Nano protrusion surface forming method and base material having nano protrusion surface formed by method
The present invention relates to a nano-protrusion forming method and a base material having a nano-protrusion surface formed by the method. The method includes forming an anti-reflective layer including nano-protrusions having a width of several nm to several tens of nm, and/or an anti-glare layer including protrusions having a width of several tens of nm to several μm, by a wet etching process using an acid solution without using a nano-mask.
1. A method of forming protrusions on a surface of a base material, the method comprising:
providing a glass or polymer film substrate base material;
forming irregularly sized, irregularly shaped, and irregularly positioned nano-protrusions on the surface of the base material by wet etching without selective etch-blocking, wherein forming the nano-protrusions comprises either forming an anti-glare layer including protrusions having a width of several tens of nm to several hundreds of nm by the wet etching using an acid solution, or forming an anti-reflective layer including protrusions having a width of several nm to several tens of nm by the wet etching using an acid solution.
2. The method of claim 1 , wherein the acid solution which is used in forming the anti-glare layer contains fluorine-based acid and nitric acid, and the acid solution which is used in forming the anti-reflective layer contains fluorine-based acid.
3. The method of claim 1 , wherein the acid solution which is used in forming the anti-glare layer contains hydrogen fluoride and nitric acid, and further contains at least one of ammonium fluoride, phosphoric acid and hydrochloric acid, and the acid solution which is used in forming the anti-reflective layer contains hydrogen fluoride, and further contains at least one of ammonium fluoride, phosphoric acid, nitric acid and hydrochloric acid.
4. The method of claim 1 , wherein the acid solution which is used in forming the anti-glare layer comprises, based on 100 wt % of the acid solution, 10 wt % or less of hydrogen fluoride, 5 wt % or less of ammonium fluoride, 10 wt % or more to 25 wt % or less of nitric acid, 5 wt % or less of phosphoric acid, 10 wt % or less of hydrochloric acid, and the remainder being water.
5. The method of claim 1 , wherein the acid solution which is used in forming the anti-reflective layer comprises, based on 100 wt % of the acid solution, 10 wt % or less of hydrogen fluoride, 5 wt % or less of ammonium fluoride, 5 wt % or less of nitric acid, 5 wt % or less of phosphoric acid, 10 wt % or more to 40 wt % or more of hydrochloric acid, and the remainder being water.
6. The method of claim 1 , wherein forming the nano-protrusions comprises: forming an anti-glare layer including protrusions having a width of several tens of nm to several hundreds of nm by first wet etching using an acid solution; and forming an anti-reflective layer including protrusions having a width of several nm to several tens of nm on the anti-glare layer by second wet etching using an acid solution.
7. The method of claim 3 , wherein the content of hydrogen fluoride in the acid solution is 10 wt % or less.
8. The method of claim 7 , wherein when forming the anti-glare layer, the content of nitric acid in the acid solution is 10 wt % or more and 25 wt % or less, and when forming the anti-reflective layer, the content of the nitric acid in the acid solution is 5 wt % or less.
9. The method of claim 3 , wherein the acid solution contains ammonium fluoride or phosphoric acid, and the content of the ammonium fluoride or the phosphoric acid is 5 wt % or less.
10. The method of claim 7 , wherein when forming the anti-glare layer, the content of hydrochloric acid in the acid solution is 10 wt % or less, and when forming the anti-reflective layer, the content of the hydrochloric acid in the acid solution is 10 wt % or more and 40% wt or less.