Display apparatus comprising different types of thin film transistors with compact design and method for manufacturing the same
Discussed is a display apparatus capable of realizing a high resolution and a small power consumption, and a method for manufacturing the same, wherein the display apparatus includes a bottom gate type first thin film transistor disposed in a display area, and a top gate type second thin film transistor disposed in a non-display area.
1. A display apparatus comprising:
a display area configured to display an image; and
a non-display area on which an image is not displayed,
wherein the display area includes a first thin film transistor, and the non-display area includes a second thin film transistor,
wherein the first thin film transistor includes:
a first gate electrode on a substrate;
a first active layer on the first gate electrode;
a first gate insulating film between the first active layer and the first gate electrode; and
a first source electrode and a first drain electrode which are spaced apart from each other, and are respectively connected with the first active layer,
wherein the second thin film transistor includes:
a second active layer on the substrate;
a second gate electrode on the second active layer;
a second source electrode and a second drain electrode which are spaced apart from each other, and are respectively connected with the second active layer; and
a second gate insulating film between the second active layer and the second gate electrode, between the second active layer and the second source electrode, and between the second active layer and the second drain electrode,
wherein the first active layer and the second active layer include an oxide semiconductor material,
wherein the first gate electrode is disposed between the substrate and the first active layer, and the second active layer is disposed between the substrate and the second gate electrode,
wherein the first gate insulating film is disposed between the substrate and the second active layer, and
wherein the second gate insulating film contacts the second source electrode and the second drain electrode.
2. The display apparatus according to claim 1 , wherein the first active layer and the second active layer are disposed on a same layer.
3. The display apparatus according to claim 1 , wherein the second source electrode and the second drain electrode are disposed on a same layer as that of the second gate electrode.
4. The display apparatus according to claim 1 , wherein any one of the second source electrode and the second drain electrode is in contact with a lower wiring which is disposed on a same first layer as that of the first gate electrode.
5. The display apparatus according to claim 4 , wherein the other of the second source electrode and the second drain electrode is in contact with a signal line for outputting a gate clock signal which is disposed on a same second layer as that of the second gate electrode.
6. The display apparatus according to claim 1 , wherein the second gate insulating film is not disposed on the second active layer between the second source electrode and the second gate electrode and between the second drain electrode and the second gate electrode.
7. The display apparatus according to claim 1 , wherein at least one of the first active layer and the second active layer includes:
a first oxide semiconductor layer; and
a second oxide semiconductor layer on the first oxide semiconductor layer.
8. The display apparatus according to claim 1 , wherein a lower surface of the first gate insulating film is in direct contact with an upper surface of the first gate electrode and an upper surface of a first capacitor electrode of a capacitor.
9. The display apparatus according to claim 8 , wherein a lower surface of the second gate insulating film is in direct contact with an upper surface of the first gate insulating film and an upper surface of the second active layer.
10. The display apparatus according to claim 9 , wherein a lower surface of a second capacitor electrode of the capacitor is in direct contact with an upper surface of the second gate insulating film.
11. The display apparatus according to claim 1 , wherein a second capacitor electrode of a capacitor is integrally formed with the first drain electrode of the first thin film transistor, the second capacitor electrode and the first drain electrode including a same material.