Autofocus device, and optical apparatus and microscope including the same
An autofocus device includes a stage, a magnifying optical system, a light source device, an iris which is arranged at a position opposite to a sample of the magnifying optical system and configured to limit a light beam emitted from the light source device, and an AF camera which receives, via the magnifying optical system, a reflected light beam which is reflected from a reflection surface after the light beam reaches a glass member via the iris and the magnifying optical system. The light source device emits the light beam at a non-zero angle relative to the axis of the magnifying optical system. The control unit adjusts the position of the stage so as to match the position of a captured image of a shield with a target position. With such a configuration, it is possible to achieve the autofocus at high speed.
1. An autofocus device used in an optical apparatus equipped with a stage that supports a transparent member on which an observation object is placed, and a magnifying optical system which is used to observe the observation object, the autofocus device comprising:
a light source device which emits a light beam to the observation object via the magnifying optical system;
a shield which is arranged at a position opposite to the observation object relative to the magnifying optical system and configured to limit the light beam emitted from the light source device;
a light detection unit which receives, via the magnifying optical system, a reflected light beam which is reflected from a reflection surface of the transparent member after the light beam emitted from the light source device reaches the reflection surface via the shield and the magnifying optical system; and
a unit controller which controls a position of the stage or the magnifying optical system,
the unit controller adjusting the position of the stage or the magnifying optical system based on a reflected light beam from the shield which is obtained by irradiating the observation object with the light beam which is emitted from the light source device and limited by the shield under a plurality of different conditions, wherein
the light source device is configured to adjust an angle of the light beam relative to the shield.
2. The autofocus device according to claim 1 , further including an optical element which reflects a part of the light beam emitted from the light source device and limited by the shield,
wherein the light beam emitted from the light source device and reflected by the optical element is incident on the observation object.
3. The autofocus device according to claim 1 , further including an optical element which blocks, attenuates or reflects a part of the light beam emitted from the light source device and limited by the shield,
wherein a part of the light beam which is emitted from the light source device and is not blocked, attenuated and reflected by the optical element is incident on the observation object.
4. The autofocus device according to claim 1 , wherein
the unit controller determines a control target value from a position of a reflection image of the shield obtained under the plurality of different conditions, and adjusts the position of the stage or the magnifying optical system accordingly.
5. The autofocus device according to claim 1 , wherein
the unit controller determines a control target value from a light intensity which is obtained by dividing the image of the shield obtained under the plurality of different conditions into a plurality of sections and integrating the light intensity of each section, and adjusts the position of the stage or the magnifying optical system accordingly.
6. An optical apparatus comprising the autofocus device according to claim 1 .
7. A microscope comprising the autofocus device according to claim 1 .