Photoelectric conversion apparatus, photoelectric conversion system, and moving object

1. A photoelectric conversion apparatus comprising:

a first chip including a first semiconductor layer having an avalanche diode, and a first multilayer wiring layer; and

a second chip including a second semiconductor layer having a signal processing portion for processing a signal from the avalanche diode, and a second multilayer wiring layer,

wherein the first chip is stacked on the second chip,

wherein the avalanche diode is applied with a first voltage and a second voltage,

wherein the signal processing portion is supplied with a third voltage,

wherein a potential difference between the first and the third voltages is larger than a potential difference between the second and the third voltages,

wherein the first or the second multilayer wiring layer is provided with a first electrode supplied with the first voltage from an outside of the first and second chips,

wherein the first or the second multilayer wiring layer is provided with a second electrode supplied with the second voltage from the outside of the first and the second chips, and

wherein the first electrode is not connected with the second semiconductor layer.

2. The photoelectric conversion apparatus according to claim 1 , wherein the second chip is provided with a quench element electrically connected to the avalanche diode.

3. The photoelectric conversion apparatus according to claim 2 ,

wherein the first chip has a first bonding portion,

wherein the second chip has a second bonding portion in contact with the first bonding portion,

wherein the avalanche diode is electrically connected with the quench element via the first and the second bonding portions, and

wherein, in a planar view, a length of the first electrode in a predetermined direction is larger than a length of the first bonding portion.

4. The photoelectric conversion apparatus according to claim 1 , wherein the first or the second multilayer wiring layer is provided with a third electrode supplied with the third voltage from the outside of the frist and second chips.

5. The photoelectric conversion apparatus according to claim 4 , wherein the third voltage is a ground voltage.

6. The photoelectric conversion apparatus according to claim 1 ,

wherein the first electrode is disposed in the first multilayer wiring layer, and

wherein the second electrode is disposed in the second multilayer wiring layer.

7. The photoelectric conversion apparatus according to claim 6 ,

wherein a bottom of a first opening for exposing the first electrode is disposed between a first surface of the first chip and a second surface of the first chip on a side opposite to the first surface, and

wherein a bottom of a second opening for exposing the second electrode is disposed between a third surface of the second chip bonded with the second surface and a fourth surface of the second chip on a side opposite to the third surface.

8. The photoelectric conversion apparatus according to claim 7 ,

wherein a third electrode supplied with the third voltage from the outside of the first and second chips is disposed in the second multilayer wiring layer, and

wherein a bottom of a third opening for exposing the third electrode is disposed between the third and the fourth surfaces.

9. The photoelectric conversion apparatus according to claim 8 ,

wherein the first and the second openings are formed by penetrating through the second semiconductor layer, and

wherein the first and the second openings are filled with electrodes.

10. The photoelectric conversion apparatus according to claim 9 , wherein the electrodes are in contact with the first electrode at the bottom of the first opening and are in contact with the second electrode at the bottom of the second opening.

11. The photoelectric conversion apparatus according to claim 1 ,

wherein a bottom of a first opening for exposing the first electrode is disposed between a first surface of the first chip and a second surface of the first chip on a side opposite to the first surface, and

wherein a bottom of a second opening for exposing the second electrode is disposed between the first and the second surfaces.

12. The photoelectric conversion apparatus according to claim 1 ,

wherein a bottom of a first opening for exposing the first electrode is disposed between a third surface of the second chip and a fourth surface of the second chip on a side opposite to the third surface, and

wherein a bottom of a second opening for exposing the second electrode is disposed between the third and the fourth surfaces.

13. The photoelectric conversion apparatus according to claim 1 , wherein the first voltage is a negative voltage, and the second voltage is a positive voltage.

14. The photoelectric conversion apparatus according to claim 1 , wherein the potential difference between the first voltage and the second voltage exceeds a threshold voltage that causes avalanche multiplication.

