion side of the multiple projections in a cross section that passes a center of each of the multiple projections in a plan view and that is perpendicular to the base member, and

the interval is more than or equal to 10 nm and less than or equal to 40 nm on a bottom portion side of the multiple projections.

5. The metal microscopic structure according to claim 1 , wherein the metal film is made of gold, silver, copper, aluminum, or an alloy containing gold, silver, copper, or aluminum as a main component.

6. A detection device comprising the metal microscopic structure according to claim 1 ;

an inlet guide configured to introduce both a sample containing an analyte and a luminous body to the metal microscopic structure;

a light source capable of emitting light with which the metal microscopic structure and a bound body of the analyte and the luminous body are irradiated; and

an optical detector configured to detect light emitted from the luminous body that has been excited by the light emitted from the light source.

7. The detection device according to claim 6 , further comprising:

a first antibody that has a property of specifically binding to the analyte and that has been immobilized onto the metal microscopic structure, wherein the analyte is a virus or a component of the virus; and

a second antibody that has a property of specifically binding to the analyte specifically bound to the first antibody and that has been labeled with the luminous body.

8. The detection device according to claim 6 , wherein a wavelength of the light emitted from the light source is longer than or equal to 400 nm and shorter than or equal to 850 nm, and a wavelength of the light detected by the optical detector is longer than or equal to 400 nm and shorter than or equal to 850 nm.

9. The metal microscopic structure according to claim 1 , wherein the second metal film has a smaller surface roughness than the first metal film.

10. The metal microscopic structure according to claim 1 , wherein the film thickness of the metal film positioned in the bottom portion of the gap between every adjacent two of the multiple projections is more than or equal to 90% and less than 100% of the film thickness of the metal film deposited on the top portions of the multiple protrusions.

11. A metal microscopic structure comprising:

a base member including multiple protrusions arrayed at predetermined intervals; and

multiple projections made of a metal film covering the base member and configured to generate surface plasmons upon irradiation with light, wherein:

a film thickness of the metal film positioned in a bottom portion of a gap between every adjacent two of the multiple projections is greater than a height of the multiple protrusions and is more than or equal to 90% and less than or equal to 100% of a film thickness of the metal film deposited on top portions of the multiple protrusions,

the base member is made of resin,

each of the multiple protrusions has a circular columnar shape,

the multiple protrusions are arranged in a form of regular triangle lattices in a plan view,

a thickness of the multiple protrusions is more than or equal to 184 nm and less than or equal to 276 nm, and

an interval between every adjacent two of the multiple protrusions is more than or equal to 184 nm and less than or equal to 276 nm.

12. A metal microscopic structure comprising:

a base member including multiple protrusions arrayed at predetermined intervals; and

multiple projections made of a metal film covering the base member and configured to generate surface plasmons upon irradiation with light, wherein:

a film thickness of the metal film positioned in a bottom portion of a gap between every adjacent two of the multiple projections is greater than a height of the multiple protrusions and is more than or equal to 90% and less than or equal to 100% of a film thickness of the metal film deposited on top portions of the multiple protrusions,

the height of each of the multiple protrusions is more than or equal to 160 nm and less than or equal to 240 nm, and

the film thickness of the metal film positioned in the bottom portion of the gap between every adjacent two of the multiple projections is more than or equal to 200 nm and less than or equal to 600 nm.

13. A metal microscopic structure comprising:

a base member including multiple protrusions arrayed at predetermined intervals; and

multiple projections made of a metal film covering the base member and configured to generate surface plasmons upon irradiation with light, wherein:

a film thickness of the metal film positioned in a bottom portion of a gap between every adjacent two of the multiple projections is greater than a height of the multiple protrusions and is more than or equal to 90% and less than or equal to 100% of a film thickness of the metal film deposited on top portions of the multiple protrusions,

an interval between every adjacent two of the multiple projections is more than or equal to 40 nm and less than or equal to 120 nm on a top portion side of the multiple projections in a cross section that passes a center of each of the multiple projections in a plan view and that is perpendicular to the base member, and

the interval is more than or equal to 10 nm and less than or equal to 40 nm on a bottom portion side of the multiple projections.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 4, 2021
From: KANNO, TAKASHI; YANAGAWA, HIROTO
To: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Reel/Frame 056435/0951 →
Priority Claims (1)
JP JP2018-157377 · Aug 24, 2018 · national
Continuity (2)
Continuation PCTJP2019025629 · Jun 27, 2019
Related Publication 20210025884A1 · Jan 28, 2021