IP Library Granted Patent US 11,733,535
Granted Patent B2
US 11,733,535 · App. 17/029,157 · Granted Aug 22, 2023

Achromatic metasurface optical components by dispersive phase compensation

Inventors: Francesco Aieta (Sunnyvale, CA); Mikhail Kats (Madison, WI); Patrice Genevet (Valbonne, FR); Federico Capasso (Cambridge, MA); Mohammadreza Khorasaninejad (Belmont, MA)
Assignee: President and Fellows of Harvard College
G02B27/4211G02B1/002G02B5/008G02B5/203H01Q15/10G02B5/1809
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Quick Facts
Patent No.
US 11,733,535
App. No.
17/029,157
Granted
Aug 22, 2023
Kind
B2
Abstract

Multi-wavelength light is directed to an optic including a substrate and achromatic metasurface optical components deposited on a surface of the substrate. The achromatic metasurface optical components comprise a pattern of dielectric resonators. The dielectric resonators have nonperiodic gap distances between adjacent dielectric resonators; and each dielectric resonator has a width, w, that is distinct from the width of other dielectric resonators. A plurality of wavelengths of interest selected from the wavelengths of the multi-wavelength light are deflected with the achromatic metasurface optical components at a shared angle or to or from a focal point at a shared focal length.

Claims (25)

1. A method of altering incident light using metasurface optical components, the method comprising:

providing a substrate;

depositing metasurface optical components on the surface of the substrate, wherein the metasurface optical components comprise a pattern of silicon dielectric resonators, the silicon dielectric resonators having gap distances between adjacent silicon dielectric resonators, and each silicon dielectric resonator has a width and a thickness; and

directing incident light to the metasurface optical components, wherein the gap distances, the widths, and the thicknesses are configured to scatter the incident light and impart a phase shift, ranging at least from 0 to 2π, on an outgoing light.

2. The method of claim 1 , wherein the incident light comprises a wavelength of about 850 nm to 2000 nm.

3. The method of claim 2 , wherein the incident light comprises a wavelength of about 1100 nm to 1950 nm.

4. The method of claim 3 , wherein the incident light comprises a wavelength of about 1300 nm, 1550 nm, and/or 1800 nm.

5. The method of claim 4 , wherein the incident light comprises a narrow band light including a full width half max of about 30 nm.

6. The method of claim 1 , wherein the silicon dielectric resonators comprise amorphous silicon.

7. The method of claim 1 , wherein each of the dielectric resonators have a width of at least 100 nm.

8. The method of claim 1 , wherein the substrate comprises silica.

9. The method of claim 1 , wherein each dielectric resonator has a rectangular cross-section in a plane perpendicular to the substrate surface.

10. The method of claim 1 , wherein the wherein the gap between the dielectric resonators comprises a material with a refractive index lower than the refractive index of the dielectric pillars.

11. A metasurface optical device, comprising:

a substrate including a surface; and

a pattern of silicon dielectric resonators on the surface of the substrate, wherein the silicon dielectric resonators have gap distances between adjacent silicon dielectric resonators, and each silicon dielectric resonator has a width and a thickness and wherein the gap distances, the widths, and the thicknesses are configured to scatter incident light and impart a phase shift, ranging at least from 0 to 2π, on an outgoing light.

12. The metasurface optical device of claim 11 , wherein the incident light comprises a wavelength of about 850 nm to 2000 nm.

13. The metasurface optical device of claim 12 , wherein the incident light comprises a wavelength of about 1100 nm to 1950 nm.

14. The metasurface optical device of claim 13 , wherein the incident light comprises a wavelength of about 1300 nm, 1550 nm, or 1800 nm.

15. The metasurface optical device of claim 14 , wherein the incident light comprises a narrow band of light including a full width half max of about 30 nm.

16. The metasurface optical device of claim 11 , wherein the silicon dielectric resonators comprise amorphous silicon.

17. The metasurface optical device of claim 11 , wherein each of the dielectric resonators have a width of at least 100 nm.

18. The metasurface optical device of claim 11 , wherein the substrate comprises silica.

19. The metasurface optical device of claim 11 , wherein each dielectric resonator has a rectangular cross-section in a plane perpendicular to the substrate surface.

20. The metasurface optical device of claim 11 , wherein the gap between the dielectric resonators comprises a material with a refractive index lower than the refractive index of the dielectric pillars.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 30, 2023
From: AIETA, FRANCESCO; CAPASSO, FEDERICO; GENEVET, PATRICE; KATS, MIKHAIL A.; KHORASANINEJAD, MOHAMMADREZA
To: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
Reel/Frame 062522/0624 →
Continuity (3)
Continuation 15534642
Provisional Application 62090172 · Dec 10, 2014
Related Publication 20210109364A1 · Apr 15, 2021
Cited By (7)
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