Conveyance apparatus and method of manufacturing article

1. A conveyance apparatus comprising:

a stator including a plurality of coils arranged along a first direction; and

a mover configured to move along the first direction and including a plurality of magnet groups arranged in a row along the first direction,

wherein the plurality of magnet groups has a first magnet group that includes a plurality of first magnets arranged to alternate polarities along the first direction, and a second magnet group that includes a plurality of second magnets arranged to alternate polarities along a second direction intersecting with the first direction,

wherein at least one of the plurality of coils includes a core, a wire-wound portion wound around the core, and a yoke, and

wherein the yoke is adjacent to an outer periphery of the wire-wound portion in the second direction.

2. The conveyance apparatus according to claim 1 , wherein the yoke is configured to sandwich at least one of the plurality of coils in the second direction.

3. The conveyance apparatus according to claim 1 ,

wherein the yoke is connected to the core, and

wherein a connected portion of the yoke and the core (i) is a surface of the core opposite to a surface of the core that faces the mover or (ii) is a side surface of the core that faces the second direction.

4. The conveyance apparatus according to claim 1 , wherein the yoke is made of a magnetic material or a material with relative magnetic permeability of 1000 or more.

5. The conveyance apparatus according to claim 1 ,

wherein the mover includes a first yoke on which the first magnet group is arranged and a second yoke on which the second magnet group is arranged, and

wherein the first yoke and the second yoke are separately arranged.

6. The conveyance apparatus according to claim 5 , wherein the first yoke and the second yoke are made of a magnetic material or a material with relative magnetic permeability of 1000 or more.

7. A method of manufacturing an article, the method comprising:

processing a work conveyed by a conveyance apparatus; and

manufacturing the article from processing the work,

wherein the conveyance apparatus is according to the conveyance apparatus of claim 1 .

8. The conveyance apparatus according to claim 1 , wherein the yoke is arranged in the second direction to sandwich the plurality of coils.

9. The conveyance apparatus according to claim 1 , wherein the mover includes a first surface, and the first magnet group and the second magnet group are arranged on the first surface.

10. The conveyance apparatus according to claim 9 , wherein the first surface is an upper surface.

11. The conveyance apparatus according to claim 1 ,

wherein polarities of the plurality of first magnets adjacent to each other in the first direction are different, and

wherein polarities of the plurality of second magnets adjacent to each other in the second direction are different.

12. The conveyance apparatus according to claim 1 , wherein the second magnet group is provided closer to an end of the mover than the first magnet group in the first direction.

13. The conveyance apparatus according to claim 1 , wherein the first magnet group includes a plurality of first magnet groups, the second magnet group includes a plurality of second magnet groups, and at least one of the plurality of first magnet groups is provided between two second magnet groups of the plurality of second magnet groups.

14. A conveyance apparatus comprising:

a stator including a plurality of coils arranged along a first direction;

a mover configured to move along the first direction and including a plurality of magnet groups arranged in a row along the first direction, wherein the plurality of magnet groups has a first magnet group that includes a plurality of first magnets arranged to alternate polarities along the first direction, and a second magnet group that includes a plurality of second magnets arranged to alternate polarities along a second direction intersecting with the first direction;

a first yoke on which the first magnet group is arranged; and

a second yoke on which the second magnet group is arranged,

wherein the first yoke and the second yoke are separately arranged with a predetermined distance.

15. A method of manufacturing an article, the method comprising:

processing a work conveyed by a conveyance apparatus; and

manufacturing the article from processing the work,

wherein the conveyance apparatus is according to the conveyance apparatus of claim 14 .

16. The conveyance apparatus according to claim 14 , wherein the mover includes a first surface, and the first magnet group and the second magnet group are arranged on the first surface.

17. The conveyance apparatus according to claim 16 , wherein the first surface is an upper surface.

18. The conveyance apparatus according to claim 14 ,

wherein polarities of the plurality of first magnets adjacent to each other in the first direction are different, and

wherein polarities of the plurality of second magnets adjacent to each other in the second direction are different.

19. The conveyance apparatus according to claim 14 , wherein the second magnet group is provided closer to an end of the mover than the first magnet group in the first direction.

20. The conveyance apparatus according to claim 14 , wherein the first magnet group includes a plurality of first magnet groups, the second magnet group includes a plurality of second magnet groups, and at least one of the plurality of first magnet groups is provided between two second magnet groups of the plurality of second magnet groups.