Electrode assemblies for plasma discharge devices
There is provided a compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device. The compound electrode assembly includes a casing, a discharge electrode and a sealing compound. The casing is made of a dielectric material and includes at least one side wall and an end wall defining a closed end. The discharge electrode is mounted in the casing and is bonded to the end wall. The sealing compound surrounds the discharge electrode and extends within the casing.
1. A compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device, the compound electrode assembly comprising:
a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall, wherein the discharge electrode is bonded to the end wall with an electrically conductive adhesive or a layer of conductive compound, extending along an inside surface of the end wall; and
a sealing compound surrounding the discharge electrode and extending within the casing.
2. The compound electrode assembly of claim 1 , wherein the dielectric material is selected from the group consisting of quartz, borosilicate, ceramics and Polytetrafluoroethylene.
3. The compound electrode assembly of claim 1 , wherein said at least one side wall is a tubular side wall.
4. The compound electrode assembly of claim 1 , wherein the end wall is a dielectric barrier of a plasma-generating mechanism of the plasma discharge device.
5. The compound electrode assembly of claim 1 , wherein the end wall projects within the plasma chamber.
6. The compound electrode assembly of claim 1 , wherein the end wall faces towards the plasma chamber.
7. The compound electrode assembly of claim 1 , wherein the discharge electrode is made of aluminum or platinum.
8. The compound electrode assembly of claim 1 , wherein the discharge electrode comprises a disk-shaped base portion and a cylindrical-shaped lead portion.
9. The compound electrode of claim 1 , wherein the sealing compound bonds the discharge electrode to the side wall.
10. The compound electrode assembly of claim 1 , wherein the sealing compound is made of a material selected from the group consisting of silicon-based putty, a ceramic with glass filler, an epoxy putty, a silicon-based material and a ceramic material.
11. The compound electrode assembly of claim 1 , further comprising a pair of stabilizing electrodes, each stabilizing electrode being located within the casing and being bonded to an inside surface of the end wall alongside the discharge electrode.
12. The compound electrode assembly of claim 1 , wherein the pair of stabilizing electrodes are bonded to the inside surface of the end wall through an electrically conductive adhesive or a layer of conductive compound.
13. The compound electrode assembly of claim 11 , wherein the stabilizing electrodes are arc-shaped and follow an inner boundary of the casing along the side wall.
14. The compound electrode assembly of any one of claim 1 , further comprising an electron injection electrode mounted outside of the casing and along the side wall, the electron injection electron being configured to enable injection of free electron in the plasma chamber.
15. The compound electrode assembly of claim 1 , wherein the electron injection electrode is L-shaped and includes a first branch extending along the casing and a second branch projecting within the plasma chamber.
16. The compound electrode assembly of claim 14 , wherein the electron injection electrode is mounted on the outside of the casing through an electrically conductive adhesive, a layer of conductive compound or a ceramic-based bonding compound.
17. A plasma discharge device, comprising:
a plasma chamber traversed by a gas flow path allowing a flow of a gas sample through the plasma chamber; and
at least one compound electrode assembly, each of said at least one compound electrode assembly comprising:
a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall;
a sealing compound surrounding the discharge electrode and extending within the casing; and
wherein said at least one compound electrode assembly is a pair of compound electrode assemblies, the pair of compound electrode assemblies being separated by an adjustable interelectrode spacing.
18. The plasma discharge device of claim 17 , further comprising a pair of ferrules, each compound electrode assembly being mounted and sealed to a corresponding one of the pair of ferrules.
19. The plasma discharge device of claim 18 , wherein each ferrule is made of graphite.
20. The plasma discharge device of claim 18 , further comprising a pair of Belleville springs, each Belleville spring being in mechanical contact with a corresponding one of the pair of compound electrode assemblies.
21. A compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device, the compound electrode assembly comprising:
a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall;
a sealing compound surrounding the discharge electrode and extending within the casing; and
a pair of stabilizing electrodes, each stabilizing electrode being located within the casing and being bonded to an inside surface of the end wall alongside the discharge electrode.
22. A compound electrode assembly for generating a plasma in a plasma chamber of a plasma discharge device, the compound electrode assembly comprising:
a casing made of a dielectric material, the casing comprising at least one side wall and an end wall defining a closed end;
a discharge electrode mounted in the casing, the discharge electrode being bonded to the end wall;
a sealing compound surrounding the discharge electrode and extending within the casing; and
an electron injection electrode mounted outside of the casing and along the side wall, the electron injection electron being configured to enable injection of free electron in the plasma chamber, the electron injection electrode being mounted on the outside of the casing with an electrically conductive adhesive, a layer of conductive compound or a ceramic-based bonding compound.