Chip transfer method, display device, chip and target substrate
A chip transfer method including: disposing a target substrate in a closed cavity, the target substrate including a first alignment bonding structure and a second alignment bonding structure; applying a charge of a first polarity to the first alignment bonding structure of the target substrate; applying a charge of a second polarity to a first chip bonding structure of a chip; injecting an insulating fluid into the closed cavity to suspend the chip in the insulating fluid within the closed cavity; and applying a bonding force to the chip.
1. A chip transfer method, comprising:
disposing a target substrate in a closed cavity, the target substrate comprising a first alignment bonding structure and a second alignment bonding structure;
applying a charge of a first polarity to the first alignment bonding structure of the target substrate;
applying a charge of a second polarity to a first chip bonding structure of a chip, wherein the chip comprises a second chip bonding structure and the first chip bonding structure, and the second polarity and the first polarity are different;
injecting an insulating fluid into the closed cavity to suspend the chip in the insulating fluid within the closed cavity, wherein under an action of the first chip bonding structure and the first alignment bonding structure, the chip moves close to the target substrate, the first chip bonding structure is caused to be in contact with the first alignment bonding structure, and the second chip bonding structure is caused to be in contact with the second alignment bonding structure; and
applying a bonding force to the chip, wherein the first chip bonding structure is caused to be bonded to the first alignment bonding structure, and the second chip bonding structure is caused to be bonded to the second alignment bonding structure.
2. The method according to claim 1 , wherein the method further comprises:
applying the charge of the first polarity to the second alignment bonding structure of the target substrate, and applying the charge of the second polarity to the second chip bonding structure of the chip; or,
grounding the second alignment bonding structure of the target substrate, and applying the charge of the second polarity to the second chip bonding structure of the chip.
3. The method according to claim 1 , wherein
the injecting the insulating fluid into the closed cavity to suspend the chip in the insulating fluid within the closed cavity comprises:
disposing the chip in the closed cavity and injecting the insulating fluid into the closed cavity to suspend the chip in the insulating fluid within the closed cavity; or,
mixing the chip with the insulating fluid and injecting the insulating fluid mixed with the chip into the closed cavity to suspend the chip in the insulating fluid within the closed cavity.
4. The method according to claim 1 , wherein
before injecting the insulating fluid into the closed cavity to suspend the chip in the insulating fluid within the closed cavity, the method further comprises:
separating the chip from the source substrate.
5. The method according to claim 1 , wherein
the target substrate comprises a bonding layer and an alignment layer which are laminated, the bonding layer comprises a first substrate bonding structure and a second substrate bonding structure, the alignment layer has a first alignment opening and a second alignment opening, the first alignment bonding structure comprises the first substrate bonding structure and the first alignment opening, and the second alignment bonding structure comprises the second substrate bonding structure and the second alignment opening, and
the applying the charge of the first polarity to the first alignment bonding structure of the target substrate comprises:
applying the charge of the first polarity to the first substrate bonding structure of the target substrate, wherein under the action of the first chip bonding structure and the first substrate bonding structure, the chip moves close to the target substrate, the first chip bonding structure enters the first alignment opening and is in contact with the first substrate bonding structure, and the second chip bonding structure enters the second alignment opening and is in contact with the second substrate bonding structure.
6. A display device comprising a chip and a target substrate, wherein
the chip comprises a chip main body, and a first chip bonding structure and a second chip bonding structure which are located at the chip main body;
the target substrate comprises a base substrate, and a first alignment bonding structure and a second alignment bonding structure which are located at the base substrate; and
the first chip bonding structure is bonded to the first alignment bonding structure, and the second chip bonding structure is bonded to the second alignment bonding structure; and
wherein the target substrate comprises a bonding layer and an alignment layer which are laminated, the bonding layer comprises a first substrate bonding structure and a second substrate bonding structure the alignment layer has a first alignment opening and a second alignment opening, the first alignment bonding structure comprises the first substrate bonding structure and the first alignment opening and the second alignment bonding structure comprises the second substrate bonding structure and the second alignment opening; and
the first chip bonding structure is bonded to the first substrate bonding structure through the first alignment opening, and the second chip bonding structure is bonded to the second substrate bonding structure through the second alignment opening; and
wherein the first chip bonding structure, the second chip bonding structure and the first substrate bonding structure are all columnar structures, the second substrate bonding structure is a ring-shaped structure, the first alignment opening is an alignment hole the second alignment opening is a ring-shaped alignment slit, the first substrate bonding structure is located at a center of a ring shape of the second substrate bonding structure, and the first alignment opening is located at a center of a ring shape of the second alignment opening;
a size of a bottom surface of the first chip bonding structure is less than an aperture of the first alignment opening, and a size of a bottom surface of the second chip bonding structure is greater than the aperture of the first alignment opening and less than a width of the second alignment opening;
a height of the first chip bonding structure is equal to a height of the second chip bonding structure, and a height of the first substrate bonding structure is equal to a height of the second substrate bonding structure;
a shape of an opening surface of the first alignment opening is the same as a shape of a bottom surface of the first substrate bonding structure, and the aperture of the first alignment opening is less than or equal to the size of the bottom surface of the first substrate bonding structure; and
a shape of an opening surface of the second alignment opening is the same as the ring shape of the second substrate bonding structure, and the width of the second alignment opening is less than or equal to a width of the second substrate bonding structure.
