IP Library › Granted Patent US 11,780,210
Granted Patent B2
US 11,780,210 · App. 16/574,252 · Granted Oct 10, 2023

Glass dielectric layer with patterning

Inventors: Jieying Kong (Chandler, AZ); Gang Duan (Chandler, AZ); Srinivas Pietambaram (Chandler, AZ); Patrick Quach (Chandler, AZ); Dilan Seneviratne (Chandler, AZ)
Assignee: Intel Corporation
B32B17/10192B32B15/20H01L23/481H01L24/09H01L2224/02379
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Quick Facts
Patent No.
US 11,780,210
App. No.
16/574,252
Granted
Oct 10, 2023
Kind
B2
Abstract

Embodiments of the present disclosure may generally relate to systems, apparatus, and/or processes directed to a manufacturing process flow for packages that include one or more glass layers that include patterning features, such as electrically conductive traces, RDLs, and vias within the packages. In embodiments, a package may include a glass layer with a first side and a second side opposite the first side, where the glass layer is a dielectric layer. The package may include another layer coupled with the first side of the glass layer, and a pattern on the second side of the glass layer to receive a deposited material in at least a portion of the pattern.

Claims (16)

1. A package comprising:

a glass layer with a first side and a second side opposite the first side, wherein the glass layer is a dielectric layer;

another layer coupled with the first side of the glass layer; and

a pattern on the second side of the glass layer to receive a deposited material in at least a portion of the pattern, wherein the pattern includes a trace etched in glass and a through-glass via.

2. The package of claim 1 , wherein the trace etched in glass is to provide a redistribution layer (RDL).

3. The package of claim 2 , wherein the RDL includes a fan out.

4. The package of claim 1 , wherein the deposited material includes copper or a copper alloy, or wherein the deposited material includes a seed layer.

5. The package of claim 1 wherein the another layer is a selected one of a substrate, an adhesive layer, or another glass layer.

6. The package of claim 1 , wherein the glass layer is a first glass layer, and the deposited material is a first deposited material; and

further comprising:

a second glass layer with a first side and a second side opposite the first side, wherein the first side of the second glass layer is coupled with the second side of the first glass layer; and

a pattern on the second side of the second glass layer to receive the second deposited material in at least a portion of the pattern.

7. The package of claim 6 , wherein the another layer is a first another layer; and

further comprising a second another layer between the first side of the second glass layer and the second side of the first glass layer.

8. The package of claim 6 , further comprising the first deposited material and the second deposited material, wherein the first deposited material and the second deposited material are electrically conductive or are electrically coupled.

9. The package of claim 8 , wherein the first deposited material and the second deposited material are different materials.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 25, 2019
From: KONG, JIEYING; DUAN, GANG; PIETAMBARAM, SRINIVAS; QUACH, PATRICK; SENEVIRATNE, DILAN
To: INTEL CORPORATION
Reel/Frame 051102/0746 →
Continuity (1)
Related Publication 20210078296A1 · Mar 18, 2021