Method for preparing multi-layer hexagonal boron nitride film
The present disclosure provides a method for preparing a multi-layer hexagonal boron nitride film, including: preparing a substrate; preparing a boron-containing solid catalyst, and disposing the boron-containing solid catalyst on the substrate; annealing the boron-containing solid catalyst to melt the boron-containing solid catalyst; feeding a nitrogen-containing gas and a protecting gas to an atmosphere in which the melted boron-containing solid catalyst resides, the nitrogen-containing gas reacts with the boron-containing solid catalyst to form the multi-layer hexagonal boron nitride film on a surface of the substrate. The method for preparing a multi-layer hexagonal boron nitride film can prepare a hexagonal boron nitride film having a lateral size in the order of inches and a thickness from several nanometers to several hundred nanometers on the surface of the substrate, providing a favorable basis for the application of hexagonal boron nitride in the field of two-dimensional material devices.
1. A method for preparing a multi-layer hexagonal boron nitride film, comprising:
in a first operation, preparing a substrate, the substrate includes an insulating substrate or a semiconductor substrate;
in a second operation, preparing a boron-containing solid catalyst, and disposing the boron-containing solid catalyst on the substrate;
in a third operation, annealing the boron-containing solid catalyst to melt the boron-containing solid catalyst;
in a fourth operation, feeding a nitrogen-containing gas and a protecting gas to an atmosphere in which the melted boron-containing solid catalyst resides, the nitrogen-containing gas reacts with the boron-containing solid catalyst to form the multi-layer hexagonal boron nitride film on a surface of the substrate, wherein
in the third operation, the boron-containing solid catalyst is annealed under a protecting atmosphere and at a normal pressure condition or low pressure condition.
2. The method for preparing a multi-layer hexagonal boron nitride film according to claim 1 , wherein the substrate in the first operation comprises a silicon nitride substrate, a silicon oxide substrate, an aluminum nitride substrate, a magnesium oxide substrate, or an aluminum oxide substrate.
3. The method for preparing a multi-layer hexagonal boron nitride film according to claim 1 , wherein the boron-containing solid catalyst in the second operation comprises at least one of a nickel-boron alloy catalyst, an iron-boron alloy catalyst, a platinum-boron alloy catalyst, and a cobalt-boron alloy catalyst, a chromium-boron alloy catalyst, an iron-nickel-boron alloy catalyst, an iron-boron-silicon alloy catalyst and a nickel-boron-silicon alloy catalyst.
4. The method for preparing a multi-layer hexagonal boron nitride film according to claim 1 , wherein in the third operation, placing the substrate and the boron-containing solid catalyst in a closed insulation crucible or a closed semiconductor crucible, placing the crucible in a chemical vapor deposition chamber, and feeding a protecting gas into the chemical vapor deposition chamber.
5. The method for preparing a multi-layer hexagonal boron nitride film according to claim 4 , wherein an annealing temperature is 800-1500° C., and an annealing time is 0.5-2 hours.
6. The method for preparing a multi-layer hexagonal boron nitride film according to claim 4 , wherein in the third operation, before the annealing treatment of the boron-containing solid catalyst, the method further comprises: feeding the protecting gas into the chemical vapor deposition chamber, raising a temperature in the chemical vapor deposition chamber to a desired annealing temperature at a heating rate of 2-10° C./min under a protecting atmosphere and at a normal pressure condition or low pressure condition.
7. The method for preparing a multi-layer hexagonal boron nitride film according to claim 2 , wherein the protecting gas comprises argon and hydrogen, a volume ratio of the argon to hydrogen is 1:1 to 30:1, and a pressure of the low pressure condition is 50-5000 Pa.
8. The method for preparing a multi-layer hexagonal boron nitride film according to claim 1 , wherein in the fourth operation, the nitrogen-containing gas comprises nitrogen or ammonia, the protecting gas comprises argon and hydrogen, and a volume ratio of the nitrogen-containing gas to the argon and the hydrogen is 30:1:1 to 1:30:30.
9. The method for preparing a multi-layer hexagonal boron nitride film according to claim 1 , wherein in the fourth operation, the nitrogen-containing gas reacts with the boron-containing solid catalyst under a normal pressure condition or low pressure condition, and a reaction time is 0.5-8 hours.
10. The method for preparing a multi-layer hexagonal boron nitride film according to claim 1 , wherein after the fourth operation, cooling the substrate with the multi-layer hexagonal boron nitride film formed on the surface to room temperature.
11. The method for preparing a multi-layer hexagonal boron nitride film according to claim 10 , comprising cooling the substrate with the multi-layer hexagonal boron nitride film formed on the surface to room temperature under a protecting atmosphere of nitrogen and ammonia and at a normal pressure condition, and a cooling rate is 0.25-10° C./min.
12. The method for preparing a multi-layer hexagonal boron nitride film according to claim 3 , wherein the protecting gas comprises argon and hydrogen, a volume ratio of the argon to hydrogen is 1:1 to 30:1, and a pressure of the low pressure condition is 50-5000 Pa.
13. The method for preparing a multi-layer hexagonal boron nitride film according to claim 4 , wherein the protecting gas comprises argon and hydrogen, a volume ratio of the argon to hydrogen is 1:1 to 30:1, and a pressure of the low pressure condition is 50-5000 Pa.