Trench capacitor having improved capacitance and fabrication method thereof
A semiconductor memory device includes a substrate; a film stack on the substrate; a silicon device layer on the film stack; and a trench with corrugated sidewall surface extending into the silicon device layer, the film stack, and the substrate. A trench capacitor is located in the trench. The trench capacitor includes an inner electrode and an outer electrode with a node dielectric layer therebetween. The node dielectric layer is in direct with the film stack and the bulk semiconductor substrate. A transistor is disposed on the substrate. The transistor includes a source region and a drain region, a channel region between the source region and the drain region, and a gate over the channel region. The source region is electrically connected to the inner electrode of the trench capacitor.
1. A semiconductor memory device, comprising:
a bulk semiconductor substrate;
a film stack on the bulk semiconductor substrate;
a silicon device layer on the film stack;
at least one trench with corrugated sidewall surface extending into the silicon device layer, the film stack, and the bulk semiconductor substrate;
at least one trench capacitor located in the at least one trench, the at least one trench capacitor comprising an inner electrode and an outer electrode with a node dielectric layer therebetween, wherein the node dielectric layer is in direct with the film stack and the bulk semiconductor substrate;
at least one transistor on the substrate, wherein the at least one transistor comprises a source region and a drain region, a channel region between the source region and the drain region, and a gate over the channel region;
a conductive layer buried in the at least one trench to electrically connect the source region with the inner electrode, wherein the conductive layer is in direct contact with a sidewall of the source region;
a trench isolation layer disposed around the conductive layer; and
a silicide layer continuously capping the source region and the conductive layer and extending to the trench isolation layer, wherein the silicide layer covers an entire top surface of the conductive layer and is in direct contact with the conductive layer and the trench isolation layer.
2. The semiconductor memory device according to claim 1 , wherein the film stack comprises alternating layers.
3. The semiconductor memory device according to claim 2 , wherein the alternating layers comprise alternating silicon germanium (SiGe) epitaxial layers and silicon (Si) epitaxial layers.
4. The semiconductor memory device according to claim 3 , wherein each of the SiGe epitaxial layers has a thickness of about 2-20 nm and each of the Si epitaxial layers has a thickness of about 2-20 nm.
5. The semiconductor device memory according to claim 3 , wherein the at least one trench comprises recesses in the SiGe epitaxial layers, respectively.
6. The semiconductor device according to claim 5 , wherein the inner electrode layer comprises fin-like electrodes laterally extending into the recesses, respectively.
7. The semiconductor device according to claim 1 , wherein the at least one trench has a depth ranging between 200 and 1000 nm.
8. The semiconductor device according to claim 1 , wherein the conductive layer comprises W, Ti, TiN, Ta, TaN, Cu, Au, Ni, N-type doped polysilicon, or any combinations thereof.
9. The semiconductor device according to claim 1 further comprising:
an annular out-diffusion region disposed in the silicon device layer and surrounding a lower portion of the conductive layer.
10. The semiconductor device according to claim 9 , wherein the annular out-diffusion region is in direct contact with the conductive layer and is merged with the source region.