IP Library › Granted Patent US 11,631,603
Granted Patent B2
US 11,631,603 · App. 17/259,220 · Granted Apr 18, 2023

Storage shelf, and method for installing storage shelf

Inventors: Tatsuo Tsubaki (Ise, JP); Shinji Onishi (Ise, JP)
Assignee: MURATA MACHINERY, LTD.
H01L21/67383H01L21/67733H01L21/67769
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Quick Facts
Patent No.
US 11,631,603
App. No.
17/259,220
Granted
Apr 18, 2023
Kind
B2
Abstract

A storage shelf includes second shelf modules each including a second shelf board, a supply nozzle, an MFC configured to adjust a flow rate of the fluid supplied from the supply nozzle, and a third pipe connecting between the MFC and a main pipe connected to a supply source of the fluid, and suspension frames each including additional shelf supporting portions supporting the second shelf modules from below and a pair of suspending portions and a pair of additional suspending portions suspending and supporting the additional shelf supporting portions. The suspension frames are disposed at regular intervals along one direction. Each second shelf module is laid over between additional shelf supporting portions of suspension frames adjacent to each other in the one direction, and a pipe connector being connectable to the main pipe is provided with an end of the third pipe.

Claims (25)

1. A storage shelf comprising:

a shelf module including a shelf board on which a container is to be placed, a nozzle to supply fluid into the container placed on the shelf board, a mass flow controller to adjust a flow rate of the fluid supplied from the nozzle, and a pipe connecting between the mass flow controller and a main pipe connected to a supply source of the fluid; and

suspension frames each including a shelf supporting portion supporting the shelf module from below and a pair of suspending portions suspending and supporting the shelf supporting portion; wherein

the suspension frames are disposed at regular intervals along one direction;

the shelf module is laid over between the shelf supporting portions of the suspension frames adjacent to each other in the one direction;

the shelf module laid over between the shelf supporting portions is fixed to the shelf supporting portions of the suspension frames by bolts or screws inserted from below into through holes in the shelf supporting portions;

the shelf module includes a shelf frame laid over between the shelf supporting portions of the suspension frames adjacent to each other in the one direction and a plurality of shelf boards attached to the shelf frame; and

the mass flow controller is provided on each of the shelf boards.

2. The storage shelf according to claim 1 , wherein

the shelf module further includes a cable including a first end connected to each mass flow controller; and

a second end of the cable is provided with a cable connector being connectable to a main cable connected to a control device.

3. The storage shelf according to claim 1 , wherein the shelf module is provided with branch connecting portions each being connectable between the main pipe and the pipe such that a number of the branch connecting portions corresponds to a number of the shelf boards.

4. A storage shelf comprising:

at least one shelf module selected from among two types of shelf modules, lengths of which in an extending direction are the same and types of which are different in presence or absence of a purge function, the at least one shelf module extending along a track for an overhead traveling vehicle to convey a container and on which the container is to be placed; and

a plurality of suspension frames that suspend the at least one shelf module from a fixed structure, the plurality of the suspension frames each including shelf supporting portions supporting the at least one shelf module from below and extending in one direction and a pair of suspending portions extending from both ends of each shelf supporting portion to the fixed structure, the plurality of suspension frames being selected from among a plurality of types of suspension frames, lengths of which in extending directions of the shelf supporting portion and the suspending portions are different from each other; wherein

the plurality of suspension frames are disposed at regular intervals along a traveling direction of the overhead traveling vehicle such that the extending direction of the shelf supporting portion extends in a direction orthogonal to the traveling direction;

the at least one shelf module is laid over between the shelf supporting portions of the plurality of suspension frames adjacent to each other in the traveling direction; and

the at least one shelf module laid over between the shelf supporting portions is fixed to the shelf supporting portions of the plurality of suspension frames by fastening members.

5. A method for installing a storage shelf, the method comprising:

selecting at least one shelf module selected from among two types of shelf modules, lengths of which in an extending direction are the same and types of which are different in presence or absence of a purge function, the at least one shelf module extending along a track for an overhead traveling vehicle to convey a container and on which the container is to be placed;

selecting a plurality of suspension frames that suspend the at least one shelf module from a fixed structure, the plurality of the suspension frames each including shelf supporting portions supporting the at least one shelf module from below and extending in one direction and a pair of suspending portions extending from both ends of each shelf supporting portion to the fixed structure, the plurality of suspension frames being selected from among a plurality of types of suspension frames, lengths of which in extending directions of the shelf supporting portion and the suspending portions are different from each other;

disposing the selected plurality of suspension frames at regular intervals along a traveling direction of the overhead traveling vehicle such that the extending direction of the shelf supporting portion extends in a direction perpendicular or substantially perpendicular to the traveling direction;

laying the selected at least one shelf module over between shelf supporting portions of the plurality of suspension frames adjacent to each other in the traveling direction; and

fixing the at least one shelf module laid over between the shelf supporting portions to the shelf supporting portions of the plurality of suspension frames by fastening members.

6. The storage shelf according to claim 2 , wherein the shelf module is provided with branch connecting portions each being connectable between the main pipe and the pipe such that a number of the branch connecting portions corresponds to a number of the shelf boards.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2021
From: TSUBAKI, TATSUO; ONISHI, SHINJI
To: MURATA MACHINERY, LTD.
Reel/Frame 054871/0660 →
Priority Claims (1)
JP JP2018-136927 · Jul 20, 2018 · national
Continuity (1)
Related Publication 20210272830A1 · Sep 2, 2021
Cited By (1)
US 12,600,565