Frequency-modulating sensor array
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
1. A device comprising:
a material having first and second regions;
microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration that is to vary dependent on influence of a physical environmental property experienced at the respective region; and
circuitry to produce a signal identifying a specific one of the first and second regions as a function of relative variation in the respective frequencies of resonant vibration.
2. The device of claim 1 wherein the physical environmental property comprises a location-specific force experienced by the material.
3. The device of claim 2 wherein the location-specific force is one of a pressure, an applied contact force, and a twisting force.
4. The device of claim 1 wherein the physical environmental property comprises a location-specific temperature experienced by the material.
5. The device of claim 1 wherein:
the device further comprises circuitry to sequentially read-out the respective frequency of resonant vibration of each of the MEMS resonators; and
the signal is dependent on the sequentially-read-out respective frequency of resonant vibration of each of the MEMS resonators.
6. The device of claim 5 wherein:
the first region is to experience an effect of the physical environmental property at a first point in time;
the second region is to experience an effect of the physical environmental property at a second point in time; and
the circuitry to produce the signal is to further indicate a direction associated with the environmental property, dependent on the first point in time, the second point in time, and a positional relationship between the first and second regions.
7. The device of claim 1 wherein the material is embodied as a material layer and wherein the signal is to identify a position of the specific one, relative to the material layer.
8. A device comprising:
a material having first and second regions;
microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration that is to vary dependent on influence of a physical environmental property experienced at the respective region; and
circuitry to sequentially read-out the respective frequency of resonant vibration of each of the MEMS resonators and to produce a signal identifying a specific one of the first and second regions as a function of relative variation in the sequentially-read-out respective frequencies of resonant vibration of the MEMS resonators.
9. The device of claim 8 wherein the physical environmental property comprises a location-specific force experienced by the material.
10. The device of claim 9 wherein the location-specific force is one of a pressure, an applied contact force, and a twisting force.
11. The device of claim 8 wherein the physical environmental property comprises a location-specific temperature experienced by the material.
12. The device of claim 8 wherein:
the first region is to experience an effect of the physical environmental property at a first point in time;
the second region is to experience an effect of the physical environmental property at a second point in time; and
the circuitry to produce the signal is to further indicate a direction associated with the environmental property, dependent on the first point in time, the second point in time, and a positional relationship between the first and second regions.
13. The device of claim 8 wherein the device is embodied as an integrated circuit, wherein the material is embodied as a material layer of the integrated circuit, and wherein the signal is to identify a position of the specific one, relative to the material layer of the integrated circuit.
14. A device comprising:
a force input surface comprising a material having first and second regions;
microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration, wherein each respective frequency of resonant vibration is vary so as to modulate sensed influence of a physical environmental property experienced at the respective region;
circuitry to excite each of the M EMS resonators to the respective frequency of resonant vibration; and
circuitry to demodulate the sensed influence of the physical environmental property experienced at the respective region, and to produce a signal identifying a specific one of the first and second regions, as a function of relative variation in the respective frequencies of resonant vibration.
15. The device of claim 14 wherein the physical environmental property comprises a location-specific force experienced by the material.
16. The device of claim 15 wherein the location-specific force is one of a pressure, an applied contact force, and a twisting force.
17. The device of claim 14 wherein the physical environmental property comprises a location-specific temperature experienced by the material.
18. The device of claim 14 wherein:
the device further comprises circuitry to sequentially read-out the respective frequency of resonant vibration of each of the MEMS resonators; and
the signal is dependent on the sequentially-read-out respective frequency of resonant vibration of each of the MEMS resonators.
19. The device of claim 18 wherein:
the first region is to experience an effect of the physical environmental property at a first point in time;
the second region is to experience an effect of the physical environmental property at a second point in time; and
the circuitry to produce the signal is to further indicate a direction associated with the environmental property, dependent on the first point in time, the second point in time, and a positional relationship between the first and second regions.
20. The device of claim 14 wherein the material is embodied as a material layer and wherein the signal is to identify a position of the specific one, relative to the material layer.