Planarization of backside emitting VCSEL and method of manufacturing the same for array application
A method of forming a flip chip backside Vertical Cavity Surface Emitting Laser (VCSEL) package comprising: forming a VCSEL pillar array; applying a dielectric layer to the VCSEL pillar array, the dielectric layer filling trenches in between pillars forming the VCSEL pillar array and covering the pillars; planarizing the VCSEL pillar array to remove the dielectric layer covering the pillars exposing a metal layer on a top surface of the pillars; applying a metal coating on the metal layer on a top surface of the pillars, the metal layer defining a contact pattern of the VCSEL pillar array; and applying solder on the metal coating to flip chip mount the VCSEL pillar array to a substrate package.
1. A flip chip backside emitting Vertical Cavity Surface Emitting Laser (VCSEL) package comprising:
a VCSEL pillar array, wherein the VCSEL pillar array comprises:
a substrate;
a first mirror device formed on the substrate;
an active layer formed directly on the first mirror device generating light;
a second mirror device directly attached to the active layer
a metal layer formed on the second mirror device;
a plurality of pillars formed by directional Inductive Coupled Plasma-Reactive Ion Etcher (ICP-RIE), wherein the second mirror device is directly attached to the active region across an entire width of each pillar, each pillar exposing a portion of the first mirror device, the active layer and the second mirror device, wherein each pillar has a diameter of 5-50 μm;
a plurality of trenches, wherein each trench is adjacent at least one of the plurality of pillars, the plurality of trenches removing portions of the first mirror device and second mirror device, each trench having a bottom area exposing the substrate;
a dielectric layer filling trenches in between the plurality of pillars forming the VCSEL pillar array, covering the plurality of pillars and the metal layer, wherein the VCSEL pillar array is planarized to expose the metal layer on a top surface of the pillars;
a metal coating on the metal layer on the top surface of the pillars, the metal layer defining a contact pattern of the VCSEL pillar array, wherein the metal coating attaches a plurality of pillars together;
solder applied on the metal coating to flip chip mount the VCSEL pillar array to a substrate package.
2. The flip chip backside emitting VCSEL package of claim 1 , comprising electrical connections formed around a perimeter of the VCSEL pillar array.
3. The flip chip backside emitting VCSEL package of claim 1 , comprising an optical device attached to a backside of the VCSEL array.
4. The flip chip backside emitting VCSEL package of claim 1 , wherein the metal coating attaches interior pillars of the VCSEL pillar array together and pillars along a perimeter of the VCSEL pillar array are unattached.
5. The flip chip backside emitting VCSEL package of claim 1 , wherein the dielectric layer is one of a Polyimide, Benzocyclobutene (BCB) or a solvent based chemical dielectric film.
6. The flip chip backside emitting VCSEL package of claim 1 , wherein the plurality of trenches removing portions of the first mirror device and second mirror device so that the first mirror device and second mirror device are only found in each of the plurality of pillars.