Capacitor and etching method
According to an embodiment, a capacitor includes a conductive substrate, a conductive layer, a dielectric layer therebetween, and first and second internal electrodes. The substrate has first and second main surfaces. One partial region of the first main surface is provided with first recesses. A region of the second surface corresponding to a combination of the one partial region and another partial region is provided with second recesses. The conductive layer covers the main surfaces and side walls and bottom surfaces of the recesses. The first internal electrode is provided on the one partial region and electrically connected to the conductive layer. The second internal electrode is provided on the another partial region and electrically connected to the substrate.
1. A capacitor comprising:
a conductive substrate having a first main surface and a second main surface, one of partial regions of the first main surface being provided with one or more first recesses, and a region of the second surface corresponding to a combination of the one of the partial regions of the first main surface and another one of the partial regions of the first main surface being provided with one or more second recesses;
a conductive layer covering the first main surface, the second main surface, side walls and bottom surfaces of the one or more first recesses, and side walls and bottom surfaces of the one or more second recesses;
a dielectric layer interposed between the conductive substrate and the conductive layer;
a first internal electrode provided on the one of the partial regions of the first main surface and electrically connected to the conductive layer; and
a second internal electrode provided on the another one of the partial regions of the first main surface and electrically connected to the conductive substrate.
2. The capacitor according to claim 1 , wherein a depth of the one or more second recesses is greater than a depth of the one or more first recesses.
3. The capacitor according to claim 1 , wherein the one or more first recesses are one or more first trenches, the one or more second recesses are one or more second trenches, a length direction of the one or more first trenches and a length direction of the one or more second trenches intersect each other, and the one or more first trenches and the one or more second trenches are connected to each other at intersections thereof.
4. The capacitor according to claim 1 , wherein the one or more first recesses are a plurality of first trenches each extending in a first direction, the plurality of first trenches forming a plurality of first rows arranged in a second direction intersecting the first direction, each of the first rows including two or more first trenches arranged in the first direction, and each two of the first rows adjacent to each other being different from each other in a position of a first portion sandwiched between the two or more first trenches arranged in the first direction, and
wherein the one or more second recesses are a plurality of second trenches each extending in a third direction, the plurality of second trenches forming a plurality of second rows arranged in a fourth direction intersecting the third direction, each of the second rows including two or more second trenches arranged in the third direction, and each two of the second rows adjacent to each other being different from each other in a position of a second portion sandwiched between the two or more second trenches arranged in the third direction.