Image sensing device with structural reinforcement layer
An image sensing device that includes a reinforced structure is disclosed. The image sensing device includes a semiconductor substrate structured to include a pixel region including a plurality of unit pixels and a peripheral region located outside the pixel region, a plurality of microlenses disposed over the semiconductor substrate in the pixel region, a structural reinforcement layer disposed over the semiconductor substrate in the peripheral region, and a lens capping layer structured to cover the microlenses and at least of the structural reinforcement layer. The structural reinforcement layer includes a plurality of fingers each finger vertically structured to have a rounded upper end and laterally extend to have a predetermined length toward the pixel region. The fingers are consecutively arranged and connected to each other in a lateral direction, and side surfaces of fingers are in contact with side surfaces of immediately adjacent fingers.
1. An image sensing device comprising:
a semiconductor substrate structured to include a pixel region, which includes a plurality of unit pixels, and a peripheral region located outside the pixel region;
a plurality of microlenses disposed over the semiconductor substrate in the pixel region;
a structural reinforcement layer disposed over the semiconductor substrate in the peripheral region; and
a lens capping layer structured to cover the microlenses and at least part of the structural reinforcement layer,
wherein the structural reinforcement layer includes:
a plurality of fingers each finger vertically structured to have a rounded upper end and laterally extend to have a predetermined length toward the pixel region,
wherein the plurality of fingers is consecutively arranged and connected to each other in a lateral direction, and side surfaces of fingers are in contact with side surfaces of immediately adjacent fingers.
2. The image sensing device according to claim 1 , wherein each of the fingers includes:
a body portion structured to be in contact with side surfaces of body portions of the immediately adjacent fingers; and
an edge portion formed to protrude from the body portion and have a rounded protruded portion.
3. The image sensing device according to claim 2 , wherein the lens capping layer includes an edge located at the body portion.
4. The image sensing device according to claim 1 , further comprising a plurality of extra microlenses disposed in the peripheral region between the structural reinforcement layer and the microlenses in the pixel region.
5. The image sensing device according to claim 4 , wherein at least one of the extra microlenses is connected to the microlenses in the pixel region, and the extra microlenses are spaced apart from the structural reinforcement layer by a predetermined distance.
6. The image sensing device according to claim 4 , wherein the extra microlenses are continuously arranged to be connected to the microlenses in the pixel region and the structural reinforcement layer.
7. The image sensing device according to claim 1 , further comprising:
an over-coating layer located below the microlenses in the pixel region and the structural reinforcement layer.
8. The image sensing device according to claim 1 , further comprising a light shielding layer structured to shield the semiconductor substrate in the peripheral region from light.
9. The image sensing device according to claim 1 , wherein the structural reinforcement layer is formed in an annular shape surrounding the microlenses.
10. An image sensing device comprising:
a planarization layer formed over a lower structure including sensor pixels structured to detect incident light to output electrical signals indicative of an image of the incident light;
a plurality of microlenses disposed over the planarization layer to converge incident light onto the sensor pixels;
a structural reinforcement layer disposed over the planarization layer to surround the microlenses; and
a lens capping layer disposed over the microlenses and the structural reinforcement layer,
wherein the structural reinforcement layer includes a plurality of fingers, each of which has a body portion that has a curvature in a short-axis direction and extends to a predetermined length without a curvature in a long-axis direction perpendicular to the short-axis direction,
wherein the plurality of fingers is consecutively arranged adjacent to each other.
11. The image sensing device according to claim 10 , wherein:
the body portion of each finger is structured to vertically extend to a predetermined height, and includes a rounded upper end in the short-axis direction.
12. The image sensing device according to claim 10 , wherein each of the fingers further includes an edge portion formed to protrude from the body portion in the long-axis direction such that side surfaces of the protruding portion are formed to have a curvature in the short-axis direction and the long-axis direction.
13. The image sensing device according to claim 10 , wherein the lens capping layer includes an edge located at the body portion.
14. The image sensing device according to claim 10 , wherein the microlenses are arranged in a manner that outermost microlenses from among the microlenses are spaced apart from the structural reinforcement layer by a predetermined distance.
15. The image sensing device according to claim 10 , wherein the microlenses are arranged in a manner that outermost microlenses from among the microlenses are arranged to be connected to the structural reinforcement layer.