Semiconductor device and method for fabricating the same
A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate; forming a first top electrode on the first MTJ and a second top electrode on the second MTJ; forming a passivation layer on the first MTJ and the second MTJ; removing part of the passivation layer so that a top surface of all of the remaining passivation layer is lower than a top surface of the first electrode; and forming a ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ.
1. A method for fabricating semiconductor device, comprising:
forming an inter-metal dielectric (IMD) layer on a substrate;
forming a first metal interconnection and a second metal interconnection in the IMD layer;
forming a first magnetic tunneling junction (MTJ) on the first metal interconnection and a second MTJ on the second metal interconnection;
forming a first top electrode on the first MTJ and a second top electrode on the second MTJ;
forming a passivation layer on the first MTJ and the second MTJ and directly contacting the IMD layer, wherein a bottommost point of a top surface of the passivation layer between the first MTJ and the second MTJ is higher than a top surface of the first MTJ;
removing part of the passivation layer so that a top surface of all of the remaining passivation layer is lower than a top surface of the first electrode; and
forming a ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ.
2. The method of claim 1 , further comprising:
forming a cap layer on the IMD layer, the first MTJ, and the second MTJ;
forming the passivation layer on the cap layer;
removing the passivation layer adjacent to the first MTJ and the second MTJ so that all of the remaining passivation layer is between the first MTJ and the second MTJ; and
forming the ULK dielectric layer on the IMD layer and the remaining passivation layer.
3. The method of claim 1 , further comprising:
forming a cap layer on the IMD layer, the first MTJ, and the second MTJ;
removing part of the cap layer to form a first spacer and a second spacer adjacent to the first MTJ and a third spacer and a fourth spacer adjacent to the second MTJ;
forming the passivation layer on the IMD layer, the first MTJ, and the second MTJ;
removing the passivation layer adjacent to the first spacer and the fourth spacer so that all of the remaining passivation layer is between the second spacer and the third spacer; and
forming the ULK dielectric layer on the IMD layer, the first MTJ, the second MTJ, and the remaining passivation layer.
4. The method of claim 1 , further comprising performing an atomic layer deposition (ALD) process to form the passivation layer.
5. The method of claim 1 , wherein a top surface of the remaining passivation layer between the first MTJ and the second MTJ comprises a V-shape.
6. The method of claim 5 , wherein the V-shape is lower than a top surface of the first top electrode.
7. The method of claim 5 , wherein an angle of the V-shape is greater than 100 degrees.
8. A method for fabricating semiconductor device, comprising:
forming a first magnetic tunneling junction (MTJ) and a second MTJ on a substrate;
forming a first top electrode on the first MTJ and a second top electrode on the second MTJ;
forming a passivation layer on the first MTJ and the second MTJ;
removing part of the passivation layer so that all of the remaining passivation layer is between the first MTJ and the second MTJ; and
forming a ultra low-k (ULK) dielectric layer on the first MTJ and the second MTJ.