IP Library Granted Patent US 11,664,377
Granted Patent B2
US 11,664,377 · App. 17/547,147 · Granted May 30, 2023

Forksheet transistor architectures

Inventors: Aaron D. Lilak (Beaverton, OR); Rishabh Mehandru (Portland, OR); Ehren Mannebach (Beaverton, OR); Patrick Morrow (Portland, OR); Willy Rachmady (Beaverton, OR)
Assignee: Intel Corporation
H01L27/0922H01L23/5283H01L29/1033
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Quick Facts
Patent No.
US 11,664,377
App. No.
17/547,147
Granted
May 30, 2023
Kind
B2
Abstract

Embodiments disclosed herein include a semiconductor device. In an embodiment, the semiconductor device comprises a first transistor strata. The first transistor strata comprises a first backbone, a first transistor adjacent to a first edge of the first backbone, and a second transistor adjacent to a second edge of the first backbone. In an embodiment, the semiconductor device further comprises a second transistor strata over the first transistor strata. The second transistor strata comprises a second backbone, a third transistor adjacent to a first edge of the second backbone, and a fourth transistor adjacent to a second edge of the second backbone.

Claims (49)

1. An integrated circuit structure, comprising:

a first dielectric backbone structure having a first side opposite a second side;

a first plurality of vertically stacked horizontal channel structures along the first side of the first dielectric backbone structure;

a second plurality of vertically stacked horizontal channel structures along the second side of the first dielectric backbone structure;

a first gate structure over and around the first plurality of vertically stacked horizontal channel structures;

a second gate structure over and around the second plurality of vertically stacked horizontal channel structures;

a second dielectric backbone structure having a first side opposite a second side, the second dielectric backbone structure separate and distinct from the first dielectric backbone, and the second dielectric backbone structure at least partially vertically overlapping with the first dielectric backbone structure or the first plurality of vertically stacked horizontal channel structures or the second plurality of vertically stacked horizontal channel structures;

a third plurality of vertically stacked horizontal channel structures along the first side of the second dielectric backbone structure;

a fourth plurality of vertically stacked horizontal channel structures along the second side of the second dielectric backbone structure;

a third gate structure over and around the third plurality of vertically stacked horizontal channel structures; and

a fourth gate structure over and around the fourth plurality of vertically stacked horizontal channel structures.

2. The integrated circuit structure of claim 1 , wherein the second dielectric backbone structure is in vertical alignment with the first dielectric backbone structure.

3. The integrated circuit structure of claim 1 , wherein the second dielectric backbone structure is vertically offset from the first dielectric backbone structure.

4. The integrated circuit structure of claim 1 , wherein the first and second pluralities of vertically stacked horizontal channel structures are in direct contact with the first dielectric backbone structure.

5. The integrated circuit structure of claim 1 , wherein the third and fourth pluralities of vertically stacked horizontal channel structures are in direct contact with the second dielectric backbone structure.

6. The integrated circuit structure of claim 1 , wherein the first and second pluralities of vertically stacked horizontal channel structures are in direct contact with the first dielectric backbone structure, and wherein the third and fourth pluralities of vertically stacked horizontal channel structures are in direct contact with the second dielectric backbone structure.

7. The integrated circuit structure of claim 1 , wherein the first and second gate structures are N-type gate structures, and the third and fourth gate structures are P-type gate structures.

8. The integrated circuit structure of claim 1 , wherein the first and second gate structures are P-type gate structures, and the third and fourth gate structures are N-type gate structures.

9. The integrated circuit structure of claim 1 , wherein the first and third gate structures are N-type gate structures, and the second and fourth gate structures are P-type gate structures.

10. The integrated circuit structure of claim 1 , wherein the first and third gate structures are P-type gate structures, and the second and fourth gate structures are N-type gate structures.

11. A computing device, comprising:

a board; and

a component coupled to the board, the component including an integrated circuit structure, comprising:

a first dielectric backbone structure having a first side opposite a second side;

a first plurality of vertically stacked horizontal channel structures along the first side of the first dielectric backbone structure;

a second plurality of vertically stacked horizontal channel structures along the second side of the first dielectric backbone structure;

a first gate structure over and around the first plurality of vertically stacked horizontal channel structures;

a second gate structure over and around the second plurality of vertically stacked horizontal channel structures;

a second dielectric backbone structure having a first side opposite a second side, the second dielectric backbone structure separate and distinct from the first dielectric backbone, and the second dielectric backbone structure at least partially vertically overlapping with the first dielectric backbone structure or the first plurality of vertically stacked horizontal channel structures or the second plurality of vertically stacked horizontal channel structures;

a third plurality of vertically stacked horizontal channel structures along the first side of the second dielectric backbone structure;

a fourth plurality of vertically stacked horizontal channel structures along the second side of the second dielectric backbone structure;

a third gate structure over and around the third plurality of vertically stacked horizontal channel structures; and

a fourth gate structure over and around the fourth plurality of vertically stacked horizontal channel structures.

12. The computing device of claim 11 , further comprising:

a memory coupled to the board.

13. The computing device of claim 11 , further comprising:

a communication chip coupled to the board.

14. The computing device of claim 11 , further comprising:

a processor coupled to the board.

15. The computing device of claim 11 , further comprising:

a battery coupled to the board.

16. The computing device of claim 11 , further comprising:

a GPS coupled to the board.

17. The computing device of claim 11 , further comprising:

a compass coupled to the board.

18. The computing device of claim 11 , further comprising:

a speaker coupled to the board.

19. The computing device of claim 11 , wherein the component is a packaged integrated circuit die.

20. The computing device of claim 11 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.

Continuity (2)
Continuation 16827566 · Mar 23, 2020
Related Publication 20220102346A1 · Mar 31, 2022
Cited By (2)
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