15. The photoelectric conversion apparatus according to claim 1 ,

wherein the first multilayer wiring layer has a first bonding portion, and

wherein the second multilayer wiring layer has a second bonding portion in contact with the first bonding portion, and

wherein the first voltage supplied with the first electrode is not applied to a bonding surface where the first bonding portion and the second bonding portion come into contact.

16. A photoelectric conversion system comprising:

the photoelectric conversion apparatus according to claim 1 ; and

a signal processing apparatus configured to process a signal output by the photoelectric conversion apparatus.

17. The photoelectric conversion system according to claim 16 , wherein the signal processing apparatus performs distance measurement and imaging based on the signal from the photoelectric conversion apparatus.

18. A moving object comprising:

the photoelectric conversion apparatus according to claim 1 ; and

a distance information acquisition unit configured to acquire information about a distance to an object based on distance measurement information based on the signal from the photoelectric conversion apparatus,

wherein the moving object further comprises a control unit configured to control the moving object based on the distance information.

19. A photoelectric conversion apparatus comprising:

a first chip including a first semiconductor layer having an avalanche diode; and

a second chip including a second semiconductor layer having a signal processing portion for processing a signal from the avalanche diode,

wherein the first and the second chips are stacked,

wherein the avalanche diode is supplied with a first voltage as a negative voltage and a second voltage as a positive voltage,

wherein a first electrode to which the first voltage is supplied from an outside of the first and the second chips is provided between a surface of the first semiconductor layer and the second, and

wherein the first voltage is not supplied to the second semiconductor layer.

20. The photoelectric conversion apparatus according to claim 19 , wherein the second chip is provided with a quench element electrically connected to the avalanche diode.

21. The photoelectric conversion apparatus according to claim 20 ,

wherein the first chip includes a first multilayer wiring layer,

wherein the second chip includes a second multilayer wiring layer; and

wherein the first and the second chips are stacked in layers on top of each other.

22. The photoelectric conversion apparatus according to claim 21 ,

wherein the first multilayer wiring layer has a first bonding portion,

wherein the second multilayer wiring layer has a second bonding portion in contact with the first bonding portion, and

wherein the first voltage supplied to the first electrode is not applied to a bonding surface where the first bonding portion and the second bonding portion come into contact.

23. The photoelectric conversion apparatus according to claim 22 ,

wherein the avalanche diode is electrically connected with the quench element via the first and the second bonding portions.

24. The photoelectric conversion apparatus according to claim 23 ,

wherein the signal processing portion is supplied with a third voltage, and

wherein a third electrode supplied with the third voltage from the outside of the first and the second chips is disposed in a same multilayer wiring layer as the first or the second multilayer wiring layer where the first electrode is disposed.

25. The photoelectric conversion apparatus according to claim 22 ,

wherein, in a planar view, a length of the first electrode in a predetermined direction is larger than a length of the first bonding portion in the predetermined direction.

26. The photoelectric conversion apparatus according to claim 21 ,

wherein the first or the second multilayer wiring layer is provided with the first electrode supplied with the first voltage from an outside of the photoelectric conversion apparatus; and

wherein the first or the second multilayer wiring layer is provided with a second electrode supplied with the second voltage from the outside of the first and the second chips.

27. The photoelectric conversion apparatus according to claim 26 ,

wherein the first electrode is disposed in the first multilayer wiring layer, and

wherein the second electrode is disposed in the second multilayer wiring layer.

28. The photoelectric conversion apparatus according to claim 21 ,

wherein the surface is not a surface opposite to the first multilayer wiring layer.

29. The photoelectric conversion apparatus according to claim 19 , wherein the potential difference between the first voltage and the second voltage exceeds a threshold voltage that causes avalanche multiplication.

30. A photoelectric conversion system comprising:

the photoelectric conversion apparatus according to claim 19 ; and

a signal processing apparatus configured to process a signal output by the photoelectric conversion apparatus.

31. A moving object comprising:

the photoelectric conversion apparatus according to claim 19 ; and

a distance information acquisition unit configured to acquire information about a distance to an object based on distance measurement information based on the signal from the photoelectric conversion apparatus,

wherein the moving object further comprises a control unit configured to control the moving object based on the distance information.