Biosensor and method of forming the same
A biosensor is provided. The biosensor includes a substrate, photodiodes, pixelated filters, an excitation light rejection layer and an immobilization layer. The substrate has pixels. The photodiodes are disposed in the substrate and correspond to one of the pixels, respectively. The pixelated filters are disposed on the substrate. The excitation light rejection layer is disposed on the pixelated filter. The immobilization layer is disposed on the excitation light rejection layer.
1. A biosensor, comprising:
a substrate having pixels;
photodiodes disposed in the substrate and corresponding to one of the pixels, respectively;
pixelated filters disposed on the substrate;
an excitation light rejection layer disposed on the pixelated filter;
an immobilization layer disposed on the excitation light rejection layer; and
an aperture structure embedded in the immobilization layer,
wherein the pixelated filters are isolated by a grid wall, and a top surface of the grid wall and a top surface of the pixelated filters are coplanar,
wherein the aperture structure completely overlaps a first group of the photodiodes and exposes a second group of the photodiodes, with the first and second groups of the photodiodes arranged alternately.
2. The biosensor as claimed in claim 1 , wherein some of the pixelated filters are organic color filters and the other pixelated filters are dielectric interference filters.
3. The biosensor as claimed in claim 2 , wherein each of the organic color filters corresponds to one of the pixels and each of the dielectric interference filters corresponds to one of the pixels.
4. The biosensor as claimed in claim 2 , wherein each of the organic color filters corresponds to one of the pixels and each of the dielectric interference filters corresponds to two of the pixels.
5. The biosensor as claimed in claim 2 , wherein the organic color filters are isolated by the dielectric interference filters.
6. The biosensor as claimed in claim 2 , wherein the dielectric interference filters are a bandpass filter, a shortpass filter, a longpass filter, or a multiple bandpass filter.
7. The biosensor as claimed in claim 1 , wherein the pixelated filters are organic color filters.
8. The biosensor as claimed in claim 1 , further comprising a waveguide embedded in the immobilization layer.
9. The biosensor as claimed in claim 1 , further comprising:
an aperture structure embedded in the immobilization layer; and
a waveguide disposed on the aperture structure.
10. The biosensor as claimed in claim 1 , wherein the excitation light rejection layer is a dielectric interference filter embedded with a metal layer.
11. A method of forming a biosensor, comprising:
providing a substrate having pixels;
forming photodiodes in the substrate, wherein each of the photodiodes corresponds to one of the pixels, respectively;
forming pixelated filters on the substrate;
forming an excitation light rejection layer on the pixelated filters;
forming an immobilization layer on the excitation light rejection layer; and
forming an aperture structure embedded in the immobilization layer,
wherein the pixelated filters are isolated by a grid wall, and a top surface of the grid wall and a top surface of the pixelated filters are coplanar,
wherein the aperture structure completely overlaps a first group of the photodiodes and exposes a second group of the photodiodes, with the first and second groups of the photodiodes arranged alternately.
12. The method as claimed in claim 11 , wherein some of the pixelated filters are organic color filters and the other pixelated filters are dielectric interference filters.
13. The method as claimed in claim 12 , wherein each of the organic color filters corresponds to one of the pixels and each of the dielectric interference filters corresponds to one of the pixels.
14. The method as claimed in claim 12 , wherein each of the organic color filters corresponds to one of the pixels and each of the dielectric interference filters corresponds to two of the pixels.
15. The method as claimed in claim 12 , wherein the organic color filters are isolated by the dielectric interference filters.
16. The method as claimed in claim 12 , wherein the dielectric interference filters are a bandpass filter, a shortpass filter, a longpass filter, or a multiple bandpass filter.
17. The method as claimed in claim 11 , wherein the pixelated filters are organic color filters.
18. The method as claimed in claim 11 , further comprising forming an aperture structure in the immobilization layer.
19. The method as claimed in claim 11 , further comprising forming a waveguide in the immobilization layer.