7. The display device according to claim 6 , wherein
a size of the first chip bonding structure is less than that of the first alignment opening, a size of the second chip bonding structure is less than that of the second alignment opening and greater than that of the first alignment opening, and a distance between the first chip bonding structure and the second chip bonding structure is equal to a distance between the first alignment opening and the second alignment opening.
8. The display device according to claim 7 , wherein
the first alignment opening is an alignment hole, the second alignment opening is an alignment slit, the size of the first chip bonding structure is less than an aperture of the first alignment opening, and the size of the second chip bonding structure is less than a width of the second alignment opening and greater than the aperture of the first alignment opening.
9. The display device according to claim 6 , wherein
an orthogonal projection of the first substrate bonding structure on the alignment layer covers the first alignment opening, and an orthogonal projection of the second substrate bonding structure on the alignment layer covers the second alignment opening.
10. The display device according to claim 6 , wherein
the first chip bonding structure, the second chip bonding structure, and the first substrate bonding structure are all cylindrical structures, the second substrate bonding structure is a circular ring-shaped structure, the first alignment opening is a circular alignment hole, and the second alignment opening is a circular ring-shaped alignment slit;
a diameter of the first chip bonding structure is less than the aperture of the first alignment opening, and a diameter of the second chip bonding structure is greater than the aperture of the first alignment opening and less than the width of the second alignment opening; and
the aperture of the first alignment opening is less than or equal to a diameter of the first substrate bonding structure, and the width of the second alignment opening is less than or equal to the width of the second substrate bonding structure.
11. The display device according to claim 6 , wherein
the chip further comprises a weight body distributed in the same layer as the second chip bonding structure, and the weight body is configured to enable a center of gravity of the chip to be coincided with a center of the chip.
12. The display device according to claim 11 , wherein
longitudinal axis cross sections of the first chip bonding structure, the second chip bonding structure, and the weight body are coplanar.
13. The display device according to claim 6 , wherein
the first chip bonding structure and the first substrate bonding structure are both columnar structures, the second chip bonding structure and the second substrate bonding structure are both ring-shaped structures, the first alignment opening is an alignment hole, the second alignment opening is a ring-shaped alignment slit, the first chip bonding structure is located at a center of a ring shape of the second chip bonding structure, the first substrate bonding structure is located at a center of a ring shape of the second substrate bonding structure, and the first alignment opening is located at a center of a ring shape of the second alignment opening;
a size of a bottom surface of the first chip bonding structure is less than an aperture of the first alignment opening, and a width of the second chip bonding structure is less than a width of the second alignment opening;
a height of the first chip bonding structure is equal to a height of the second chip bonding structure, and a height of the first substrate bonding structure is equal to a height of the second substrate bonding structure;
a shape of an opening surface of the first alignment opening is the same as a shape of a bottom surface of the first substrate bonding structure, and the aperture of the first alignment opening is less than or equal to the size of the bottom surface of the first substrate bonding structure; and
a shape of an opening surface of the second alignment opening is the same as the ring shape of the second substrate bonding structure, and the width of the second alignment opening is less than or equal to a width of the second substrate bonding structure.
14. The display device according to claim 13 , wherein
the first chip bonding structure and the first substrate bonding structure are both cylindrical structures, the second chip bonding structure and the second substrate bonding structure are both circular ring-shaped structures, the first alignment opening is a circular alignment hole, and the second alignment opening is a circular ring-shaped alignment slit;
a diameter of the first chip bonding structure is less than the aperture of the first alignment opening, and the width of the second chip bonding structure is less than the width of the second alignment opening; and
the aperture of the first alignment opening is less than or equal to a diameter of the first substrate bonding structure, and the width of the second alignment opening is less than or equal to the width of the second substrate bonding structure.
15. The display device according to claim 6 , wherein the chip main body is a columnar structure, and an axis of the first chip bonding structure is collinear with an axis of the chip main body.