Semiconductor memory device and method for fabricating thereof
Provided is a semiconductor memory device. The semiconductor memory device comprises a first semiconductor pattern including a first impurity region, a second impurity region, and a channel region, the first impurity region spaced apart from a substrate in a first direction and having a first conductivity type, the second impurity region having a second conductivity type different from the first conductivity type, and the channel region between the first impurity region and the second impurity region, a first conductive connection line connected to the first impurity region and extending in a second direction different from the first direction and a first gate structure extending in the first direction and including a first gate electrode and a first gate insulating film, wherein the first gate electrode penetrates the channel region and the first gate insulating film is between the first gate electrode and the semiconductor pattern.
1. A semiconductor memory device comprising:
a first semiconductor pattern including a first impurity region, a second impurity region and a channel region, the first impurity region spaced apart from a substrate in a first direction and having a first conductivity type, the second impurity region having a second conductivity type different from the first conductivity type, and the channel region between the first impurity region and the second impurity region;
a first conductive connection line connected to the first impurity region and extending in a second direction different from the first direction; and
a first gate structure extending in the first direction and including a first gate electrode and a first gate insulating film,
wherein the first gate electrode penetrates the channel region, and
the first gate insulating film is between the first gate electrode and the first semiconductor pattern.
2. The semiconductor memory device of claim 1 , further comprising:
a second gate structure penetrating the channel region and including a second gate electrode and a second gate insulating film.
3. The semiconductor memory device of claim 2 , further comprising:
a third gate structure penetrating the channel region and including a third gate electrode and a third gate insulating film.
4. The semiconductor memory device of claim 1 , further comprising:
a second conductive connection line penetrating the second impurity region,
the second conductive connection line contacting the first semiconductor pattern.
5. The semiconductor memory device of claim 1 , further comprising:
a conductive plate electrode connected to the second impurity region,
the conductive plate electrode contacting one end of the first semiconductor pattern.
6. The semiconductor memory device of claim 1 , further comprising:
a second semiconductor pattern spaced apart from the first semiconductor pattern in the second direction and connected to the first conductive connection line,
the second semiconductor pattern contacting the second impurity region and the channel region, the contacting of the second impurity region and the channel region being through the first impurity region.
7. The semiconductor memory device of claim 1 , further comprising:
a second semiconductor pattern spaced apart from the first semiconductor pattern in the second direction and connected to the first conductive connection line; and
an air gap between the first semiconductor pattern and the second semiconductor pattern.
8. The semiconductor memory device of claim 1 , further comprising:
a shielding pattern extending along the channel region and the second impurity region in a third direction different from the first direction and the second direction,
the shielding pattern including a conductive material.
9. The semiconductor memory device of claim 8 , wherein the shielding pattern is electrically connected to the second impurity region.
10. The semiconductor memory device of claim 1 , wherein
the channel region includes a first base portion having the second conductivity type, and a second base portion having the first conductivity type,
the first base portion is between the first impurity region and the second base portion,
a concentration of impurities of the first base portion is less than a concentration of impurities of the second impurity region, and
a concentration of impurities of the second base portion is less than a concentration of impurities of the first impurity region.
11. A semiconductor memory device comprising:
a semiconductor pattern includes a first impurity region, a second impurity region and a channel region, the first impurity region spaced apart from a substrate in a first direction and having a first conductivity type, the second impurity region having a second conductivity type different from the first conductivity type, and the channel region between the first impurity region and the second impurity region;
a first conductive connection line connected to the first impurity region and extending in a second direction different from the first direction; and
a second conductive connection electrode extending in the first direction, penetrating the second impurity region, and contacting the semiconductor pattern.
12. The semiconductor memory device of claim 11 , further comprising:
one or more gate structures penetrating the channel region and including a gate electrode and a gate insulating film.
13. The semiconductor memory device of claim 12 , wherein
the channel region includes a first base portion having the second conductivity type, and a second base portion having the first conductivity type,
the first base portion is between the first impurity region and the second base portion,
a concentration of impurities of the first base portion is less than a concentration of impurities of the second impurity region, and
a concentration of impurities of the second base portion is less than a concentration of impurities of the first impurity region.
14. The semiconductor memory device of claim 12 , wherein the channel region includes an undoped semiconductor material.
15. The semiconductor memory device of claim 11 , wherein
the channel region includes a first base portion having the second conductivity type, and a second base portion having the first conductivity type,
the first base portion is between the first impurity region and the second base portion,
a concentration of impurities of the first base portion is less than a concentration of impurities of the second impurity region,
a concentration of impurities of the second base portion is less than a concentration of impurities of the first impurity region,
the semiconductor memory device does not include a gate electrode penetrating the channel region.
16. A semiconductor memory device comprising:
a peripheral circuit region on a substrate; and
a cell array region stacked on the peripheral circuit region in a first direction,
wherein the peripheral circuit region includes a peripheral circuit configured to control the cell array region,
wherein the cell array region includes:
a plurality of semiconductor patterns stacked on the substrate in the first direction, each of the plurality of semiconductor patterns includes a first impurity region having a first conductivity type, a second impurity region having a second conductivity type different from the first conductivity type, and a channel region between the first impurity region and the second impurity region,
a first conductive connection line connected to the first impurity region and extending in a second direction different from the first direction, and
a first gate structure extending in the first direction and including a gate electrode and a gate insulating film,
wherein each of the first conductive connection line and the gate electrode of the first gate structure is in contact with the peripheral circuit of the peripheral circuit region, and
wherein the gate electrode of the first gate structure penetrates the channel region of each of the plurality of semiconductor patterns.
17. The semiconductor memory device of claim 16 , further comprising:
a second conductive connection line penetrating the second impurity region,
the second conductive connection line contacting the semiconductor pattern.
18. The semiconductor memory device of claim 16 , further comprising:
a conductive plate electrode connected to the second impurity region,
the conductive plate electrode contacting one end of the semiconductor pattern.
19. The semiconductor memory device of claim 16 , wherein the peripheral circuit region is between the substrate and the cell array region.
20. The semiconductor memory device of claim 16 , wherein the cell array region is between the substrate and the peripheral circuit region.