Display substrate, preparation method therefor, and display device
A method of manufacturing a display substrate includes: providing a base substrate; and forming a base insulating layer, a first conductive layer and an interlayer insulating layer that are sequentially stacked on top of one another at a side of the base substrate. The first conductive layer includes at least one break face, the base insulating layer includes a portion extending outward with respect to each of the at least one break face, and the break face and the corresponding portion extending outward constitute an unevenness portion having a stepped shape. The interlayer insulating layer covers at least the unevenness portion(s). Forming the interlayer insulating layer, includes: forming a first insulating sub-layer and a second insulating sub-layer that are sequentially stacked on top of one another; and forming one of the first insulating sub-layer and the second insulating sub-layer by curing a flowable insulating material.
1. A method of manufacturing a display substrate, comprising:
providing a base substrate; and
forming a base insulating layer, a first conductive layer and an interlayer insulating layer that are sequentially stacked on top of one another at a side of the base substrate; wherein
the first conductive layer includes at least one break face, the base insulating layer includes a portion extending outward with respect to each break face of the at least one break face, and the break face and the corresponding portion extending outward constitute an unevenness portion having a stepped shape;
the display substrate includes at least one unevenness portion, and the interlayer insulating layer covers at least the at least one unevenness portion; and
forming the interlayer insulating layer, includes: forming a first insulating sub-layer and a second insulating sub-layer that are sequentially stacked on top of one another; and
forming the first insulating sub-layer by curing a flowable insulating material;
the flowable insulating material includes an organic insulating material; and the second insulating sub-layer is made of an inorganic insulating material; and
the first insulating sub-layer further covers the first conductive layer, and a thickness of a portion of the first insulating sub-layer covering the at least one unevenness portion is greater than a thickness of a portion of the first insulating sub-layer covering the first conductive layer.
2. The method of manufacturing the display substrate according to claim 1 , wherein the organic insulating material includes at least one of polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polyimide, polyethersulfone resin, photoresist, or organic silicone resin.
3. The method of manufacturing the display substrate according to claim 1 , wherein
forming the first insulating sub-layer by curing the flowable insulating material, includes:
forming an insulating film through a coating process by using the flowable insulating material; and
performing a curing treatment on the insulating film to form the first insulating sub-layer.
4. The method of manufacturing the display substrate according to claim 3 , wherein the curing treatment includes a thermal curing treatment;
a temperature of the thermal curing treatment ranges from 200° C. to 250° C., and time of the thermal curing treatment ranges from 10 minutes to 30 minutes.
5. The method of manufacturing the display substrate according to claim 1 , wherein
forming the interlayer insulating layer, further includes: forming a third insulating sub-layer on a surface of the second insulating sub-layer facing away from the base substrate;
the third insulating sub-layer is made of the inorganic insulating material.
6. The method of manufacturing the display substrate according to claim 1 , further comprising: forming a second conductive layer on a surface of the interlayer insulating layer facing away from the base substrate; wherein
an orthographic projection of the second conductive layer on the base substrate partially overlaps with an orthographic projection of the at least one unevenness portion on the base substrate.
7. A display substrate, comprising:
a base substrate; and
a base insulating layer, a first conductive layer and an interlayer insulating layer that are sequentially stacked on top of one another at a side of the base substrate; wherein
the first conductive layer includes at least one break face, the base insulating layer includes a portion extending outward with respect to each break face of the at least one break face, and the break face and the corresponding portion extending outward constitute an unevenness portion having a stepped shape;
the display substrate includes at least one unevenness portion, and the interlayer insulating layer covers at least the at least one unevenness portion;
the interlayer insulating layer includes: a first insulating sub-layer and a second insulating sub-layer that are sequentially stacked on top of one another; and the first insulating sub-layer is a liquid curable layer;
a material of the liquid curable layer includes a flowable organic insulating material; and the second insulating sub-layer is an inorganic insulating layer; and
the first insulating sub-layer further covers the first conductive layer, and a thickness of a portion of the first insulating sub-layer covering the at least one unevenness portion is greater than a thickness of a portion of the first insulating sub-layer covering the first conductive layer.
8. The display substrate according to claim 7 , wherein the interlayer insulating layer further includes a third insulating sub-layer disposed on a surface of the second insulating sub-layer facing away from the base substrate; wherein
the third insulating sub-layer is an inorganic insulating layer.
9. The display substrate according to claim 8 , wherein a thickness of a portion of the first insulating sub-layer covering the first conductive layer, a thickness of the second insulating sub-layer, and a thickness of the third insulating sub-layer are approximately equal.
10. The display substrate according to claim 7 , further comprising a second conductive layer disposed on a surface of the interlayer insulating layer facing away from the base substrate; wherein
an orthographic projection of the second conductive layer on the base substrate partially overlaps with an orthographic projection of the at least one unevenness portion on the base substrate.
11. The display substrate according to claim 10 , wherein
the base insulating layer is a gate insulating layer, and the first conductive layer is a gate metal layer, and an orthographic projection of the gate metal layer on the base substrate is within an orthographic projection of the gate insulating layer on the base substrate; and
the second conductive layer is a source-drain metal layer, and an orthographic projection of the source-drain metal layer on the base substrate partially overlaps with an orthographic projection of the interlayer insulating layer on the base substrate.
12. The display substrate according to claim 11 , wherein the gate metal layer includes a plurality of gate lines parallel or substantially parallel to each other, and the source-drain metal layer includes a plurality of data lines parallel or substantially parallel to each other;
the plurality of gate lines and the plurality of data lines cross, and the plurality of gate lines and the plurality of data lines are insulated from each other;
each gate line of the plurality of gate lines corresponds to at least one unevenness portion;
an orthographic projection of the unevenness portion on the base substrate partially overlaps with orthographic projections of the plurality of data lines on the base substrate, and overlapping portions between the orthographic projection of the unevenness portion on the base substrate and the orthographic projections of the plurality of data lines on the base substrate are located beside positions where the gate line and the plurality of data lines cross.
13. A display device, comprising the display substrate according to claim 7 .