Structure and method of advanced LCoS back-plane having robust pixel via metallization

1. A method of manufacturing a semiconductor structure, the method comprising:

forming a semiconductor substrate;

forming a metal layer overlying the semiconductor substrate;

forming a spacer layer overlying the metal layer;

forming a mirror layer overlying the spacer layer;

forming an optical stack overlying the mirror layer, wherein the optical stack comprises a Distributed Bragg Reflector (DBR);

forming a lithographic mask overlying the DBR, the lithographic mask comprising a window;

forming a via by a dry etch process through the window to selectively remove portions of the DBR, the mirror layer and the spacer layer; and

forming the pixel material extending from the metal layer to an upper surface of the optical stack by depositing a fill material in the via.

2. The method of claim 1 , wherein the fill material comprises a refractory material selected from a set of materials resistant to plasma oxidation.

3. The method of claim 2 , wherein the refractory material comprises one or more of tungsten, ruthenium, or tantalum nitride.

4. The method of claim 1 , wherein the fill material comprises a non-refractory material.

5. The method of claim 4 , wherein the non-refractory material comprises one or more of aluminum, copper, or cobalt.

6. The method of claim 4 , further comprising:

forming a refractory layer overlying the fill material, the refractory layer comprising a refractory material selected from a set of materials resistant to plasma oxidation.

7. The method of claim 6 , wherein the refractory layer has a thickness less than 5 nm.

8. A semiconductor structure comprising:

a semiconductor substrate;

a metal layer overlying the semiconductor substrate;

a spacer layer overlying the metal layer;

a mirror layer overlying the spacer layer;

an optical stack overlying the mirror layer, wherein the optical stack comprises a Distributed Bragg Reflector (DBR); and

a pixel material extending from the metal layer to an upper surface of the optical stack, the pixel material comprising a refractory material.

9. The semiconductor structure of claim 8 , wherein the refractory material is selected from a set of materials resistant to plasma oxidation.

10. The semiconductor structure of claim 8 , wherein the refractory material comprises one or more of tungsten, ruthenium, or tantalum nitride.

11. The semiconductor structure of claim 10 , wherein the refractory material extends an entire length through the optical stack.

12. The semiconductor structure of claim 8 , wherein the pixel material is electrically isolated from the mirror layer.

13. The semiconductor structure of claim 8 , wherein the pixel material forms an electrically conductive contact with the metal layer.

14. A semiconductor structure comprising:

a semiconductor substrate;

a metal layer overlying the semiconductor substrate;

a spacer layer overlying the metal layer;

a mirror layer overlying the spacer layer;

an optical stack overlying the mirror layer;

a pixel material extending from the metal layer to the optical stack, the pixel material comprising a non-refractory metal; and

a refractory layer overlying the pixel material external to the optical stack, wherein the refractory layer comprises one or more of tungsten, ruthenium, or tantalum nitride.

15. The semiconductor structure of claim 14 , wherein the metal layer comprises the non-refractory metal.

16. The semiconductor structure of claim 14 , wherein the non-refractory metal comprises one or more of copper, cobalt, or aluminum.

17. The semiconductor structure of claim 14 , wherein the refractory layer has a thickness less than 5 nm.

18. The semiconductor structure of claim 14 , wherein:

the pixel material extends a portion of a length of the optical stack; and

the refractory layer forms an appreciably level surface with an upper surface of the optical stack.