Integrated assemblies
Some embodiments include an integrated assembly having a semiconductor die with memory array regions and one or more regions peripheral to the memory array regions. A stack of alternating insulative and conductive levels extends across the memory array regions and passes into at least one of the peripheral regions. The stack generates bending stresses on the die. At least one stress-moderating region extends through the stack and is configured to alleviate the bending stresses.
1. An integrated assembly comprising:
a memory array region extending across a portion of a die and comprising a stack of alternating insulative and conductive levels; the stack generating bending stresses on the die; and
one or more stress-moderating regions extending through the stack and configured to alleviate the bending stresses; the one or more stress-moderating regions together having an area which is at least about 5% of the total area of the memory array region.
2. The integrated assembly of claim 1 wherein at least one of the stress-moderating regions is within the memory array regions.
3. The integrated assembly of claim 1 wherein at least one of the stress-moderating regions is not within the memory array region.
4. The integrated assembly of claim 1 wherein at least one of the stress-moderating regions is filled with a stress-moderating material.
5. The integrated assembly of claim 4 wherein the stress-moderating material comprises silicon dioxide.
6. The integrated assembly of claim 4 wherein the stress-moderating material comprises a ceramic composition.
7. The integrated assembly of claim 6 wherein the ceramic composition includes silicon and one or more of nitrogen, oxygen and carbon.
8. The integrated assembly of claim 1 wherein the area of the one or more stress-moderating regions is at least about 10% of the total area of the memory array region.
9. The integrated assembly of claim 1 wherein the area of the one or more stress-moderating regions is at least about 20% of the total area of the memory array region.
10. The integrated assembly of claim 1 wherein the conductive levels comprise metal.
11. The integrated assembly of claim 1 wherein the conductive levels comprise tungsten.
12. The integrated assembly of claim 1 wherein at least one of the stress-moderating regions is only partially filled with a stress-moderating material.
13. The integrated assembly of claim 1 wherein the one or more stress-moderating regions comprises a first moderating region and a second moderating region, the first moderating region being different from the second moderating region.
14. The integrated assembly of claim 13 wherein the difference between the first and second stress-moderating regions comprises differing stress-moderating materials in the respective stress-moderating regions.
15. The integrated assembly of claim 13 wherein the difference between the first and second stress-moderating regions comprises one of the first and second stress-moderating regions is only partially filled with a stress-moderating material.
16. The integrated assembly of claim 13 wherein the difference between the first and second stress-moderating regions comprises one of the first and second stress-moderating regions being entirely filled with a stress-moderating material.