Gratings with variable depths formed using planarization for waveguide displays
A manufacturing system performs a deposition of an etch-compatible film over a substrate. The etch-compatible film includes a first surface and a second surface opposite to the first surface. The manufacturing system performs a partial removal of the etch-compatible film to create a surface profile on the first surface with a plurality of depths relative to the substrate. The manufacturing system performs a deposition of a second material over the profile created in the etch-compatible film. The manufacturing system performs a planarization of the second material to obtain a plurality of etch heights of the second material in accordance with the plurality of depths in the profile created in the etch-compatible film. The manufacturing system performs a lithographic patterning of a photoresist deposited over the planarized second material to obtain the plurality of etch heights and one or more duty cycles in the second material.
1. An optical grating comprising:
a substrate;
an etch-compatible film on the substrate, the etch-compatible film having a surface profile with a plurality of different depths relative to the substrate; and
a plurality of pillars of second material on the etch-compatible film having a plurality of corresponding heights measured from the etch-compatible film, at least one pillar of the plurality of pillars having a height that is different from at least one other pillar of the plurality of pillars, and a spacing of the plurality of pillars corresponding to one or more duty cycles of the optical grating.
2. The optical grating of claim 1 , wherein the plurality of pillars each have a corresponding top surface that is at a level within a same target value of distance to the substrate and within a same target value of surface roughness of the second material.
3. The optical grating of claim 1 , wherein the etch-compatible film is composed of at least one of: an epoxy resin, a novolac resin, or some combination thereof.
4. The optical grating of claim 1 , wherein the plurality of the corresponding heights is in a range of few hundred nanometers to few microns.
5. The optical grating of claim 1 , wherein the one or more duty cycles is in a range of 10 percent to 90 percent.
6. The optical grating of claim 1 , wherein the second material is composed of at least one of: an epoxy resin, a novolac resin, or some combination thereof.
7. The optical grating of claim 1 , wherein the plurality of the corresponding heights is a root mean square value of a height of the second material with respect to the etch-compatible film.