Gyro sensor, electronic device, and vehicle
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a mass section coupled to the driving section and displaced along the X axis, a detecting section coupled to the mass section, capable of turning around a Z axis crossing the X axis, and capable of being displaced along the Z axis by a Coriolis force acting on a turning motion horizontal to the substrate, and an elastic section coupling the detecting section and the fixed section. The fixed section is disposed between the center of gravity of the detecting section and the mass section in a plan view.
1. A gyro sensor comprising:
three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
a substrate; and
an element unit that is supported on the upper surface of the substrate located on the plus side of the Z axis and detects an angular velocity based on a change in capacitance, wherein
the element unit comprises:
a fixed section fixed to the upper surface of the substrate;
a mass section configured to be displaced in an X-axis direction along the X-axis parallel to the upper surface of the substrate;
a driving section that drives the mass section in the X-axis direction;
a first detecting section that is connected to the mass section and is configured to be displaced in a Z-axis direction along the Z-axis;
a second detecting section that is connected to the mass section and is configured to be displaced in the Z-axis direction;
a first elastic section connecting the first detection section and the fixed section; and
a second elastic section connecting the second detection section and the fixed section.
2. The gyro sensor according to claim 1 , wherein
the first detecting section and the second detecting section rotate in opposite phases along a plane including the X-axis and the Y-axis.
3. The gyro sensor according to claim 1 , wherein
in a plan view from the Z-axis direction, the fixed section is arranged between the first detecting section and the second detecting section.
4. The gyro sensor according to claim 1 , wherein
the first detecting section is arranged on a plus side of the Y axis; and
the second detecting section is arranged on a minus side of the Y axis.
5. The gyro sensor according to claim 1 , wherein the element part comprises:
a first joining section connecting the first detecting section and the first elastic section; and
a second joining section connecting the second detecting section and the second elastic section.
6. The gyro sensor according to claim 4 , wherein
a first groove is provided on the connection side of the first detecting section with the first joining section.
7. The gyro sensor according to claim 4 , wherein
a second groove is provided on the connection side of the second detecting section with the second joining section.
8. The gyro sensor according to claim 1 , wherein
in a plan view from the Z-axis direction, the fixed section is located between an imaginary straight line connecting a center of gravity of the first detecting section and a center of gravity of the second detecting section and the mass section.
9. The gyro sensor according to claim 1 , wherein
the first elastic section extends from the fixed section to the first detecting section in the Y-axis direction along the Y-axis, and has a folded shape that is folded from the plus direction to the minus direction of the X axis.
10. The gyro sensor according to claim 1 , wherein
the second elastic section extends from the fixed section to the second detecting section in the Y-axis direction along the Y-axis, and has a folded shape that is folded from the plus direction to the minus direction of the X axis.
11. An electronic device comprising the gyro sensor according to claim 1 .
12. A vehicle comprising the gyro sensor according to claim 1 .