Bonding contacts having capping layer and method for forming the same
Embodiments of bonded semiconductor structures and fabrication methods thereof are disclosed. In an example, a method for forming a semiconductor device is disclosed. A first device layer is formed on a first substrate. A first bonding layer including a first bonding contact is formed above the first device layer. A first capping layer is formed at an upper end of the first bonding contact. The first capping layer has a conductive material different from a remainder of the first bonding contact. A second device layer is formed on a second substrate. A second bonding layer including a second bonding contact is formed above the second device layer. The first substrate and the second substrate are bonded in a face-to-face manner, so that the first bonding contact is in contact with the second bonding contact by the first capping layer.
1. A method for forming a semiconductor device, comprising:
forming a first device layer on a first substrate;
forming a first bonding layer comprising a plurality of first bonding contacts above the first device layer;
forming a first capping layer at an upper end of the first bonding contact, the first capping layer having a conductive material different from a remainder of the first bonding contact;
forming a second device layer on a second substrate;
forming a second bonding layer comprising a plurality of second bonding contacts above the second device layer; and
bonding the first substrate and the second substrate in a face-to-face manner, so that each first bonding contact is in contact with a corresponding second bonding contact by the first capping layer at a bonding interface, and the plurality of first bonding contacts and the plurality of corresponding second bonding contacts have a one-to-one correspondence and are the only bonding contacts at the bonding interface.
2. The method of claim 1 , wherein forming the first capping layer comprise:
etching a recess at the upper end of the first bonding contact; and
selectively depositing the conductive material in the recess.
3. The method of claim 2 , wherein the etching of the recess comprises chemical mechanical polishing (CMP) followed by oxide removal.
4. The method of claim 2 , wherein the selective deposition of the conductive material comprises a plurality cycles of chemical vapor deposition (CVD) and plasma treatment.
5. The method of claim 1 , wherein the conductive material of the first capping layer comprises cobalt, and the remainder of the first bonding contact comprises copper.
6. The method of claim 1 , wherein a thickness of the first capping layer is between about 1 nm and about 5 nm.
7. The method of claim 1 , wherein
forming the first bonding layer comprises forming a first dielectric in the first bonding layer;
forming the second bonding layer comprises forming a second dielectric in the second bonding layer; and
the first dielectric is in contact with the second dielectric after the bonding.
8. The method of claim 1 , wherein the bonding comprises hybrid bonding.
9. The method of claim 5 , wherein forming the first capping layer comprises:
performing a thermal chemical vapor deposition using a cobalt precursor to selectively deposit cobalt on copper; and
performing a plasma treatment using ammonia to remove residual carbon to further improve selectivity of cobalt deposition.
10. The method of claim 1 , further comprising:
forming a second capping layer at an upper end of the second bonding contact, the second capping layer having a conductive material different from a remainder of the second bonding contact,
wherein the first bonding contact is in contact with the second bonding contact by the first capping layer and the second capping layer after the bonding.
11. A method for forming a semiconductor device, comprising:
forming a first device layer comprising an array of NAND memory strings on a first substrate;
forming a first bonding layer comprising a plurality of first bonding contacts above the first device layer and in electric connection with the array of NAND memory strings;
forming a first capping layer at an upper end of the first bonding contact, the first capping layer having a first lateral dimension and a conductive material different from a remainder of the first bonding contact;
forming a second device layer including peripheral circuits for facilitating an operation of the array of NAND memory strings on a second substrate;
forming a second bonding layer comprising a plurality of second bonding contacts above the second device layer and in electric connection with the peripheral circuits; and
bonding the first substrate and the second substrate in a face-to-face manner, so that that each first bonding contact is in contact with a corresponding second bonding contact by the first capping layer at a bonding interface, and the plurality of first bonding contacts and the plurality of corresponding second bonding contacts have a one-to-one correspondence and are the only bonding contacts at the bonding interface, and the array of NAND memory strings is in electric connection with the peripheral circuits at least through the first capping layer after the bonding.
12. The method of claim 11 , wherein forming the first capping layer comprise:
etching a recess at the upper end of the first bonding contact; and
selectively depositing the conductive material in the recess.
13. The method of claim 12 , wherein the etching of the recess comprises chemical mechanical polishing (CMP) followed by oxide removal.
14. The method of claim 12 , wherein the selective deposition of the conductive material comprises a plurality cycles of chemical vapor deposition (CVD) and plasma treatment.
15. The method of claim 11 , wherein the conductive material of the first capping layer comprises cobalt, and the remainder of the first bonding contact comprises copper.
16. The method of claim 11 , wherein a thickness of the first capping layer is between about 1 nm and about 5 nm.
17. The method of claim 11 , wherein
forming the first bonding layer comprises forming a first dielectric in the first bonding layer;
forming the second bonding layer comprises forming a second dielectric in the second bonding layer; and
the first dielectric is in contact with the second dielectric after the bonding.
18. The method of claim 11 , wherein the bonding comprises hybrid bonding.
19. The method of claim 15 , wherein forming the first capping layer comprises:
performing a thermal chemical vapor deposition using a cobalt precursor to selectively deposit cobalt on copper; and
performing a plasma treatment using ammonia to remove residual carbon to further improve selectivity of cobalt deposition.
20. The method of claim 11 , further comprising:
forming a second capping layer at an upper end of the second bonding contact, the second capping layer having a conductive material different from a remainder of the second bonding contact,
wherein the first bonding contact is in contact with the second bonding contact by the first capping layer and the second capping layer after the bonding.