Semiconductor device and manufacturing method
Provided is a semiconductor device comprising a semiconductor substrate, wherein the semiconductor substrate includes a hydrogen containing region including hydrogen, and the hydrogen containing region includes a high concentration region with a higher carrier concentration than a virtual carrier concentration determined based on a concentration of hydrogen included and an activation ratio of hydrogen. The semiconductor substrate includes an N type drift region, an N type emitter region that has a higher carrier concentration than that in the drift region, a P type base region, a P type collector region provided to be in contact with a lower surface of the semiconductor substrate, and an N type buffer region that is provided between the collector region and the drift region, and has a higher carrier concentration than that in the drift region, and the hydrogen containing region is included in the buffer region.
1. A semiconductor device comprising a semiconductor substrate, comprising:
a hydrogen containing region including hydrogen;
a high concentration region in the hydrogen containing region, the high concentration region having a higher carrier concentration than a virtual carrier concentration determined based on a concentration of the hydrogen included and an activation ratio of the hydrogen, wherein
a carrier concentration distribution in a depth direction of the hydrogen containing region has a plurality of first peaks,
the high concentration region is arranged between two adjacent ones of the plurality of first peaks in the depth direction,
a carrier concentration distribution of the high concentration region has a second peak in the depth direction, and
the second peak in the high concentration region has a full width at half maximum greater than a full width at half maximum of any of the plurality of first peaks.
2. The semiconductor device of claim 1 , wherein the carrier concentration in the high concentration region is higher than a base doping concentration in the semiconductor substrate.
3. The semiconductor device of claim 1 , wherein the high concentration region is arranged between a deepest one of the plurality of first peaks and a second deepest one of the plurality of first peaks.
4. The semiconductor device of claim 1 , wherein
a hydrogen chemical concentration distribution in the hydrogen containing region has a plurality of hydrogen peaks,
wherein the second peak in the high concentration region is arranged between two adjacent ones of the plurality of hydrogen peaks, in the depth direction of the hydrogen containing region, and
a carrier concentration of the second peak is higher than a base doping concentration in the semiconductor substrate.
5. The semiconductor device of claim 4 , wherein a full width at half maximum of the second peak is greater than a half of an interval between a deepest one of the plurality of hydrogen peaks and a second deepest one of the plurality of hydrogen peaks.
6. The semiconductor device of claim 1 , wherein the carrier concentration is higher than the virtual carrier concentration at a depth position of the second peak.
7. The semiconductor device of claim 4 , wherein a deepest one of the plurality of hydrogen peaks and a second deepest one of the plurality of hydrogen peaks are included in a range of a full width at half maximum of the second peak.
8. The semiconductor device of claim 1 , wherein
the hydrogen containing region includes a lifetime control region including an adjustment impurity for adjusting a lifetime of a carrier,
a concentration distribution of the adjustment impurity in the depth direction has a third peak, and
the high concentration region is provided at a position deeper than the third peak in the concentration distribution of the adjustment impurity.
9. The semiconductor device of claim 8 , wherein a full width at half maximum of the third peak is greater than an interval between the plurality of first peaks in the depth direction.
10. The semiconductor device of claim 1 , wherein an oxygen concentration in the high concentration region is 1×10 17 /cm 3 or more.
11. The semiconductor device of claim 1 , wherein a carbon concentration in the high concentration region may be 1×10 13 /cm 3 or more.
12. The semiconductor device of claim 1 , wherein the semiconductor substrate includes
an N type drift region,
an N type emitter region that is provided to be in contact with an upper surface of the semiconductor substrate and has a higher carrier concentration than a carrier concentration in the drift region,
a P type base region provided between the emitter region and the drift region,
a P type collector region provided to be in contact with a lower surface of the semiconductor substrate, and
an N type buffer region that is provided between the collector region and the drift region, and has a higher carrier concentration than a carrier concentration in the drift region,
wherein the hydrogen containing region is included in the buffer region.
13. The semiconductor device of claim 8 , wherein the third peak has a half width at full maximum greater than the full width at half maximum of any of the plurality of first peaks.
14. The semiconductor device of claim 8 , wherein the carrier concentration is lower than the virtual carrier concentration at a position of the third peak.
15. A method of manufacturing a semiconductor device comprising a semiconductor substrate, the method comprising:
implanting hydrogen in the semiconductor substrate to form a hydrogen containing region;
forming, in the hydrogen containing region, a lifetime control region for adjusting a lifetime of a carrier; and
performing thermal treatment on the semiconductor substrate to form, in the hydrogen containing region, a high concentration region with a higher carrier concentration than a virtual carrier concentration determined based on a concentration of impurities included and an activation ratio of the impurities, wherein
a carrier concentration distribution in a depth direction of the hydrogen containing region has a plurality of first peaks,
the high concentration region is arranged between two adjacent ones of the plurality of first peaks in the depth direction,
a carrier concentration distribution of the high concentration region has a second peak in the depth direction, and
the second peak in the high concentration region has a full width at half maximum greater than a full width at half maximum of any of the plurality of first peaks.
16. A semiconductor device comprising a semiconductor substrate, comprising:
a hydrogen containing region including hydrogen;
a high concentration region in the hydrogen containing region, the high concentration region having a higher carrier concentration than a virtual carrier concentration determined based on a concentration of the hydrogen included and an activation ratio of the hydrogen, wherein
a carrier concentration distribution in a depth direction of the hydrogen containing region has a plurality of first peaks,
the carrier concentration distribution in the high concentration region has a second peak in the depth direction,
a hydrogen chemical concentration distribution in the hydrogen containing region has a plurality of hydrogen peaks, and
the second peak of the carrier concentration distribution in the high concentration region is arranged between two adjacent ones of the plurality of hydrogen peaks of the hydrogen chemical concentration distribution in the depth direction of the hydrogen containing region, the second peak of the carrier concentration distribution not corresponding with any of the plurality of hydrogen peaks.