IP Library › Granted Patent US 11,768,157
Granted Patent B2
US 11,768,157 · App. 18/098,083 · Granted Sep 26, 2023

Laser ablation spectrometry apparatus

Inventors: Jong Hyun Yoo (West Sacramento, CA); Chunyi Liu (Fremont, CA); Richard E. Russo (Walnut Creek, CA)
Assignee: Applied Spectra, Inc.
G01N21/718B23K26/048H01J49/0004H01J49/0463H01J49/0468H01J49/105
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Quick Facts
Patent No.
US 11,768,157
App. No.
18/098,083
Granted
Sep 26, 2023
Kind
B2
Abstract

Apparatus for laser induced ablation spectroscopy (LIBS) is disclosed. An apparatus can have a computer, a pulsed laser and a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a first optical spectrometer and a different branch can convey a second portion of the light to another optical spectrometer. The first spectrometer can be relatively wideband to analyze a relative wide spectral segment and the other spectrometer can be high dispersion to measure minor concentrations. The apparatus can further comprise an unbranched lightguide fiber bundle to provide more light to a low sensitivity spectrometer. The apparatus can include an inductively coupled plasma mass spectrometer ICP-MS and a computer instructions operable to provide normalized LIBS/ICP-MS composition analyses.

Claims (27)

1. An apparatus for ablation spectroscopy, comprising:

a pulsed laser configured to ablate material from a sample into an emissive plasma plume with a laser pulse;

a plurality of spectrometers, each having a wavelength separating element and a detector; and

a branched fiber optic lightguide having an entire bundle of optical fibers in a trunk section of the fiber optic lightguide adjoining a light receiving end of the trunk configured to collect light originating from the emissive plasma plume, the entire bundle of optical fibers in the trunk section being subdivided into a plurality of branches, each branch comprising a respective exclusive subset of the entire bundle of optical fibers, whereby each optical fiber in the exclusive subset of the entire bundle in a branch runs from the light receiving trunk end of the branched fiber optic lightguide to a terminal end of said branch;

wherein:

a terminal end of a first branch of a branched fiber optic lightguide is configured to emit a first portion of the collected light into a first spectrometer, and a terminal end of a second branch of the branched fiber optic lightguide is configured to emit a second portion of the collected light into a second spectrometer; and

the computer is configured to receive spectral data comprising first spectral data from the first spectrometer and second spectral data from the second spectrometer, and the computer includes tangible media comprising instructions and data operable to determine a representation of the sample composition based on the spectral data.

2. The apparatus of claim 1 wherein each of the optical fibers in the entire bundle of optical fibers in the trunk section of the branched fiber optic lightguide has a same diameter.

3. The apparatus of claim 2 wherein the number of optical fibers in the first branch of the branched fiber optic lightguide is larger than the number of optical fibers in the second branch of the branched fiber optic lightguide whereby the emitted first portion of the collected light is greater than the emitted second portion of the collected light.

4. The apparatus of claim 1 further comprising an unbranched fiber optic lightguide having two ends consisting of a light receiving end configured to collect light originating from the emissive plasma plume and a terminal end configured to emit collected light into a third spectrometer, wherein an entire bundle of optical fibers runs from the light receiving end of the unbranched fiber optic lightguide to the terminal end of the unbranched fiber optic lightguide, and the spectral data received by the computer further comprises spectral data from the third spectrometer.

5. The apparatus of claim 4 wherein each optical fiber within the unbranched and the branched optical fiber lightguides has an equal diameter.

6. The apparatus of claim 5 wherein the radiant flux of light emitted from the terminal end of the unbranched fiber optic lightguide is greater than the radiant flux of light emitted from the terminal end of the first branch or the radiant flux of light emitted from terminal end of the second branch of the branched fiber optic lightguide.

7. The apparatus of claim 4 wherein the third spectrometer has a Czerny-Turner wavelength separating element.

8. The apparatus of claim 4 wherein the third spectrometer has a Czerny-Turner wavelength separating element and an ICCD detector.

9. The apparatus of claim 4 wherein the third spectrometer has a higher resolution and narrower spectral range than any other spectrometer selected from among the plurality of spectrometers.

10. The apparatus of claim 4 wherein the first spectrometer is a relatively broadband spectrometer and the second spectrometer is a relatively narrowband spectrometer.

11. The apparatus of claim 4 wherein the first spectrometer has a detector selected from the group consisting of a CMOS detector and a CCD detector.

12. The apparatus of claim 11 wherein the second spectrometer has a Czerny-Turner wavelength separating element.

13. The apparatus of claim 12 wherein the second spectrometer has an ICCD detector.

14. The apparatus of claim 4 comprising an array of spectrometers having respective Czerny-Turner wavelength separating elements, wherein each spectrometer of the array is configured to cover a different preselected wavelength region and the array of spectrometers is configured to capture a broad range of wavelengths at one time.

15. The apparatus of claim 4 further comprising:

an inductively coupled plasma mass spectrometer operable to determine ion mass to charge ratios and ion mass to charge peak intensity values from a portion of the ablated sample site material;

an enclosure configured to enclose the sample during the pulsed laser ablation;

a flow channel connecting the enclosure to an inductively coupled mass spectrometer; and

a gas flow system configured to provide a flow of unreactive carrier gas to the enclosure wherein the portion of the laser pulse ablated sample site material is transported through the flow channel to the inductively coupled mass spectrometer;

wherein the computer is further configured to receive the ion mass to charge ratio peak intensity values from the inductively coupled plasma mass spectrometer, and the tangible media comprises instructions and data operable to determine the selected sample site composition based on the spectral data and the normalized ion mass to charge ratio peak intensity values.

16. The apparatus of claim 15 wherein the data and instructions are operable for the computer to detect a pulse-to-pulse variation in an amount of material ablated from a selected sample site by a laser pulse based on a signal level obtained from the spectral data; normalize ion mass to charge ratio peak intensity values for the pulse-to-pulse variation in the amount of material ablated from the sample using the signal level; and determine the selected sample site composition based on the spectral data and the normalized ion mass to charge ratio peak intensity values.

Continuity (14)
Continuation In Part 17929761 · Sep 6, 2022
Continuation 17366023 · Jul 2, 2021
Continuation 17073289 · Oct 16, 2020
Continuation In Part 16293512 · Mar 5, 2019
Continuation 15488422 · Apr 14, 2017
Continuation In Part 15201494 · Jul 3, 2016
Continuation In Part 13835582 · Mar 15, 2013
Continuation 13492923 · Jun 10, 2012
Continuation In Part PCTUS2011054994 · Oct 5, 2011
Continuation In Part 12435970 · May 5, 2009
Provisional Application 62915653 · Oct 16, 2019
Provisional Application 61390117 · Oct 5, 2010
Provisional Application 61126633 · May 5, 2008
Related Publication 20230152236A1 · May 18, 2023