Robot gripper for moving wafer carriers and packing materials and method of operating the same

1. A gripper mechanism, comprising:

a first clamp assembly having a first support pin at a bottom of the first clamp assembly; and

a second clamp assembly arranged opposite to the first clamp assembly and having a second support pin at a bottom of the second clamp assembly;

wherein the first and second clamp assemblies are configured to move close to or away from each other;

wherein the first support pin is configured to move relative to the bottom of the first clamp assembly and the second support pin is configured to move relative to the bottom of the second clamp assembly;

wherein the first support pin is configured to move close to or away from the bottom of the first clamp assembly and rotate with respect to the bottom of the first clamp assembly, and the second support pin is configured to move close to or away from the bottom of the second clamp assembly and rotate with respect to the bottom of the second clamp assembly;

wherein the first support pin is configured to rotate from extending along a bottom edge of the first clamp assembly to extending toward the second support pin, and the second support pin is configured to rotate from extending along a bottom edge of the second clamp assembly to extending toward the first support pin.

2. The gripper mechanism of claim 1 , wherein the first support pin is configured to extend along a lengthwise direction of the first clamp assembly, and wherein the second support pin is configured to extend along a lengthwise direction of the second clamp assembly.

3. The gripper mechanism of claim 1 , wherein the first clamp assembly comprises a first main clamp and the first support pin is arranged at a bottom of the first main clamp, and wherein the second clamp assembly comprises a second main clamp and the second support pin is arranged at a bottom of the second main clamp.

4. The gripper mechanism of claim 3 , wherein the first clamp assembly comprises a first secondary clamp, Which substantially aligns with the first main clamp, and the first secondary clamp comprises a first protrusion, and wherein the second clamp assembly comprises a second secondary clamp, which substantially aligns with the second main clamp, and the second secondary clamp comprises a second protrusion.

5. The gripper mechanism of claim 4 , wherein a vertical height of the first protrusion is different from a vertical height of the first support pin, and wherein a vertical height of the second protrusion is different from a vertical height of the second support pin.

6. The gripper mechanism of claim 5 , wherein the vertical height of the first protrusion is higher than the vertical height of the first support pin, and wherein the vertical height of the second protrusion is higher than the vertical height of the second support pin.

7. The gripper mechanism of claim 4 , wherein the first protrusion protrudes from the first secondary clamp and toward the second protrusion, and wherein the second protrusion protrudes from the second secondary clamp and toward the first protrusion.

8. A gripper mechanism, comprising:

a pair of first clamps configured to clamp a first workpiece, wherein each of the first clamps has at least one movable support pin configured to support a bottom surface of the first workpiece; and

a pair of second clamps configured to clamp a second workpiece,

wherein the movable support pin is configured to rotate from extending along a first direction, which is substantially parallel to a clamp surface of the first clamp, to extending along a second direction, which is different from the first direction.

9. The gripper mechanism of claim 8 , wherein the movable support pin is arranged adjacently to a bottom of the first clamp.

10. The gripper mechanism of claim 8 , wherein a distance between the first clamps is a first distance while the first clamps clamp the first workpiece and a distance between the second clamps is a second distance while the second clamps clamp the second workpiece, and wherein the first distance is greater than the second distance.

11. The gripper mechanism of claim 8 , wherein each of the first clamps has a clamp surface for engaging a side surface of a through hole of the first workpiece, and wherein the movable support pin is configured to extend underneath the bottom surface of the first workpiece.

12. The gripper mechanism of claim 7 , wherein each of the second clamps has a clamp surface for engaging a side surface of the second workpiece.

13. The gripper mechanism of claim 12 , wherein each of the second clamps has a protrusion protruding from the clamp surface to engage with a flange at the side surface of the second workpiece.

14. The gripper mechanism of claim 13 , wherein the protrusion is arranged above the movable support pin.

15. The gripper mechanism of claim 8 , wherein the pair of first clamps and the pair of second clamps are configured to move synchronously.

16. A method of transferring a packing material and a wafer carrier, comprising:

clamping a packing material by a pair of first clamps of a gripper mechanism;

lifting the packing material by the pair of the first clamps up to a first height;

extending support pins from bottoms of the pair of first clamps to support a bottom surface of the packing material;

removing the packing material by lifting the packing material by the pair of first clamps and the support pins up to a second height; and

clamping a wafer carrier by a pair of second clamps of the gripper mechanism subsequent to removing the packing material.

17. The method of claim 16 , wherein a distance between the pair of first clamps is controlled to a first distance to clamp the packing material, and a distance between the pair of second clamps is controlled to a second distance to clamp the wafer carrier, and wherein the first distance is greater than the second distance.

18. The method of claim 16 , wherein the support pin is moved away from the bottom of the first clamp and rotated to extend underneath the bottom surface of the packing material while extending support pins from the pair of first clamps to support the bottom surface of the packing material.

19. The method of claim 16 , wherein the support pin is retracted at the bottom of the first clamp while clamping the wafer carrier by the pair of second clamps of the gripper mechanism.

20. The method of claim 16 , further comprising engaging flanges at side surfaces of the wafer carrier by protrusions of the pair of second clamps.