Array substrate, display panel, display device and method of manufacturing an array substrate
An array substrate, includes: a substrate, three metal layers stacked on the substrate, and a plurality of signal line leads disposed in a peripheral area of the array substrate. The plurality of signal line leads are distributed in at least two of the three metal layers.
1. An array substrate, comprising:
a substrate,
three metal layers stacked on the substrate,
a plurality of signal line leads disposed in a peripheral area of the array substrate, and
a plurality of bonding pads disposed in the peripheral area, wherein
the plurality of signal line leads are distributed in at least two of the three metal layers;
the plurality of signal line leads are connected to an integrated circuit in a driving circuit through the plurality of bonding pads, and each of the plurality of bonding pads is connected to a corresponding signal line lead of the plurality of signal line leads; and
the plurality of bonding pads are disposed in a same layer and are divided into N subsets, N is equal to a number of metal layers in which the plurality of signal line leads are distributed, the plurality of bonding pads are arranged in N different lines that are parallel to each other, each subset of bonding pads are arranged in a respective line of the N different lines such that each subset of bonding pads extend to different lengths with respect to one another, and signal line leads connected to the bonding pads of each subset are distributed in a same metal layer.
2. The array substrate according to claim 1 , wherein a plurality of orthographic projections of the plurality of signal line leads are formed on the substrate, and a spacing between each two adjacent orthographic projections of the plurality of orthographic projections is the same.
3. The array substrate according to claim 1 , wherein a plurality of orthographic projections of the plurality of signal line leads are formed on the substrate, and two signal line leads, orthographic projections of which are adjacent to each other, are distributed in different metal layers.
4. The array substrate according to claim 1 , wherein the plurality of signal line leads are distributed in two adjacent metal layers of the three metal layers, and the plurality of bonding pads are disposed in any metal layer of the two adjacent metal layers.
5. The array substrate according to claim 1 , wherein the plurality of signal line leads are distributed in the three metal layers, and the plurality of bonding pads are disposed in a middle metal layer of the three metal layers.
6. The array substrate according to claim 1 , wherein the plurality of signal line leads are distributed in two metal layers, which are not adjacent to each other, of the three metal layers, and the bonding pads are disposed in a metal layer other than the two metal layers that are not adjacent to each other.
7. The array substrate according to claim 6 , wherein the three metal layers include a first metal layer, a second metal layer and a third metal layer in a direction away from the substrate, the first metal layer includes a light-shielding layer, the second metal layer includes a plurality of gates, and the third metal layer includes a plurality of sources and a plurality of drains.
8. The array substrate according to claim 7 , wherein the plurality of signal line leads are data line leads and are distributed in the first metal layer and the third metal layer, and the plurality of bonding pads are disposed in the second metal layer.
9. The array substrate according to claim 8 , further comprising:
a first insulating layer disposed between the first metal layer and the second metal layer, wherein the first insulating layer includes first via holes, and a first subset of the plurality of bonding pads is connected to signal line leads distributed in the first metal layer through the first via holes, and a second insulating layer disposed between the second metal layer and the third metal layer, wherein the second insulating layer includes second via holes, and signal line leads distributed in the third metal layer are connected to a second subset of the plurality of bonding pads through the second via holes.
10. The array substrate according to claim 7 , wherein the first metal layer is made of a same material as the second metal layer.
11. The array substrate according to claim 7 , wherein the first metal layer is made of a same material as the third metal layer, and signal line leads disposed in the first metal layer have a same width as signal line leads disposed in the third metal layer.
12. A display panel, comprising the array substrate according to claim 1 .
13. A display device, comprising the display panel according to claim 12 .
14. The array substrate according to claim 1 , wherein in metal layers in which the plurality of signal line leads are distributed, a number of signal line leads distributed in each metal layer is the same.
15. The array substrate according to claim 1 , wherein the array substrate is a bottom-gate array substrate.
16. A method of manufacturing an array substrate, comprising:
providing a substrate; and
forming three metal layers stacked on the substrate, wherein at least two of the three metal layers include a plurality of signal line leads disposed in a peripheral area of the array substrate, wherein
forming the three metal layers stacked on the substrate, includes:
forming a first metal layer on the substrate, wherein the first metal layer includes a first portion of the plurality of signal line leads;
forming a second metal layer at a side of the first metal layer away from the substrate, wherein the second metal layer includes a plurality of bonding pads configured to be connected to the plurality of signal line leads, and the plurality of signal line leads are connected to an integrated circuit in a driving circuit through the plurality of bonding pads; and
forming a third metal layer at a side of the second metal layer away from the substrate, wherein the third metal layer includes a second portion of the plurality of signal line leads;
the method further comprises:
forming a first insulating layer on the side of the first metal layer away from the substrate;
forming first via holes in the first insulating layer, wherein the first via holes are configured to accommodate a part of a first subset of the plurality of bonding pads, such that the first subset of the plurality of bonding pads is electrically connected to the first portion of the plurality of signal line leads;
forming a second insulating layer on the side of the second metal layer away from the substrate; and
forming second via holes in the second insulating layer, wherein the second via holes are configured to accommodate a part of the second portion of the plurality of signal line leads, such that the second portion of the plurality of signal line leads is electrically connected to a second subset of the plurality of bonding pads, the first subset of the plurality of bonding pads and the second subset of the plurality of bonding pads are arranged in two different lines that are parallel to each other, the first subset of the plurality of bonding pads are arranged in one of the two different lines, and the second subset of the plurality of bonding pads are arranged in the other of the two different lines, such that each subset of bonding pads extend to different lengths with respect to one another.