Position transducer and method for manufacturing the same comprising a pair of photodiodes surround the entirety of a predetermined region and have an annular shape
View Patent ↗The range of operating angles of a position transducer is widened, and its signal-to-noise ratio is improved. The position transducer includes a light source and a detector including at least one pair of photodiodes (PDs) disposed on a predetermined circle. The detector receives light emitted from the light source to output a signal varying depending on the areas of regions where the light is received on two PDs forming a pair. The PDs are formed on separate chips, respectively, and the chips are disposed on a substrate so that one or more pairs of PDs surround the entirety of a predetermined region and have an annular shape as a whole.
1. A position transducer comprising:
a light source; and
a detector including at least one pair of photodiodes disposed on a predetermined circle, the detector receiving light emitted from the light source to output a signal varying depending on the areas of regions where the light is received on two photodiodes forming a pair, wherein
the photodiodes are formed on separate chips, respectively, and
the chips are disposed on a substrate so that one or more pairs of photodiodes surround the entirety of a predetermined region and have an annular shape as a whole,
the chips are pentagons, respectively, or the chips are hexagons, respectively.
2. The position transducer according to claim 1 , wherein the photodiodes and the chips are disposed on the substrate with 360/n degree rotational symmetry, wherein n represents the number of photodiodes.
3. The position transducer according to claim 1 , wherein when the chips are pentagons, respectively, the chips are disposed so as to have a tetragonal outline as a whole.
4. The position transducer according to claim 1 , wherein when the chips are hexagons, respectively, the chips are disposed so as to have an octagonal outline as a whole.
5. A method for manufacturing a position transducer including a light source, and detector including at least one pair of photodiodes disposed on a predetermined circle, the detector receiving light emitted from the light source to output a signal varying depending on the areas of regions where the light is received on two photodiodes forming a pair, wherein the photodiodes are formed on separate chips, respectively, and the chips are disposed on a substrate so that one or more pairs of photodiodes surround the entirety of a predetermined region and have an annular shape as a whole, the method comprising the steps of:
forming partially annular photodiodes on a common wafer in a grid-like pattern so that adjacent photodiodes face in 180 degree opposite directions;
forming chips by cutting the wafer longitudinally, latitudinally, and obliquely; and
disposing the chips on a substrate so that the photodiodes have an annular shape as a whole.
6. The method according to claim 5 , wherein the chips are polygons, and the polygonal chips are formed in the step of forming chips by cutting the wafer longitudinally, latitudinally, and obliquely.
7. The method according to claim 6 , wherein the chips are pentagons, and the pentagonal chips are formed in the step of forming chips by cutting the wafer longitudinally, latitudinally, and obliquely.
8. The method according to claim 6 , wherein the chips are hexagons, and the hexagonal chips are formed in the step of forming chips by cutting the wafer longitudinally, latitudinally, and obliquely.