Magnetic sensor
An object of the present invention is to provide a magnetic sensor less subject to an environmental magnetic field. A magnetic sensor includes magnetic detection elements MR 1 to MR 4 positioned on a first plane P 1 and a magnetic member 30 A provided on a second plane P 2 . The magnetic member 30 A includes first and second leg parts 41 and 42 and a first main body part 51 positioned between the first and second leg parts 41 and 42 so as to form a first space 61 between itself and the second plane P 2 . The magnetic detection elements MR 1 to MR 4 are covered with the first main body part 51 . According to the present invention, magnetic field to be detected is collected to the first and second leg parts 41 and 42 , and the magnetic detection elements MR 1 to MR 4 are covered with the first main body part 51 , thereby allowing an environmental magnetic field acting as noise to bypass the magnetic detection elements MR 1 to MR 4 through the first main body part 51 . Thus, influence of the environmental magnetic field can be reduced.
1. A magnetic sensor comprising:
a substrate having a surface extending in a first direction and a second direction perpendicular to the first direction;
first and second magnetic detection elements formed on the surface of the substrate and arranged in the first direction; and
a magnetic member including:
a main body part facing the surface of the substrate so as to overlap the first and second magnetic detection elements in a third direction perpendicular to the first and second directions; and
a leg part arranged between the surface of the substrate and the main body part,
wherein the surface of the substrate has a first region sandwiched between the first and second magnetic detection elements in the first direction, and
wherein the leg part of the magnetic member overlaps the first region of the surface of the substrate in the third direction.
2. The magnetic sensor as claimed in claim 1 , wherein a size of the main body part in the second direction is greater than a size of the main body part in the first direction.
3. The magnetic sensor as claimed in claim 1 , wherein a size of the main body part in the first direction is greater than a size of the main body part in the second direction.
4. The magnetic sensor as claimed in claim 1 , wherein the main body part and the leg part are magnetically coupled to each other.
5. The magnetic sensor as claimed in claim 1 , wherein the main body part and the leg part are integrated.
6. The magnetic sensor as claimed in claim 1 , wherein a magnetization fixing direction of each of the first and second magnetic detection elements is the first direction.
7. The magnetic sensor as claimed in claim 1 , wherein an upper surface of the main body part of the magnetic member positioned opposite to a lower surface on which the leg part is provided is substantially flat.
8. The magnetic sensor as claimed in claim 1 , wherein a size of the leg part in the second direction is greater than a size of the leg part in the first direction.
9. The magnetic sensor as claimed in claim 1 , wherein the leg part does not overlap the first and second magnetic detection elements as viewed from the first direction.
10. The magnetic sensor as claimed in claim 1 , wherein a distance between the leg part and the first magnetic detection element in the first direction is a same as a distance between the leg part and the second magnetic detection element in the first direction.
11. The magnetic sensor as claimed in claim 1 ,
wherein the main body part has a first lower surface facing the first magnetic detection element and a second lower surface facing the second magnetic detection element, and
wherein the leg part is arranged between the first and second lower surfaces of the main body part in the first direction.
12. The magnetic sensor as claimed in claim 11 , further comprising third and fourth magnetic detection elements formed on the surface of the substrate,
wherein the third and fourth magnetic detection elements are arranged in the first direction,
wherein the first and third magnetic detection elements are arranged in the second direction,
wherein the second and fourth magnetic detection elements are arranged in the second direction,
wherein the first lower surface of the main body part further faces the third magnetic detection element,
wherein the second lower surface of the main body part further faces the fourth magnetic detection element,
wherein the surface of the substrate further has a second region sandwiched between the third and fourth magnetic detection elements in the first direction, and
wherein the leg part of the magnetic member further overlaps the second region of the surface of the substrate in the third direction.
13. A magnetic sensor comprising:
a substrate having a surface extending in a first direction and a second direction perpendicular to the first direction;
first and second magnetic detection elements formed on the surface of the substrate and arranged in the first direction; and
a magnetic member including:
a main body part facing the surface of the substrate so as to overlap the first and second magnetic detection elements in a third direction perpendicular to the first and second directions; and
a leg part arranged between the surface of the substrate and the main body part so as to overlap a space between the first and second magnetic detection elements in the third direction,
wherein a size of the leg part in the second direction is greater than a size of the leg part in the first direction.
14. The magnetic sensor as claimed in claim 13 , wherein a size of the main body part in the second direction is greater than a size of the main body part in the first direction.
15. The magnetic sensor as claimed in claim 13 , wherein a size of the main body part in the first direction is greater than a size of the main body part in the second direction.
16. The magnetic sensor as claimed in claim 13 , wherein the main body part and the leg part are magnetically coupled to each other.
17. The magnetic sensor as claimed in claim 13 , wherein the main body part and the leg part are integrated.
18. The magnetic sensor as claimed in claim 13 , wherein a magnetization fixing direction of each of the first and second magnetic detection elements is the first direction.
19. The magnetic sensor as claimed in claim 13 , wherein an upper surface of the main body part of the magnetic member positioned opposite to a lower surface on which the leg part is provided is substantially flat.
20. A magnetic sensor comprising:
a substrate having a surface extending in a first direction and a second direction perpendicular to the first direction;
first and second magnetic detection elements formed on the surface of the substrate and arranged in the first direction; and
a magnetic member including:
a main body part facing the surface of the substrate so as to overlap the first and second magnetic detection elements in a third direction perpendicular to the first and second directions; and
a leg part arranged between the surface of the substrate and the main body part so as to overlap a space between the first and second magnetic detection elements in the third direction,
wherein the leg part does not overlap the first and second magnetic detection elements as viewed from the first direction.
21. The magnetic sensor as claimed in claim 20 , wherein a size of the main body part in the second direction is greater than a size of the main body part in the first direction.
22. The magnetic sensor as claimed in claim 20 , wherein a size of the main body part in the first direction is greater than a size of the main body part in the second direction.
23. The magnetic sensor as claimed in claim 20 , wherein the main body part and the leg part are magnetically coupled to each other.
24. The magnetic sensor as claimed in claim 20 , wherein the main body part and the leg part are integrated.
25. The magnetic sensor as claimed in claim 20 , wherein a magnetization fixing direction of each of the first and second magnetic detection elements is the first direction.
26. The magnetic sensor as claimed in claim 20 , wherein an upper surface of the main body part of the magnetic member positioned opposite to a lower surface on which the leg part is provided is substantially flat.