Alumina sintered body and manufacturing method therefor
The present invention relates to an alumina sintered body and a manufacturing method therefor; for example, the present invention relates to an alumina sintered body that is suitably utilized for a member or similar used in a plasma processing device, an etcher for semiconductor/liquid crystal display device manufacturing, a CVD device, or similar, or that is suitably utilized for a substrate or similar of a plasma-resistant member which is to be coated, as well as a manufacturing method for said alumina sintered body.
1. An alumina-based sintered object having an Al content, in terms of Al 2 O 3 content, of 99.8 wt % or higher,
wherein the alumina-based sintered object has an Si content, in terms of SiO 2 content, of 321 ppm to 600 ppm and an Na content, in terms of Na 2 O content, of more than zero and 27 ppm or less, and
wherein the alumina-based sintered object has a density of 3.96 g/cm 3 or higher and an average pore diameter of 5 μm or less.
2. The alumina-based sintered object according to claim 1 , containing Mg in an amount which, in terms of MgO content, is 1.0 to 4.0 times the Si content in terms of SiO 2 content.
3. The alumina-based sintered object according to claim 1 , containing Ca in an amount which, in terms of CaO content, is up to 3.0 times the Si content in terms of SiO 2 content.
4. The alumina-based sintered object according to claim 1 , wherein Al 2 O 3 crystals contained in the alumina-based sintered object have an average crystal grain diameter of 3 μm to 40 μm.
5. The alumina-based sintered object according to claim 1 , wherein a corrosion-resistant film or a corrosion-resistant layer is formed on at least a part of the alumina-based sintered object.
6. The alumina-based sintered object according to claim 1 , wherein the alumina-based sintered object has a surface roughness Ra of less than 0.1 μm.
7. The alumina-based sintered object according to claim 1 , wherein the Na content, in terms of the Na 2 O content, is in a range from 2 ppm to 27 ppm.
8. The alumina-based sintered object according to claim 1 , wherein the Na content, in terms of the Na 2 O content, is in a range from 10 ppm to 27 ppm.
9. A process for producing the alumina-based sintered object according to claim 4 , the process comprising: granulating and molding a raw-material powder to obtain a molded object, and firing the molded object in a hydrogen atmosphere at 1,600° C. to 1,900° C.