Semiconductor storage device having a contact isolated from a conductor layer by oxidized portions and method for manufacturing the same
A semiconductor storage device includes a substrate, a first conductor layer, a plurality of second conductor layers, and a first contact. The substrate includes a core region, a first region surrounding the core region, and a second region connecting the core region and the first region. The first conductor layer is above the core region, the first region, and the second region. The second conductor layers are above the first conductor layer above the core region. The first contact is above the first region and extends in the thickness direction. The first contact separates the first conductor layer above the first region into a first portion surrounded by the first contact and a second portion surrounding the first contact. The first portion of the first conductor layer includes a first oxidized portion, and the second portion of the first conductor layer includes a second oxidized portion.
1. A semiconductor storage device, comprising:
a substrate;
a first conductor layer above the substrate in a core region;
a second conductor layer above the first conductor layer in the core region, a first region surrounding the core region, and a second region connecting the core region to the first region;
a plurality of third conductor layers on the second conductor layer in the core region, the third conductor layers being spaced from each other in a first direction crossing the substrate;
a plurality of memory pillars extending through the plurality of third conductor layers and being in contact with the first conductor layer in the core region; and
a first contact provided in the first region and extending in the first direction, the first contact surrounding the plurality of third conductor layers in the core region in a cross-section along a surface of the substrate and separating a part of the second conductor layer in the first region into a first portion that is surrounded by the first contact and a second portion that surrounds the first contact, wherein
the first portion is in contact with the first contact via a first oxidized portion,
the second portion is in contact with the first contact via a second oxidized portion,
the first oxidized portion contains a first impurity, and
the second oxidized portion contains a second impurity.
2. The semiconductor storage device according to claim 1 , wherein
the first oxidized portion electrically isolates the first portion from the first contact, and
the second oxidized portion electrically isolates the second portion from the first contact.
3. The semiconductor storage device according to claim 1 , wherein
the first impurity is at least one of phosphorus, arsenic, and boron, and
the second impurity is at least one of phosphorus, arsenic, and boron.
4. The semiconductor storage device according to claim 1 , wherein
the first oxidized portion extends into the first contact, and
the second oxidized portion extends into the first contact.
5. The semiconductor storage device according to claim 1 , wherein the second conductor layer in the core region is a select gate line.
6. The semiconductor storage device according to claim 1 , further comprising:
a second contact provided in the first region and extending in the first direction, wherein
the second contact is electrically isolated from the second conductor layer.
7. The semiconductor storage device according to claim 6 , wherein an upper surface of the first contact is flush with an upper surface of the second contact.
8. The semiconductor storage device according to claim 6 , wherein the second conductor layer in the first region is in contact with the second contact via a third oxidized portion.
9. The semiconductor storage device according to claim 1 , wherein the first contact has a rectangular ring shape in a cross-section along the surface of the substrate.
10. The semiconductor storage device according to claim 1 , wherein
the second conductor layer is also in a third region surrounding the first region and a fourth region connecting the first region to the third region.
11. The semiconductor storage device according to claim 10 , wherein
the first conductor layer in the first region has a rectangular ring shape in a cross-section along the surface of the substrate, and
the first conductor layer in the third region has a rectangular ring shape in a cross-section along the surface of the substrate.
12. A method for manufacturing a semiconductor storage device, the method comprising:
forming a first conductor layer above a core region, a first region, and a second region of a substrate, the first region surrounding the core region, and the second region connecting the core region and the first region;
forming a plurality of sacrificial layers separated from each other in a thickness direction of the substrate above the core region of the substrate and above the first conductor layer;
forming a plurality of pillars extending through the first conductor layer above the core region and the plurality of sacrificial layers;
removing a part of each of the plurality of sacrificial layers and forming a second conductor layer in a space from which the part of each of the plurality of sacrificial layers is removed;
forming a slit that divides a part of the first conductor layer above the first region into a first portion surrounded by the slit and a second portion surrounding the slit;
selectively oxidizing a first side surface of the first portion that is exposed in the slit and a second surface of the second portion that is exposed in the slit; and
after the selective oxidizing, forming a first contact in the slit.
13. The method according to claim 12 , wherein
the first side surface of the first portion that has been oxidized electrically isolates the first portion of the first conductor layer from the first contact, and
the second side surface of the second portion that has been oxidized electrically isolates the second portion of the first conductor layer from the first contact.
14. The method according to claim 13 , wherein
the first side surface of the first portion that has been oxidized contains a first impurity, and
the second side surface of the second portion that has been oxidized contains a second impurity.
15. The method according to claim 14 , wherein
the first impurity is at least one of phosphorus, arsenic, and boron, and
the second impurity is at least one of phosphorous, arsenic, and boron.
16. A semiconductor storage device, comprising:
a substrate;
a first conductor layer above the substrate in a core region;
a second conductor layer above the first conductor layer in the core region, a first region surrounding the core region, and a second region connecting the core region to the first region;
a plurality of third conductor layers on the second conductor layer in the core region, the third conductor layers being spaced from each other in a first direction crossing the substrate;
a plurality of memory pillars extending through the plurality of third conductor layers and being in contact with the first conductor layer in the core region; and
a first contact provided in the first region and extending in the first direction, the first contact surrounding the plurality of third conductor layers in the core region in a cross-section along a surface of the substrate and separating a part of the second conductor layer in the first region into a first portion that is surrounded by the first contact and a second portion that surrounds the first contact, wherein
the first portion is in contact with the first contact via a first oxidized portion,
the second portion is in contact with the first contact via a second oxidized portion,
the first oxidized portion extends into the first contact, and
the second oxidized portion extends into the first contact.
17. The semiconductor storage device according to claim 16 , wherein
the first oxidized portion electrically isolates the first portion from the first contact, and the second oxidized portion electrically isolates the second portion from the first contact.
18. The semiconductor storage device according to claim 16 , wherein the second conductor layer in the core region is a select gate line.
19. The semiconductor storage device according to claim 16 , further comprising: a second contact provided in the first region and extending in the first direction, wherein the second contact is electrically isolated from the second conductor layer.
20. The semiconductor storage device according to claim 19 , wherein an upper surface of the first contact is flush with an upper surface of the second contact.