Metal plate for manufacturing deposition mask, method for manufacturing metal plate, deposition mask and method for manufacturing deposition mask
A method for manufacturing a metal plate, the metal plate including a first surface and a second surface positioned on the opposite side of the first surface, may include a step of rolling a base metal having an iron alloy containing nickel to produce the metal plate. The metal plate may include particles containing as a main component an element other than iron and nickel. In a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles may be satisfied: (1) The number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm 3 in the sample, and (2) The number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm 3 in the sample.
1. A metal plate used for manufacturing a deposition mask, the metal plate comprising:
a first surface and a second surface positioned on the opposite side of the first surface, the metal plate being made of an invar material containing iron and nickel in an amount of 34% by mass or more; and
particles containing as a main component an element other than iron and nickel,
wherein in a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles are satisfied
(1) a number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm 3 in the sample, and
(2) a number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm 3 in the sample.
2. The metal plate according to claim 1 , wherein the following condition (3) regarding the particles may be satisfied:
(3) the number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 1000 or less per 1 mm 3 in the sample.
3. The metal plate according to claim 1 , wherein the following condition (4) regarding the particles is satisfied:
(4) the number of the particles having an equivalent circle diameter of 3 μm or more is 20 or less per 1 mm 3 in the sample.
4. The metal plate according to claim 1 , wherein the following condition (5) regarding the particles is satisfied:
(5) a number of the particles having an equivalent circle diameter of 5 μm or more is 20 or less per 1 mm 3 in the sample.
5. The metal plate according to claim 1 , wherein the following condition (6) regarding the particles is satisfied:
(6) a number of the particles having an equivalent circle diameter of 5 μm or more is 2 or less per 1 mm 3 in the sample.
6. The metal plate according to claim 1 , wherein a first ratio of the metal plate is 70% or more,
wherein the first ratio is a ratio of a first quantity to a total quantity,
wherein the total quantity is the number of the particles per 1 mm 3 in the sample, the particles having an equivalent circle diameter of 1 μm or more, and
wherein the first quantity is the number of the particles per 1 mm 3 in the sample, the particles having an equivalent circle diameter of 1 μm or more and less than 3 μm.
7. The metal plate according to claim 1 , wherein a thickness of the metal plate is 70 μm or less.
8. The metal plate according to claim 1 , wherein a thickness of the metal plate is 50 μm or less.
9. The metal plate according to claim 1 , wherein a thickness of the metal plate is 30 μm or less.
10. A method for manufacturing a metal plate used for manufacturing a deposition mask, the metal plate including a first surface and a second surface positioned on the opposite side of the first surface, the method comprising:
a step of rolling a base metal made of an invar material containing iron and nickel in an amount of 34% by mass or more to produce the metal plate,
wherein the metal plate comprises particles containing as a main component an element other than iron and nickel, and
wherein in a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles are satisfied
(1) a number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm 3 in the sample, and
(2) a number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm 3 in the sample.
11. The method for manufacturing a metal plate according to claim 10 , comprising a surface treatment step of removing a surface part of the base metal or the metal plate.
12. The method for manufacturing a metal plate according to claim 11 , wherein the surface treatment step includes a base-metal surface treatment step of removing the surface part of the base metal, and
wherein a thickness of the surface part is 10 mm or more.
13. The method for manufacturing a metal plate according to claim 11 , wherein the surface treatment step includes a metal-plate surface treatment step of removing the surface part of the metal plate, and
wherein a thickness of the surface part is 5 μm or more.
14. The method for manufacturing a metal plate according to claim 11 , wherein the surface treatment step includes a step of removing the surface part by exposing a surface of the base metal or the metal plate to a surface treatment liquid.
15. The method for manufacturing a metal plate according to claim 10 , comprising a selection step of selecting the metal plate in which, in a sample including the first surface and the second surface of the selected metal plate, the following conditions (1) and (2) regarding the particles are satisfied:
(1) the number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm 3 in the sample; and
(2) the number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm 3 in the sample.
16. The method for manufacturing a metal plate according to claim 10 , wherein the following condition (5) regarding the particles is satisfied:
(5) a number of the particles having an equivalent circle diameter of 5 μm or more is 20 or less per 1 mm 3 in the sample.
17. The method for manufacturing a metal plate according to claim 10 , wherein the following condition (6) regarding the particles is satisfied:
(6) a number of the particles having an equivalent circle diameter of 5 μm or more is 2 or less per 1 mm 3 in the sample.
18. The method for manufacturing a metal plate according to claim 10 , wherein a first ratio of the metal plate is 70% or more,
wherein the first ratio is a ratio of a first quantity to a total quantity,
wherein the total quantity is the number of the particles per 1 mm 3 in the sample, the particles having an equivalent circle diameter of 1 μm or more, and
wherein the first quantity is the number of the particles per 1 mm 3 in the sample, the particles having an equivalent circle diameter of 1 μm or more and less than 3 μm.
19. A deposition mask comprising:
a metal plate including a first surface and a second surface positioned on the opposite side of the first surface, the metal plate being made of an invar material containing iron and nickel in an amount of 34% by mass or more; and
a plurality of through holes formed in the metal plate,
wherein the metal plate comprises particles containing as a main component an element other than iron and nickel, and
wherein in a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles are satisfied
(1) a number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm 3 in the sample, and
(2) a number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm 3 in the sample.
20. A method for manufacturing a deposition mask comprising:
a step of preparing a metal plate including a first surface and a second surface positioned on the opposite side of the first surface, the metal plate being made of an invar material containing iron and nickel in an amount of 34% by mass or more; and
a processing step of forming through holes in the metal plate,
wherein the metal plate comprises particles containing as a main component an element other than iron and nickel, and
wherein in a sample including the first surface and the second surface of the metal plate, the following conditions (1) and (2) regarding the particles are satisfied
(1) a number of the particles having an equivalent circle diameter of 1 μm or more is 50 or more and 3000 or less per 1 mm 3 in the sample, and
(2) a number of the particles having an equivalent circle diameter of 3 μm or more is 50 or less per 1 mm 3 in the sample.