Semiconductor package including non-conductive film between package substrate and semiconductor chip thereon
A semiconductor package including a package substrate, a semiconductor chip on a top surface of the package substrate, a connection terminal between the package substrate and the semiconductor chip, the connection terminal connecting the package substrate to the semiconductor chip, a non-conductive film (NCF) between the package substrate and semiconductor chip, the NCF surrounding the connection terminal and bonding the semiconductor chip to the package substrate, and a side encapsulation material covering a side surface of the semiconductor chip, contacting the package substrate, and including a first portion between a bottom surface of the semiconductor chip and the top surface of the package substrate may be provided. At least a portion of the NCF includes a second portion that horizontally protrudes from the semiconductor chip when viewed, and a portion of the side encapsulation material is in contact with the bottom surface of the semiconductor chip.
1. A method of manufacturing semiconductor package, the method comprising:
providing an interposer substrate with a non-conductive film (NCF) attached on a lower surface of the interposer substrate;
bonding the interposer substrate to a package substrate using the NCF; and
providing a side encapsulation material covering a side surface of the interposer substrate,
wherein the side encapsulation material includes a portion interposed between the interposer substrate and the package substrate, and
wherein the side encapsulation material is in contact with the lower surface of the interposer substrate.
2. The method of claim 1 , wherein an area of the NCF attached to the lower surface of the interposer substrate is same as an area of the interposer substrate.
3. The method of claim 1 , wherein the interposer substrate is bonded to the package substrate by a thermal compression process.
4. The method of claim 3 , wherein the NCF is deformed during the thermal compression process so that an area of the NCF and an area of the interposer substrate are different from each other.
5. The method of claim 1 , wherein a filler mass of the NCF ranges from 30 wt % to 60 wt %.
6. The method of claim 1 , wherein the NCF is transparent.
7. The method of claim 1 , wherein a filler mass of the side encapsulation material is higher than a filler mass of the NCF.
8. The method of claim 1 , wherein a filler mass of the side encapsulation material ranges from 40 wt % to 90 wt %.
9. The method of claim 1 , wherein a Young's modulus of the side encapsulation material is greater than a Young's modulus of the NCF.
10. The method of claim 1 , wherein the providing a side encapsulation material comprises:
providing a liquid resin along the side surface of the interposer substrate; and
curing the liquid resin.
11. The method of claim 1 , wherein the side encapsulation material and the NCF completely fill a space between the interposer substrate and the package substrate.
12. The method of claim 1 , further comprising:
mounting first to third semiconductor chips on the interposer substrate.
13. A method of manufacturing semiconductor package, the method comprising:
bonding an interposer substrate to a package substrate using a non-conductive film (NCF);
providing a liquid resin along side surfaces of the interposer substrate such a portion of the liquid resin flows into a space between the package substrate and the interposer substrate;
curing the liquid resin; and
mounting a plurality of semiconductor chips on the interposer substrate,
wherein the liquid resin has a filler mass different from a filler mass of the NCF.
14. The method of claim 13 , wherein the filler mass of the NCF ranges from 30 wt % to 60 wt %.
15. The method of claim 13 , wherein the filler mass of the liquid resin is greater than the filler mass of the NCF.
16. The method of claim 13 , wherein the filler mass of the liquid resin ranges from 40 wt % to 90 wt %.
17. The method of claim 13 , wherein a Young's modulus of the liquid resin is greater than a Young's modulus of the NCF.
18. A method of manufacturing semiconductor package, the method comprising:
attaching a non-conductive film (NCF) onto a lower surface of a wafer including a plurality of semiconductor chips and scribe lane between the semiconductor chips;
singulating the plurality of semiconductor chips and the NCF along the scribe lane such that a first semiconductor chip of the plurality of semiconductor chips and a corresponding portion of the NCF have same area and shape;
bonding the first semiconductor chip to a package substrate using the corresponding portion of the NCF; and
providing a side encapsulation material covering a side surface of the first semiconductor chip and having a filler mass greater than a filler mass of the NCF,
wherein the side encapsulation material includes a portion interposed between the first semiconductor chip and the package substrate.
19. The method of claim 18 , wherein the first semiconductor chip is bonded to the package substrate by a thermal compression process.
20. The method of claim 19 , wherein the corresponding portion of the NCF is deformed during the thermal compression process so that an area of the corresponding portion of the NCF and an area of the first semiconductor chip are different from each other.