IP Library › Granted Patent US 11,685,985
Granted Patent B2
US 11,685,985 · App. 17/577,046 · Granted Jun 27, 2023

Method of manufacturing metal mask

Inventors: Yun-Heng Chen (Hsinchu County, TW); Wen-Yi Lin (Hsinchu County, TW)
Assignee: DARWIN PRECISIONS CORPORATION
C23C14/042B05C21/005B21B1/227B21H7/00B21H8/005B23P15/00C23C14/24G03F7/0015Y10T29/49826Y10T29/49863
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Quick Facts
Patent No.
US 11,685,985
App. No.
17/577,046
Granted
Jun 27, 2023
Kind
B2
Abstract

A method of manufacturing a metal mask includes calendering a metal material, so as to form a metal mask substrate, where the metal mask substrate includes a surface and a plurality of grooves formed in the surface, and the grooves all extend in a direction. The surface has at least one sampling region, while at least two grooves are distributed in the sampling region, where an average area ratio of the area of the grooves within the sampling region to the area of the sampling region ranges between 45% and 68%.

Claims (13)

1. A method of manufacturing a metal mask, comprising:

calendering a metal material, so as to form a metal mask substrate, wherein the metal mask substrate comprises a surface and a plurality of grooves formed in the surface, and the grooves all extend in a direction, wherein the surface has at least one sampling region, and at least two grooves are distributed in the at least one sampling region, wherein an average area ratio of an area of the grooves within the sampling region to an area of the sampling region ranges between 45% and 68%; and

performing a photolithography to the metal mask substrate.

2. The method of claim 1 , wherein the surface has a plurality of sampling regions,

wherein in one of the sampling regions, an area ratio is defined according to the area of the grooves within the one of the sampling regions and the area of the one of the sampling regions, and the average area ratio is equal to an average of a plurality of area ratios of the sampling regions.

3. The method of claim 2 , wherein the metal mask substrate further comprises a pair of long sides opposite to each other and a pair of short sides opposite to each other, and the long sides are connected to the short sides, wherein the sampling regions are distributed along the long sides, and the direction is parallel to an extending direction of the long sides.

4. The method of claim 1 , further comprising:

selecting the at least one sampling region from the surface;

measuring and obtaining the average area ratio of the area of the grooves within the at least one sampling region to the area of the at least one sampling region.

5. The method of claim 4 , wherein selecting the at least one sampling region from the surface, and measuring and obtaining the average area ratio of the area of the grooves within the at least one sampling region to the area of the at least one sampling region comprises:

selecting a plurality of sampling regions from the surface;

in each of the sampling regions, measuring and obtaining an area ratio defined by the area of the grooves within each of the sampling regions to the area of each of the respective sampling regions; and

calculating an average of [the plurality of area ratios of the sampling regions.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 17, 2022
From: CHEN, YUN-HENG; LIN, WEN-YI
To: DARWIN PRECISIONS CORPORATION
Reel/Frame 058668/0923 →
Priority Claims (1)
TW 110121496 · Jun 11, 2021 · national
Continuity (1)
Related Publication 20220396866A1 · Dec 15, 2022