Formulations for advanced polishing pads
Methods and formulations for manufacturing polishing articles used in polishing processes are provided. In one implementation, a UV curable resin precursor composition is provided. The UV curable resin precursor comprises a precursor formulation. The precursor formulation comprises a first resin precursor component that comprises a semi-crystalline radiation curable oligomeric material, wherein the semi-crystalline radiation curable oligomeric material is selected from a semi-crystalline aliphatic polyester urethane acrylate, a semi-crystalline aliphatic polycarbonate urethane acrylate, a semi-crystalline aliphatic polyether urethane acrylate, or combinations thereof. The precursor formulation further comprises a second resin precursor component that comprises a monofunctional or multifunctional acrylate monomer. The resin precursor formulation further comprises a photoinitiator, wherein the precursor formulation has a viscosity that enables the precursor formulation to be dispensed to form a portion of a polishing article by an additive manufacturing process.
1. A method of forming a polishing article, comprising:
depositing a plurality of composite layers with an additive manufacturing system to reach a target thickness, wherein depositing the plurality of composite layers comprises:
dispensing one or more droplets of a curable resin precursor composition onto a support, the curable resin precursor composition comprising:
a first resin precursor component that comprises a radiation curable semi-crystalline aliphatic polycarbonate urethane acrylate oligomer;
a second resin precursor component that comprises an acrylate monomer mixture, comprising:
a monofunctional acrylate monomer selected from isobornyl acrylate, 3,3,5-trimethylcyclohexyl acrylate, tetrahydrofurfuryl acrylate, or combinations thereof; and
a multifunctional acrylate monomer selected from dipropylene glycol diacrylate, 1,4-butanediol diacrylate, 1,3-butanediol diacrylate, or combinations thereof, wherein the acrylate monomer mixture is present from 70% to 80% by weight based on a total weight of the curable resin precursor composition; and
a photoinitiator present from 0.5% to 2.5% based on the total weight of the curable resin precursor composition,
wherein the curable resin precursor composition has a viscosity within a range from about 10 cP to about 30 cP at 70 degrees Celsius that enables the curable resin precursor composition to be dispensed to form a portion of the polishing article by the additive manufacturing system.
2. The method of claim 1 , wherein the radiation curable semi-crystalline aliphatic polycarbonate urethane acrylate oligomer has a functionality that is greater than or equal to 2.
3. The method of claim 1 , wherein the monofunctional acrylate monomer is isobornyl acrylate and 3,3,5-trimethylcyclohexyl acrylate and the multifunctional acrylate monomer is 1,4-butanediol diacrylate.
4. The method of claim 1 , further comprising:
dispensing one or more droplets of a porosity-forming composition onto the support, wherein at least one component of the porosity-forming composition is removable to form pores in the polishing article.
5. The method of claim 4 , wherein the porosity-forming composition comprises a porosity-forming agent selected from glycols, glycol-ethers, amines, or combinations thereof.
6. The method of claim 5 , further comprising partially curing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition prior to exposing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition to at least one of an annealing processing, a rinsing process, or both.
7. A method of forming a polishing article, comprising:
depositing a plurality of composite layers with an additive manufacturing system to reach a target polishing article thickness, wherein depositing the plurality of composite layers comprises:
dispensing one or more droplets of a curable resin precursor composition onto a support, the curable resin precursor composition comprising:
a first resin precursor component that comprises a semi-crystalline radiation curable oligomeric material, wherein the semi-crystalline radiation curable oligomeric material is a semi-crystalline aliphatic polycarbonate urethane acrylate oligomer;
a second resin precursor component that comprises an acrylate monomer mixture, comprising:
a monofunctional acrylate monomer selected from isobornyl acrylate, 3,3,5-trimethylcyclohexyl acrylate, tetrahydrofurfuryl acrylate, or combinations thereof; and
a multifunctional acrylate monomer selected from dipropylene glycol diacrylate, 1,4-butanediol diacrylate, 1,3-butanediol diacrylate, or combinations thereof, wherein the acrylate monomer mixture is present from 70% to 80% by weight based on a total weight of the curable resin precursor composition; and
a photoinitiator present from 0.5% to 2.5% based on the total weight of the curable resin precursor composition, wherein the curable resin precursor composition has a viscosity within a range from about 10 cP to about 30 cP at 70 degrees Celsius that enables the curable resin precursor composition to be dispensed to form a portion of the polishing article by the additive manufacturing system;
exposing the one or more droplets of the curable resin precursor composition to electromagnetic radiation to at least partially cure the curable resin precursor composition; and
repeating the dispensing and exposing to build a 3D-relief on the support; and
solidifying the plurality of composite layers to form a pad body.
8. The method of claim 7 , wherein the viscosity is within a range from about 10 cP to about 20 cP at 70 degrees Celsius.
9. The method of claim 7 , wherein the semi-crystalline radiation curable oligomeric material has a functionality that is greater than or equal to 2.
10. The method of claim 7 , wherein the monofunctional acrylate monomer is isobornyl acrylate and 3,3,5-trimethylcyclohexyl acrylate, and the multifunctional acrylate monomer is 1,4-butanediol diacrylate.
11. The method of claim 7 , wherein the curable resin precursor composition comprises
from about 20 to about 30% by weight of the semi-crystalline radiation curable oligomeric material.
12. The method of claim 1 , wherein the radiation curable semi-crystalline aliphatic polycarbonate urethane acrylate oligomer comprises a urea or carboxylic acid hydrogen bonding group.
13. The method of claim 1 , wherein the radiation curable semi-crystalline aliphatic polycarbonate urethane acrylate oligomer is present from 20% to 30% by weight based on a total weight of the curable resin precursor composition.
14. The method of claim 1 , wherein the curable resin precursor composition further comprises nanoparticles selected from SiO 2 nanoparticles, ZnO nanoparticles, ZnS nanoparticles, and ZrO 2 nanoparticles.
15. The method of claim 1 , wherein the curable resin precursor composition further comprises polymeric fibers.
16. The method of claim 1 , wherein the monofunctional acrylate monomer is isobornyl acrylate and tetrahydrofurfuryl acrylate, and the multifunctional acrylate monomer is 1,3-butanediol diacrylate.
17. The method of claim 7 , wherein the curable resin precursor composition further comprises nanoparticles selected from SiO 2 nanoparticles, ZnO nanoparticles, ZnS nanoparticles, and ZrO 2 nanoparticles.
18. The method of claim 7 , wherein the curable resin precursor composition further comprises polymeric fibers.
19. The method of claim 7 , wherein the monofunctional acrylate monomer is isobornyl acrylate and tetrahydrofurfuryl acrylate, and the multifunctional acrylate monomer is 1,3-butanediol diacrylate.