IP Library Granted Patent US 11,619,543
Granted Patent B2
US 11,619,543 · App. 17/269,343 · Granted Apr 4, 2023

Polymer-coated high-index waveguide for acoustic sensing

Inventors: Amir Rozental (Haifa, IL); Resmi Ravi Kumar (Haifa, IL); Shai Tsesses (Nesher, IL); Assaf Grinberg (Binyamina, IL)
Assignee: TECHNION RESEARCH & DEVELOPMENT FOUNDATION LIMITED
G01H9/004A61B5/0095G02F1/0134G02F1/11A61B5/0084G02F1/0131
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,619,543
App. No.
17/269,343
Granted
Apr 4, 2023
Kind
B2
Abstract

Apparatus is provided including an acoustic sensor ( 50 ) having an optical waveguide ( 20 ). The optical waveguide ( 20 ) includes a waveguide core ( 202 ) having a waveguide core refractive index and a waveguide core photo-elastic coefficient, and an over-cladding layer ( 204 ) coupled to the waveguide core ( 202 ) and including an optically transparent polymer having an over-cladding refractive index and an over-cladding photo-elastic coefficient. The waveguide core refractive index is greater than the over-cladding refractive index, and the over-cladding photo-elastic coefficient is greater than the waveguide core photo-elastic coefficient. Other applications are also described.

Claims (32)

1. Apparatus comprising:

an acoustic sensor comprising an optical waveguide, the optical waveguide comprising:

a waveguide core having a waveguide core refractive index and a waveguide core photo-elastic coefficient;

an over-cladding layer coupled to the waveguide core and comprising an optically transparent polymer having an over-cladding refractive index and an over-cladding photo-elastic coefficient;

wherein the waveguide core refractive index is greater than the over-cladding refractive index, and a magnitude of the over-cladding photo-elastic coefficient is greater than a magnitude of the waveguide core photo-elastic coefficient.

2. The apparatus according to claim 1 , wherein the over-cladding layer comprises a bisbenzocyclobutene (BCB) over-cladding layer.

3. The apparatus according to claim 1 , wherein the waveguide core refractive index is at least 1.7.

4. The apparatus according to claim 1 , wherein a maximum magnitude of the photo-elastic coefficient of the waveguide core is 20 TPa −1 .

5. The apparatus according to claim 1 , wherein the over-cladding refractive index is lower than 1.7.

6. The apparatus according to claim 1 , wherein the over-cladding photo-elastic coefficient is at least four times greater than the waveguide core photo-elastic coefficient.

7. The apparatus according to claim 1 , wherein the optically transparent polymer of the over-cladding has a Young Modulus of under 10 (E) GPa.

8. The apparatus according to claim 1 , wherein the waveguide core comprises silicon.

9. The apparatus according to claim 1 , further comprising a light source arranged such that an optical signal generated by the light source and directed at the optical waveguide is modulated due to an acoustic wave impinging upon the optical waveguide.

10. The apparatus according to claim 9 , wherein the light source comprises a laser configured to generate a laser beam.

11. The apparatus according to claim 9 , wherein the signal generated by the light source is modulate in phase.

12. The apparatus according to claim 9 , wherein the signal generated by the light source is modulate in amplitude.

13. The apparatus according to claim 1 , wherein the optical waveguide comprises one or more optical resonators.

14. The apparatus according to claim 13 , wherein the optical waveguide is the resonator.

15. The apparatus according to claim 13 , wherein the one or more optical resonators are selected from the group consisting of: π phase-shifted Bragg grating (π-BG), Fabry-Perot cavity, and optical-ring resonator.

16. A system comprising:

an optical waveguide comprising:

a waveguide core having a waveguide core refractive index and a waveguide core photo-elastic coefficient;

an over-cladding layer coupled to the waveguide core and comprising an optically transparent polymer having an over-cladding refractive index lower than the waveguide core refractive index, and a magnitude of the over-cladding photo-elastic coefficient greater than a magnitude of the waveguide core photo-elastic coefficient;

an interferometer configured to generate, from a laser source, a laser beam directed at the optical waveguide such that the laser beam propagates through the optical waveguide, thereby modulating the laser beam by an acoustic wave impinging upon the optical waveguide.

17. The system according to claim 16 , wherein the interferometer is further configured to measure the modulation when the optical waveguide is being impinged by the acoustic wave, to calculate shifts in a spectral response of the optical waveguide based on the measuring, the shifts being indicative of a waveform of the acoustic wave.

18. The system according to claim 16 , wherein the optical waveguide comprises one or more optical resonators.

19. Apparatus comprising:

an acoustic sensor comprising an optical waveguide, the optical waveguide comprising:

a waveguide core having a waveguide core refractive index and a waveguide core photo-elastic coefficient;

an over-cladding layer coupled to the waveguide core and comprising an optically transparent polymer having an over-cladding refractive index and an over-cladding photo-elastic coefficient;

wherein the waveguide core refractive index is greater than the over-cladding refractive index, and the over-cladding young modulus is at least one order of magnitude smaller than the waveguide core young modulus.

20. The Apparatus of claim 19 , wherein the optically transparent polymer of the over-cladding has a Young Modulus of under 10 (E) GPa.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2021
From: ROZENTAL, AMIR; KUMAR, RESMI RAVI; TSESSES, SHAI; GRINBERG, ASSAF
To: TECHNION RESEARCH & DEVELOPMENT FOUNDATION LIMITED
Reel/Frame 055316/0570 →
Continuity (2)
Provisional Application 62720050 · Aug 20, 2018
Related Publication 20210325237A1 · Oct 21, 2021