Method of manufacturing wafer mounting table
A method of manufacturing a wafer mounting table according to an embodiment includes: (a) a step of loading a ceramic slurry containing a ceramic powder and a gelling agent into opening portions of a metal mesh, inducing a chemical reaction of the gelling agent to gelate the ceramic slurry, and then performing degreasing and calcining to prepare a ceramic-loaded mesh; (b) a step of sandwiching the ceramic-loaded mesh between a first ceramic calcined body and a second ceramic calcined body obtained by calcining after mold cast forming so as to prepare a multilayer body; and (c) a step of hot press firing the multilayer body to prepare the wafer-receiving table.
1. A method of manufacturing a wafer mounting table, the method comprising:
(a) a step of loading a ceramic slurry containing a ceramic powder and a gelling agent into opening portions of a metal mesh, inducing a chemical reaction of the gelling agent to gelate the ceramic slurry, and then performing degreasing and calcining to prepare a ceramic-loaded mesh;
(b) a step of sandwiching the ceramic-loaded mesh between, and in direct contact with a first ceramic calcined body and a second ceramic calcined body obtained by calcining after mold cast forming so as to prepare a multilayer body; and
(c) a step of hot press firing the multilayer body to prepare a wafer-receiving table.
2. The method of manufacturing a wafer mounting table according to claim 1 , wherein:
in the step (a), the metal mesh is placed inside a mold, and the ceramic slurry is poured into the mold while an upper mold piece and a lower mold piece are in close contact with the metal mesh so as to load the ceramic slurry into the opening portions of the metal mesh.
3. The method of manufacturing a wafer mounting table according to claim 2 , wherein:
in the step (a), in pouring the ceramic slurry into the mold, the ceramic slurry is poured after a pressure inside the mold is decreased to be lower than an atmospheric pressure.
4. The method of manufacturing a wafer mounting table according to claim 1 , wherein:
in the step (a), the ceramic slurry is loaded into the opening portions of the metal mesh by dipping the metal mesh in a container containing the ceramic slurry.