IP Library › Granted Patent US 11,735,450
Granted Patent B2
US 11,735,450 · App. 17/637,870 · Granted Aug 22, 2023

Substrate storage container

Inventor: Sou Kanai (Saitama, JP)
Assignee: Shin-Etsu Polymer Co., Ltd.
H01L21/67386H01L21/67369H01L21/67383
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Quick Facts
Patent No.
US 11,735,450
App. No.
17/637,870
Granted
Aug 22, 2023
Kind
B2
Abstract

A substrate storage container includes: a container body configured to store a substrate; a lid configured to close an opening formed on the front side of the container body; and a retainer arranged on the back of the lid and configured to restrict the substrate from moving to the front side. The retainer includes an integration of: a frame configured to be detachably attached to the back of the lid; a contact portion including a convex portion configured to contact the substrate and restrict the substrate from moving to the front side; and a beam structure that connects the frame and the contact portion. The contact portion and the beam structure are configured to be spaced apart from the lid.

Claims (27)

1. A substrate storage container, comprising:

a container body configured to store a substrate;

a lid configured to close an opening formed on a front side of the container body; and

a retainer arranged on a back of the lid and configured to restrict the substrate from moving to the front side,

wherein the retainer comprises an integration of:

a frame configured to be detachably attached to the back of the lid;

a contact portion comprising a convex portion that extends linearly in a longitudinal direction and is configured to contact the substrate and restrict the substrate from moving to the front side; and

a beam structure that connects the frame and the contact portion, and

wherein the contact portion and the beam structure are configured to be spaced apart from the lid.

2. The substrate storage container according to claim 1 , wherein

the contact portion extends vertically,

the beam structure comprises a plurality of beams arranged in the longitudinal direction, each having a base end connected to the frame and a distal end connected to the contact portion,

the beams each extend in a direction at an angle to a horizontal direction, and

longitudinally adjacent beams extend in different directions.

3. The substrate storage container according to claim 2 , wherein

the frame has a plurality of positioning portions arranged in the longitudinal direction,

the frame comprises a first region where a distance between base ends of adjacent beams is small and a second region where a distance between the base ends of the adjacent beams is larger than that in the first region,

each of the positioning portions is located in the first region, and

the positioning portions are each engaged with the lid, which regulates a position of the frame relative to the lid in a lateral direction.

4. The substrate storage container according to claim 2 , wherein

the frame has a plurality of engagement portions arranged in the longitudinal direction,

the frame comprises a first region where a distance between base ends of the adjacent beams is small and a second region where a distance between the base ends of the adjacent beams is larger than that in the first region,

each of the engagement portions is located in the second region, and

the engagement portions are each engaged with the lid, which regulates a position of the frame relative to the lid in a front-rear direction.

5. The substrate storage container according to claim 4 , wherein the engagement portions each comprise a hole that penetrates therethrough in the front-rear direction.

6. The substrate storage container according to claim 1 , wherein the contact portion comprises a hole that penetrates therethrough in a front-rear direction.

7. The substrate storage container according to claim 1 , further comprising an elastic separate member configured to be attached to the contact portion.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 24, 2022
From: KANAI, SOU
To: SHIN-ETSU POLYMER CO., LTD.
Reel/Frame 059087/0718 →
Priority Claims (1)
JP 2019-154371 · Aug 27, 2019 · national
Continuity (1)
Related Publication 20220277977A1 · Sep 1, 2022