Temperature controlled/electrically biased wafer surround
A system and method for etching workpieces in a uniform manner are disclosed. The system includes a semiconductor processing system that generates a ribbon ion beam, and a workpiece holder that scans the workpiece through the ribbon ion beam. The workpiece holder includes a portion that extends beyond the workpiece, referred to as a halo. The halo may be independently heated to compensate for etch rate non-uniformities. In some embodiments, the halo may be independently biased such that its potential is different from the potential applied to the workpiece. In certain embodiments, the halo may be divided into a plurality of thermal zones that can be separately controlled. In this way, various etch rate non-uniformities may be addressed by controlling the potential and/or temperature of the various thermal zones of the halo.
1. An etching system, comprising:
a semiconductor processing system to generate a ribbon ion beam;
a workpiece holder;
a halo disposed around the workpiece holder, wherein the halo comprises an electrically conductive frame with an opening to accommodate the workpiece holder, and a protective covering disposed on the electrically conductive frame; and
a scanning motor to move the workpiece holder through the ribbon ion beam,
wherein the halo comprises resistive heaters to modify a temperature of the halo.
2. The etching system of claim 1 , wherein the resistive heaters are disposed in or on the protective covering.
3. The etching system of claim 2 , wherein the resistive heaters are disposed on an outer surface of the protective covering facing the electrically conductive frame.
4. The etching system of claim 1 , comprising a temperature sensor disposed on the halo to monitor a temperature of the halo.
5. The etching system of claim 1 , comprising a halo bias power supply to bias the electrically conductive frame at a voltage different from a voltage applied to the workpiece holder.
6. The etching system of claim 5 , wherein the halo bias power supply is referenced to the workpiece holder so the halo maintains a constant voltage offset from the workpiece holder.
7. The etching system of claim 5 , wherein the halo is electrically isolated from the workpiece holder using an insulating material.
8. An etching system, comprising:
a semiconductor processing system to generate a ribbon ion beam;
a workpiece holder;
a halo disposed around the workpiece holder, wherein the halo comprises an electrically conductive frame with an opening to accommodate the workpiece holder, and a protective covering disposed on the electrically conductive frame; and
a scanning motor to move the workpiece holder through the ribbon ion beam,
wherein the halo comprises a plurality of thermal zones to compensate for both radial and linear etch rate non-uniformities.
9. The etching system of claim 8 , wherein resistive heaters are disposed in or on the protective covering.
10. The etching system of claim 9 , wherein the resistive heaters are disposed on an outer surface of the protective covering facing the frame.
11. The etching system of claim 8 , wherein the halo is divided into a plurality of thermal zones.
12. The etching system of claim 11 , wherein the plurality of thermal zones may be independently controlled.
13. The etching system of claim 11 , further comprising a thermal controller, comprising a plurality of power supplies in communication with the plurality of thermal zones and a controller in communication with the thermal controller, wherein a workpiece type and etching species are input to the controller and the thermal controller supplies power to the plurality of thermal zones to achieve a desired temperature profile.
14. The etching system of claim 13 , further comprising a temperature sensor disposed in at least one thermal zone to monitor a temperature of the at least one thermal zone.
15. An etching system, comprising:
a semiconductor processing system to generate a ribbon ion beam;
a workpiece holder;
a halo disposed around the workpiece holder, wherein the halo comprises an electrically conductive frame and a protective covering disposed on the electrically conductive frame;
a scanning motor to move the workpiece holder through the ribbon ion beam; and
a halo bias power supply to bias the electrically conductive frame at a voltage different from a voltage applied to the workpiece holder.
16. The etching system of claim 15 , wherein the halo bias power supply is referenced to the workpiece holder so the halo maintains a constant voltage offset from the workpiece holder.
17. The etching system of claim 15 , wherein the halo is electrically isolated from the workpiece holder using an insulating material.
18. The etching system of claim 15 , wherein the electrically conductive frame is divided into a plurality of conductive regions, wherein a voltage applied to each conductive region is independently controlled.
19. The etching system of claim 15 , further comprising a controller in communication with the halo bias power supply, wherein a workpiece type and etching species are input to the controller and the halo bias power supply supplies power to the electrically conductive frame to achieve a desired change in edge etch rate.