Magnetic sensor device with a magnetic field converter, a magnetic detector, and a magnetic shield

1. A magnetic sensor device comprising:

a magnetic field converter that receives an input magnetic field input along a first direction and outputs an output magnetic field along a second direction, which is orthogonal to the first direction;

a magnetic field detector provided at a position where the output magnetic field can be applied; and

a magnetic shield that shields external magnetic fields along a third direction, which is orthogonal to both the first direction and the second direction;

wherein the magnetic field converter is made of a soft magnetic material;

when viewed along the first direction, the magnetic field converter has a shape such that a length in the third direction is greater than a length in the second direction;

when viewed along the first direction, the magnetic shield is provided at a position overlapping the magnetic field converter and the magnetic field detector; and

a magnetic field transmittance of the external magnetic field is 1˜30%.

2. The magnetic sensor device according to claim 1 , wherein when viewed along the first direction, the magnetic shield has a shape such that a maximum length in the third direction is less than a maximum length in the second direction.

3. The magnetic sensor device according to claim 1 , wherein a linearity of a sensor signal output from the magnetic sensor device in accordance with a magnetic field strength of the output magnetic field is 1% or less.

4. The magnetic sensor device according to claim 1 , wherein a length of a gap between the magnetic field detector and the magnetic shield in the first direction is 0˜10 μm.

5. The magnetic sensor device according to claim 1 , wherein a plurality of the magnetic shields is arranged in parallel along the third direction.

6. The magnetic sensor device according to claim 1 , wherein the magnetic shield includes a first magnetic shield and a second magnetic shield;

the magnetic field converter and the magnetic field detector are provided in a gap between the first magnetic shield and the second magnetic shield in the first direction; and

a length of the gap between the first magnetic shield and the second magnetic shield in the first direction is 1˜40 μm.

7. The magnetic sensor device according to claim 1 , wherein when viewed along the first direction, the magnetic shield is positioned to a front side or a back side of the magnetic field converter and the magnetic field detector.

8. The magnetic sensor device according to claim 1 , further comprising a plurality of magnetic field detectors;

wherein when viewed along the first direction, the plurality of magnetic field detectors is provided at a position that is line-symmetrical about an axis along a lengthwise direction of the magnetic field converter, wherein the axis passes through the center of a magnetic field converter in a short-wise direction.

9. The magnetic sensor device according to claim 1 , wherein the magnetic field detector includes a magnetoresistive effect element; and

the magnetoresistive effect element includes a magnetization fixed layer, in which the magnetization is fixed, and a magnetization free layer, a magnetization direction of which changes in accordance with the output magnetic field that is applied.

10. The magnetic sensor device according to claim 1 , wherein the magnetic field detector includes a tunnel magnetoresistance effect (TMR) element or a giant magnetoresistance effect (GMR) element.