Method and apparatus for substrate transfer and radical confinement
Examples of the present invention provide an apparatus for transferring substrates and confining a processing environment in a chamber. One example provides a hoop assembly for use in a processing chamber. The hoop assembly includes a confinement ring defining a confinement region therein. A hoop body mates with the confinement ring. The hoop body is slanted to reduce a thickness across a diameter of the hoop body. Three or more lifting fingers are attached to the hoop body and extend downwards. Each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region.
1. A hoop assembly for use in a processing chamber, comprising:
a confinement ring defining a confinement region therein;
a hoop body mating with the confinement ring, the hoop body comprises: a frame portion defining a central opening, a handle portion connected to the frame portion at one side outside the central opening, a lower surface, an annular inner lip that is parallel to the lower surface and supporting the confinement ring, and an upper surface that is slanted relative to the lower surface from the handle portion to the frame portion of the hoop body to reduce a thickness across a diameter of the hoop body; and
three or more lifting fingers attached to the hoop body and extending downwards, wherein each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region.
2. The hoop assembly of claim 1 , wherein each of the three or more lifting finger is attached to the lower surface of the hoop body.
3. The hoop assembly of claim 1 , wherein each lifting finger comprises:
a vertical portion attached to the lower surface of the hoop body; and
a horizontal portion connected to the vertical portion and extending radially inward, wherein the contact tip is positioned on the horizontal portion.
4. The hoop assembly of claim 1 , further comprising: a shaft attached to the handle portion of the hoop body.
5. The hoop assembly of claim 1 , wherein the confinement ring has a ridge mating with a notch formed in the hoop body.
6. The hoop assembly of claim 1 , wherein the confinement ring is formed from quartz, and the hoop body is formed from aluminum.
7. The hoop assembly of claim 1 , wherein the confinement ring is a sleeve ring with a vertically extended side wall, and one or more through holes are formed between an inner surface and an outer surface of the vertically extended side wall.
8. A chamber for processing a substrate, comprising:
a chamber body defining a chamber volume therein, the chamber body having a sealable substrate transfer opening;
a substrate support pedestal assembly disposed in the chamber volume;
a hoop assembly moveable within the chamber volume, wherein the hoop assembly comprises:
a confinement ring defining a confinement region therein;
a hoop body mating with the confinement ring, the hoop body comprises: a frame portion defining a central opening, a handle portion connected to the frame portion at one side outside the central opening, a lower surface, an annular inner lip that is parallel to the lower surface and supporting the confinement ring, and an upper surface that is slanted relative to the lower surface from a handle portion to a frame portion of the hoop body to reduce a thickness across a diameter of the hoop body; and
three or more lifting fingers attached to the hoop body and extending downwards, wherein each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region, wherein the confinement ring of the hoop assembly is movable between an elevated position and a lowered position, and the confined region is above the substrate support pedestal assembly when the hoop assembly is in the lowered position.
9. The chamber of claim 8 , wherein the elevated position of the confinement ring is above the sealable substrate transfer opening and the lowered position of the confinement ring is in front of the sealable substrate transfer opening.
10. The chamber of claim 8 , further comprising:
a showerhead disposed above the substrate support pedestal assembly, wherein a height of the confinement ring spans from a lower surface of the showerhead and an upper surface of the substrate support pedestal assembly.
11. The chamber of claim 8 , further comprising:
a lid having a cavity receiving the confinement ring when the confinement ring is in the elevated position.
12. The chamber of claim 8 , wherein the confinement ring is a sleeve ring with a vertically extended side wall, and one or more through holes are formed between an inner surface and an outer surface of the vertically extended side wall.
13. The chamber of claim 8 , wherein the confinement ring has a height that at least spans from the substrate support pedestal assembly to an elevation above the sealable substrate transfer opening.
14. The chamber of claim 8 , wherein the confinement ring is formed from quartz.
15. The chamber of claim 8 , wherein each of the three or more lifting finger is attached to the lower surface of the hoop body.
16. The chamber of claim 8 , wherein the hoop body further comprises:
each lifting finger comprises:
a vertical portion attached to the lower surface of the hoop body; and
a horizontal portion connected to the vertical portion and extending radially inward, wherein the contact tip is positioned on the horizontal portion.
17. A hoop assembly for use in a processing chamber, comprising:
a confinement ring defining a confinement region therein;
a hoop body mating with the confinement ring, the hoop body comprises: a frame portion defining a central opening, a handle portion connected to the frame portion at one side outside the central opening, a lower surface, an annular inner lip that is parallel to the lower surface and supporting the confinement ring, and an upper surface that is the hoop body slanted relative to the lower surface from a handle portion to a frame portion of the hoop body to reduce a thickness across a diameter of the hoop body; and
three or more lifting fingers attached to the hoop body and extending downwards, each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region, wherein each of the three or more lifting fingers further comprises a vertical portion and a horizontal portion, the vertical portion detachably coupled to the lower surface of the hoop body.
18. The hoop assembly of claim 17 , further comprising:
a hole passing through the vertical portion of each of the three or more lifting fingers, the hole having a threaded inlet, wherein the lower surface of the hoop body couples to the three or more lifting fingers via the hole.