LCOS structure and method of forming same
View Patent ↗The present invention provides a LCOS structure and a method for fabricating same. The LCOS structure includes: a silicon substrate; a liquid crystal layer and a transparent conductive layer both disposed above the silicon substrate. In the silicon substrate, there are formed a conductive pad, an opening where the conductive pad is exposed, and at least one metal layer. The opening is located peripherally around the liquid crystal layer, there is no portion of the metal layer located under the conductive pad. The conductive backing is located at the same vertical level as one metal layer in the at least one metal layer and electrically connected thereto, a conductive adhesive fills in the opening and a gap between the silicon substrate and the transparent conductive layer. The transparent conductive layer is electrically connected to the conductive pad by conductive metal particles in the conductive adhesive.
1. A liquid crystal on silicon (LCOS) structure comprising: a silicon substrate; and a liquid crystal layer and a transparent conductive layer disposed above the silicon substrate, wherein the silicon substrate is formed therein with a conductive pad, an opening in which the conductive pad is exposed, and at least one metal layer, and wherein: the opening is located peripherally around the liquid crystal layer; the metal layer has no portion located right under the conductive pad; the conductive pad is located at a same vertical level as one metal layer in the at least one metal layer and electrically connected to the one metal layer; the opening, together with a gap between the silicon substrate and the transparent conductive layer, is filled with a conductive adhesive, wherein the conductive adhesive filled in the gap is in contact with each of the silicon substrate and the transparent conductive layer; and the transparent conductive layer is electrically connected to the conductive pad by conductive metal particles in the conductive adhesive.
2. The LCOS structure of claim 1 , wherein each of the conductive metal particles has a particle size in a range of from 5 μm to 25 μm.
3. The LCOS structure of claim 1 , wherein the conductive metal particles comprise pure metal particles and/or composite metal particles.
4. The LCOS structure of claim 3 , wherein the pure metal particles include at least one of gold particles, silver particles, copper particles and nickel particles, and wherein the composite metal particles include at least one of silver-plated copper particles, silver-plated gold particles, silver-plated nickel particles, gold-plated copper particles and gold-plated nickel particles.
5. The LCOS structure of claim 1 , wherein the silicon substrate is formed therein with a plurality of metal layers, and wherein the conductive pad is located at a same vertical level as, and electrically connected to, one metal layer that is farthest away from the liquid crystal layer.
6. The LCOS structure of claim 1 , wherein the silicon substrate is formed therein with a plurality of metal layers, and wherein one metal layer that is closest to the liquid crystal layer provides pixel electrodes, and wherein the pixel electrodes are arranged into an array.
7. The LCOS structure of claim 1 , wherein bonding pads are formed on a surface of the silicon substrate beside the liquid crystal layer, and wherein the bonding pad is exposed from the transparent conductive layer.
8. The LCOS structure of claim 1 , wherein the conductive pad is able to withstand a pressure in a range of from 1 GPa to 20 GPa.
9. A method for fabricating a liquid crystal on silicon (LCOS) structure comprising:
providing a silicon substrate formed thereabove with a liquid crystal layer and therein with a conductive pad, an opening in which the conductive pad is exposed, and at least one metal layer, wherein: the opening is located peripherally around the liquid crystal layer; the metal layer has no portion located right under the conductive pad; and the conductive pad is located at a same vertical level as one metal layer in the at least one metal layer and electrically connected to the one metal layer;
filling a conductive adhesive in the opening and a gap between the silicon substrate and the transparent conductive layer, wherein the conductive adhesive filled in the gap is in contact with each of the silicon substrate and the transparent conductive layer;
bonding a transparent conductive layer to the silicon substrate, wherein the transparent conductive layer is electrically connected to the conductive pad by conductive metal particles in the conductive adhesive.
10. The method for fabricating a LCOS structure of claim 9 , wherein the conductive metal particles comprise pure metal particles and/or composite metal particles.
11. The method for fabricating a LCOS structure of claim 9 , wherein each of the conductive metal particles has a particle size in a range of from 5 μm to 25 μm.
12. The method for fabricating a LCOS structure of claim 9 , wherein the silicon substrate is formed therein with a plurality of metal layers, and wherein one metal layer that is closest to the liquid crystal layer provides pixel electrodes, and wherein the pixel electrodes are arranged into an array.
13. The method for fabricating a LCOS structure of claim 9 , wherein the silicon substrate is formed therein with a plurality of metal layers, and wherein the conductive pad is located at a same vertical level as, and electrically connected to, one metal layer that is farthest away from the liquid crystal layer.
14. The method for fabricating a LCOS structure of claim 9 , wherein bonding pads are formed on a surface of the silicon substrate beside the liquid crystal layer, and wherein the bonding pad is exposed from the transparent conductive layer.