Auto-focusing device and method of fabricating the same
View Patent ↗In accordance with some embodiments, a method of forming an auto-focusing device is provided. The method includes forming a cantilever beam member. The cantilever beam member has a ring shape. The method further includes forming a piezoelectric member over the cantilever beam member. The method also includes forming a membrane over the cantilever beam member. The membrane has a first region and a second region. The first region has a planar surface, and the second region is located between the first region and an inner edge of the cantilever beam member and has a plurality of corrugation structures. In addition, the method includes applying a liquid optical medium over the membrane and sealing the liquid optical medium with a protection layer.
1. A method, comprising:
forming a supporting layer on a base layer, wherein the supporting layer has a central region and a peripheral region surrounding the central region;
forming a dielectric layer on the supporting layer;
forming a piezoelectric member on the dielectric layer above the peripheral region of the supporting layer in a stacking direction;
patterning the dielectric layer to form a first projection and a second projection in the central region of the supporting layer;
covering the dielectric layer with a membrane, wherein the membrane is conformally formed over the first projection and the second projection;
applying a liquid optical medium over the membrane and sealing the liquid optical medium with a protection layer; and
etching the base layer, the supporting layer and the patterned dielectric layer to expose the membrane.
2. The method of claim 1 , wherein patterning the dielectric layer is performed such that the first projection and the second projection are each formed with a ring shape and are concentrically arranged.
3. The method of claim 1 , wherein patterning the dielectric layer is performed such that the first projection and the second projection are spaced apart by a distance that is greater than a width of each of the first projection and the second projection.
4. The method of claim 1 , wherein patterning the dielectric layer is performed such that the second projection is closer to the peripheral region than the first projection, and the second projection is spaced away from a boundary of the central region and the peripheral region of the supporting layer by a predetermined distance that is greater than 0.
5. The method of claim 1 , wherein patterning the dielectric layer is performed such that the first projection comprises:
a first side wall inclined relative to the supporting layer;
a second side wall opposite to the first side wall and inclined relative to the supporting layer; and
a top surface connecting the first side wall to the second side wall and being parallel to the supporting layer.
6. The method of claim 1 , wherein patterning the dielectric layer to form the first projection and the second projection is performed such that each of the first projection and the second projection is formed with a tapered shape.
7. The method of claim 1 , wherein patterning the dielectric layer to form the first projection and the second projection is performed such that each of the first projection and the second projection is formed with a height of about 2 um to about 15 um.
8. A method, comprising:
forming a supporting layer on a base layer, wherein the supporting layer has a central region and a peripheral region surrounding the central region;
forming a dielectric layer over the supporting layer;
forming a piezoelectric member on the dielectric layer above the peripheral region of the supporting layer in a stacking direction;
patterning the dielectric layer to form a first projection and a second projection in the central region of the supporting layer;
covering the patterned dielectric layer with a membrane, wherein a first portion of the membrane on a center of the central region of the supporting layer has a top surface lower than a top surface of a second portion of the membrane on the first projection;
applying a liquid optical medium over the membrane and sealing the liquid optical medium with a protection layer; and
etching the base layer, the supporting layer, the first projection, and the second projection to expose the membrane.
9. The method of claim 8 , wherein the top surface of the first portion of the membrane on the center of the central region of the supporting layer is lower than a top surface of a third portion of the membrane on the second projection.
10. The method of claim 8 , wherein etching the base layer, the supporting layer, the first projection, and the second projection is such that a remaining portion of the supporting layer covers a portion of the dielectric layer on the peripheral region but exposes the second portion of the membrane.
11. The method of claim 8 , wherein an interface between the liquid optical medium and the first portion of the membrane is at a height different from a height of an interface between the liquid optical medium and the second portion of the membrane.
12. The method of claim 8 , wherein covering the dielectric layer with the membrane is such that the top surface of the second portion of the membrane is lower than a top surface of the piezoelectric member.
13. The method of claim 8 , wherein covering the dielectric layer with the membrane is such that the membrane is in contact with a sidewall of the dielectric layer on the peripheral region.
14. The method of claim 8 , wherein covering the dielectric layer with the membrane is such that a third portion of the membrane is directly between the first projection and the second projection.
15. A method, comprising:
forming a supporting layer on a base layer, wherein the supporting layer has a central region and a peripheral region surrounding the central region;
forming a dielectric layer on the supporting layer;
forming a piezoelectric member on the dielectric layer above the peripheral region of the supporting layer in a stacking direction;
patterning the dielectric layer to form a first projection and a second projection in the central region of the supporting layer;
forming a membrane to cover the piezoelectric member, the first projection and the second projection, wherein a first portion of the membrane between the first projection and the second projection has a top surface lower than a top surface of a second portion of the membrane on the first projection;
applying a liquid optical medium over the membrane and sealing the liquid optical medium with a protection layer; and
etching the base layer, the supporting layer, the first projection, and the second projection to expose the membrane.
16. The method of claim 15 , further comprising forming a passivation layer over the piezoelectric member, the first projection, and the second projection prior to forming the membrane.
17. The method of claim 16 , further comprising forming a trace over the passivation layer and in contact with the piezoelectric member prior to forming the membrane.
18. The method of claim 15 , wherein the first projection is spaced apart from a center of the central region of the supporting layer.
19. The method of claim 15 , wherein the first projection and the second projection are ring-shaped in a top view.
20. The method of claim 15 , wherein applying the liquid optical medium over the membrane is such that a vertical thickness of a first portion of the liquid optical medium directly above the first projection is greater than a vertical thickness of a second portion of the liquid optical medium directly above the piezoelectric member.