Micromechanical sensor system, method for using a micromechanical sensor system
A micromechanical sensor system, in particular, an acceleration sensor, including a substrate having a main extension plane, the sensor system including a first mass and a second mass. The first and second masses are each designed to be at least partially movable in a vertical direction, perpendicular to the main extension plane of the substrate. The first mass includes a stop structure, wherein the stop structure has an overlap with the second mass in the vertical direction.
1. A micromechanical sensor system, comprising:
a substrate having a main extension plane; and
a first mass and a second mass, the first and second masses each being configured to be at least partially movable in a vertical direction, perpendicular to the main extension plane of the substrate, the first mass including a stop structure which includes two stop springs, wherein each of the two stop springs of the stop structure has an overlap with the second mass in the vertical direction,
wherein the second mass includes a further stop structure which includes two further stop springs, wherein each of the two further stop springs of the further stop structure has a further overlap with the first mass in the vertical direction,
wherein the first mass is configured to come in mechanical contact with an overlapping section of the further stop structure in the vertical direction, and the second mass is configured to come in mechanical contact with an overlapping section of the stop structure in the vertical direction.
2. The micromechanical sensor system as recited in claim 1 , wherein the micromechanical sensor system is an acceleration sensor.
3. The micromechanical sensor system as recited in claim 1 , wherein the overlap of the stop structure with the second mass in the vertical direction is formed in that the stop structure, in the vertical direction, is at least partially situated between the second mass and the substrate.
4. The micromechanical sensor system as recited in claim 1 , wherein the further overlap of the further stop structure with the first mass in the vertical direction is formed in that the further stop structure, in the vertical direction, is at least partially situated between the first mass and the substrate.
5. The micromechanical sensor system as recited in claim 1 , wherein the sensor system is configured in such a way that a contact is formed between the stop structure and the second mass in an overload case of the sensor system, the sensor system being configured in such a way that a contact is formed between the further stop structure and the first mass in the overload case of the sensor system.
6. The micromechanical sensor system as recited in claim 1 , wherein the stop structure is resilient, and the further stop structure is resilient.
7. The micromechanical sensor system as recited in claim 1 , wherein the second mass includes a contact element, the contact element being a knob, the contact element being situated in such a way that, in and/or after an overload case of the sensor system, a contact between the first mass and the second mass is established via the contact element and the stop structure, the first mass including a further contact element, the further contact element being a further knob, the further contact element being situated in such a way that, in and/or after the overload case of the sensor system, a contact between the first mass and the second mass is established via the further contact element and the further stop structure.
8. A method for using a micromechanical sensor system for measuring a measuring variable, the method comprising:
providing the micromechanical sensor system, the micromechanical system including:
a substrate having a main extension plane, and
a first mass and a second mass, the first and second masses each being configured to be at least partially movable in a vertical direction, perpendicular to the main extension plane of the substrate, the first mass including a stop structure which includes two stop springs, wherein each of the two stop springs of the stop structure has an overlap with the second mass in the vertical direction; and
measuring an acceleration using the micromechanical sensor system,
wherein the second mass includes a further stop structure which includes two further stop springs, wherein each of the two further stop springs of the further stop structure has a further overlap with the first mass in the vertical direction, a contact being formed between the further stop structure and the first mass in the overload case of the sensor system such that the first mass is configured to come in mechanical contact with an overlapping section of the further stop structure in the vertical direction, and the second mass is configured to come in mechanical contact with an overlapping section of the stop structure in the vertical direction.
9. The method as recited in claim 8 , wherein a contact is formed between the stop structure and the second mass in an overload case of the sensor system.
10. The method as recited in claim 8 , wherein, in the overload case of the sensor system, the contact is formed between the stop structure and the second mass before the second mass and/or the first mass comes in contact with a further structure of the sensor system, in the overload case of the sensor system the contact is formed between the further stop structure and the first mass before the first mass and/or the second mass comes in contact with the further structure of the sensor system.