Silicon carbide device with compensation region and method of manufacturing

1. A method of manufacturing a silicon carbide device, comprising:

providing a silicon carbide substrate comprising a drift layer of a first conductivity type and a trench extending from a main surface of the silicon carbide substrate into the drift layer;

implanting first dopants through a first trench sidewall of the trench, wherein:

the first dopants have a second conductivity type and are implanted at a first implant angle into the silicon carbide substrate;

at the first implant angle channeling occurs in the silicon carbide substrate; and

the first dopants form a first compensation layer extending parallel to the first trench sidewall; and

an epitaxial layer is on the main surface;

implanting further first dopants, through a further first sidewall of a further trench in the epitaxial layer on the main surface, to form a compensation layer extension of the first compensation layer in the epitaxial layer.

2. The method according to claim 1 ,

implanting second dopants of the second conductivity type through the first trench sidewall, wherein the second dopants form a second compensation layer at a side of a third compensation layer averted from the trench.

3. The method according to claim 1 , comprising:

implanting second dopants of the second conductivity type through the first trench sidewall, wherein the second dopants form a second compensation layer.

4. The method according to claim 1 , comprising:

removing a sacrificial layer, comprising one or more portions of one or more compensation layers formed by implanting one or more dopants through the main surface of the silicon carbide substrate, at the main surface of the silicon carbide substrate.

5. The method according to claim 1 , comprising:

prior to forming at least one of the first compensation layer or a second compensation layer, forming an implantation mask on the main surface, wherein an opening in the implantation mask exposes the trench.

6. The method according to claim 1 , comprising:

implanting third dopants of the second conductivity type through a bottom of the trench, wherein the third dopants form a first supplemental compensation region.

7. A method of manufacturing a silicon carbide device, comprising:

providing a silicon carbide substrate comprising a drift layer of a first conductivity type and a trench extending from a main surface of the silicon carbide substrate into the drift layer;

implanting first dopants through a first trench sidewall of the trench, wherein the first dopants have a second conductivity type and form a first compensation layer extending parallel to the first trench sidewall;

implanting second dopants through the first trench sidewall, wherein:

the second dopants have the first conductivity type and form a second compensation layer; and

the first compensation layer and the second compensation layer form a pn junction; and

performing at least one of:

implanting third dopants of the second conductivity type through the first trench sidewall, wherein the third dopants form a third compensation layer;

implanting further first dopants, through a further first sidewall of a further trench in an epitaxial layer on the main surface, to form a compensation layer extension of the first compensation layer in the epitaxial layer; or

removing a sacrificial layer, comprising one or more portions of one or more compensation layers formed by implanting one or more dopants through the main surface of the silicon carbide substrate, at the main surface of the silicon carbide substrate.

8. The method according to claim 7 , wherein:

the first dopants are implanted at a first implant angle at which channeling occurs in the silicon carbide substrate.

9. The method according to claim 7 , wherein:

the second dopants are implanted at a second implant angle at which channeling occurs in the silicon carbide substrate.

10. The method according to claim 7 , comprising:

implanting further first dopants through a second trench sidewall, wherein:

the second trench sidewall is opposite to the first trench sidewall; and

the further first dopants form a further first compensation layer parallel to the second trench sidewall.

11. The method according to claim 10 , comprising:

implanting further second dopants through the second trench sidewall, wherein the further second dopants form a further second compensation layer parallel to the second trench sidewall.

12. The method according to claim 11 , wherein:

at least one of the further first dopants or the further second dopants are implanted at an implant angle at which channeling occurs in the silicon carbide substrate.

13. The method according to claim 7 , comprising:

implanting the third dopants of the second conductivity type through the first trench sidewall at an implant angle at which channeling occurs in the silicon carbide substrate, wherein the third dopants form the third compensation layer at a side of the second compensation layer averted from the trench.

14. The method according to claim 7 , comprising:

forming a fill structure in the trench; and

forming a gate electrode between the main surface and the fill structure.

15. The method according to claim 7 , comprising:

forming a fill structure in the trench;

forming the epitaxial layer on the main surface;

forming the further trench in the epitaxial layer, the further trench exposing the fill structure; and

implanting the further first dopants through the further first sidewall of the further trench to form the compensation layer extension of the first compensation layer in the epitaxial layer.

16. The method according to claim 7 , comprising:

implanting at least one of the first dopants or the second dopants through the main surface to form at least some of the sacrificial layer at the main surface, wherein the sacrificial layer comprises at least one of horizontal portions of the first compensation layer or horizontal portions of the second compensation layer; and

after forming at least one of the first compensation layer or the second compensation layer, removing the sacrificial layer at the main surface of the silicon carbide substrate.

17. The method according to claim 7 , comprising:

prior to forming at least one of the first compensation layer or the second compensation layer, forming an implantation mask on the main surface, wherein an opening in the implantation mask exposes the trench.

18. The method according to claim 7 , comprising:

implanting fourth dopants of the second conductivity type through a bottom of the trench, wherein the fourth dopants form a first supplemental compensation region.

19. The method according to claim 7 , comprising:

implanting the third dopants of the second conductivity type through the first trench sidewall, wherein the third dopants form the third compensation layer.

20. The method according to claim 7 , comprising:

implanting the further first dopants, through the further first sidewall of the further trench in the epitaxial layer on the main surface, to form the compensation layer extension of the first compensation layer in the epitaxial layer.

21. The method according to claim 7 , comprising:

removing the sacrificial layer, comprising the one or more portions of the one or more compensation layers formed by implanting the one or more dopants through the main surface of the silicon carbide substrate, at the main surface of the silicon carbide substrate.

22. A method of manufacturing a silicon carbide device, comprising:

providing a silicon carbide substrate comprising a drift layer of a first conductivity type and a trench extending from a main surface of the silicon carbide substrate into the drift layer;

implanting first dopants through a first trench sidewall of the trench, wherein:

the first dopants have a second conductivity type and are implanted at a first implant angle into the silicon carbide substrate;

at the first implant angle channeling occurs in the silicon carbide substrate; and

the first dopants form a first compensation layer extending parallel to the first trench sidewall; and

removing a sacrificial layer, comprising one or more portions of one or more compensation layers formed by implanting one or more dopants through the main surface of the silicon carbide substrate, at the main surface of the silicon carbide substrate.